JPS60245481A - 圧電型アクチュエータ - Google Patents

圧電型アクチュエータ

Info

Publication number
JPS60245481A
JPS60245481A JP59098611A JP9861184A JPS60245481A JP S60245481 A JPS60245481 A JP S60245481A JP 59098611 A JP59098611 A JP 59098611A JP 9861184 A JP9861184 A JP 9861184A JP S60245481 A JPS60245481 A JP S60245481A
Authority
JP
Japan
Prior art keywords
piezoelectric element
displacement
notches
actuator
longitudinal beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59098611A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449351B2 (forum.php
Inventor
Makoto Kawai
真 河合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP59098611A priority Critical patent/JPS60245481A/ja
Publication of JPS60245481A publication Critical patent/JPS60245481A/ja
Publication of JPH0449351B2 publication Critical patent/JPH0449351B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59098611A 1984-05-18 1984-05-18 圧電型アクチュエータ Granted JPS60245481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59098611A JPS60245481A (ja) 1984-05-18 1984-05-18 圧電型アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59098611A JPS60245481A (ja) 1984-05-18 1984-05-18 圧電型アクチュエータ

Publications (2)

Publication Number Publication Date
JPS60245481A true JPS60245481A (ja) 1985-12-05
JPH0449351B2 JPH0449351B2 (forum.php) 1992-08-11

Family

ID=14224384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59098611A Granted JPS60245481A (ja) 1984-05-18 1984-05-18 圧電型アクチュエータ

Country Status (1)

Country Link
JP (1) JPS60245481A (forum.php)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06167646A (ja) * 1991-02-26 1994-06-14 Tesco:Kk レンズ焦点距離の調節方式及び同方式を用いたバーコード読み取り方式
EP2325909A1 (en) * 2009-11-24 2011-05-25 BAE Systems PLC MEMS device and method of fabrication
WO2011064568A1 (en) * 2009-11-24 2011-06-03 Bae Systems Plc Mems device and method of fabrication
US8662453B2 (en) 2008-10-23 2014-03-04 Mbda Uk Limited Relating to air-breathing flight vehicles

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173384A (en) * 1981-04-20 1982-10-25 Hitachi Ltd Actuator
JPS58140173A (ja) * 1982-02-15 1983-08-19 Seiko Epson Corp 固体変位装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173384A (en) * 1981-04-20 1982-10-25 Hitachi Ltd Actuator
JPS58140173A (ja) * 1982-02-15 1983-08-19 Seiko Epson Corp 固体変位装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06167646A (ja) * 1991-02-26 1994-06-14 Tesco:Kk レンズ焦点距離の調節方式及び同方式を用いたバーコード読み取り方式
US8662453B2 (en) 2008-10-23 2014-03-04 Mbda Uk Limited Relating to air-breathing flight vehicles
EP2325909A1 (en) * 2009-11-24 2011-05-25 BAE Systems PLC MEMS device and method of fabrication
WO2011064568A1 (en) * 2009-11-24 2011-06-03 Bae Systems Plc Mems device and method of fabrication

Also Published As

Publication number Publication date
JPH0449351B2 (forum.php) 1992-08-11

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