JPS60243394A - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number
JPS60243394A
JPS60243394A JP9449785A JP9449785A JPS60243394A JP S60243394 A JPS60243394 A JP S60243394A JP 9449785 A JP9449785 A JP 9449785A JP 9449785 A JP9449785 A JP 9449785A JP S60243394 A JPS60243394 A JP S60243394A
Authority
JP
Japan
Prior art keywords
wheel body
ring
turbine
groove
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9449785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452879B2 (US06486227-20021126-C00005.png
Inventor
Juichi Kawaguchi
川口　重一
Kiyoshi Narita
潔 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP9449785A priority Critical patent/JPS60243394A/ja
Publication of JPS60243394A publication Critical patent/JPS60243394A/ja
Publication of JPH0452879B2 publication Critical patent/JPH0452879B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP9449785A 1985-04-30 1985-04-30 ターボ分子ポンプ Granted JPS60243394A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9449785A JPS60243394A (ja) 1985-04-30 1985-04-30 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9449785A JPS60243394A (ja) 1985-04-30 1985-04-30 ターボ分子ポンプ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP59038959 Division 1984-02-29 1984-02-29

Publications (2)

Publication Number Publication Date
JPS60243394A true JPS60243394A (ja) 1985-12-03
JPH0452879B2 JPH0452879B2 (US06486227-20021126-C00005.png) 1992-08-25

Family

ID=14111939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9449785A Granted JPS60243394A (ja) 1985-04-30 1985-04-30 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS60243394A (US06486227-20021126-C00005.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
JPH01138397A (ja) * 1987-08-24 1989-05-31 Arthur Pfeiffer Vakuumtech Wetzlar Gmbh 分子ポンプ
JPH02264197A (ja) * 1988-12-30 1990-10-26 Shimadzu Corp 分子ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
JPH01138397A (ja) * 1987-08-24 1989-05-31 Arthur Pfeiffer Vakuumtech Wetzlar Gmbh 分子ポンプ
JPH02264197A (ja) * 1988-12-30 1990-10-26 Shimadzu Corp 分子ポンプ

Also Published As

Publication number Publication date
JPH0452879B2 (US06486227-20021126-C00005.png) 1992-08-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees