JPS60243951A - 電子線装置における軸合せ方法 - Google Patents

電子線装置における軸合せ方法

Info

Publication number
JPS60243951A
JPS60243951A JP59099378A JP9937884A JPS60243951A JP S60243951 A JPS60243951 A JP S60243951A JP 59099378 A JP59099378 A JP 59099378A JP 9937884 A JP9937884 A JP 9937884A JP S60243951 A JPS60243951 A JP S60243951A
Authority
JP
Japan
Prior art keywords
electron beam
objective lens
scanning
supplied
dynamic focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59099378A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035019B2 (enrdf_load_stackoverflow
Inventor
Seiichi Nakagawa
中川　清一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP59099378A priority Critical patent/JPS60243951A/ja
Publication of JPS60243951A publication Critical patent/JPS60243951A/ja
Publication of JPH035019B2 publication Critical patent/JPH035019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59099378A 1984-05-17 1984-05-17 電子線装置における軸合せ方法 Granted JPS60243951A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59099378A JPS60243951A (ja) 1984-05-17 1984-05-17 電子線装置における軸合せ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59099378A JPS60243951A (ja) 1984-05-17 1984-05-17 電子線装置における軸合せ方法

Publications (2)

Publication Number Publication Date
JPS60243951A true JPS60243951A (ja) 1985-12-03
JPH035019B2 JPH035019B2 (enrdf_load_stackoverflow) 1991-01-24

Family

ID=14245860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59099378A Granted JPS60243951A (ja) 1984-05-17 1984-05-17 電子線装置における軸合せ方法

Country Status (1)

Country Link
JP (1) JPS60243951A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144469A (enrdf_load_stackoverflow) * 1974-10-14 1976-04-16 Hitachi Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144469A (enrdf_load_stackoverflow) * 1974-10-14 1976-04-16 Hitachi Ltd

Also Published As

Publication number Publication date
JPH035019B2 (enrdf_load_stackoverflow) 1991-01-24

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