JPS60242996A - 無塵把持装置 - Google Patents

無塵把持装置

Info

Publication number
JPS60242996A
JPS60242996A JP59101049A JP10104984A JPS60242996A JP S60242996 A JPS60242996 A JP S60242996A JP 59101049 A JP59101049 A JP 59101049A JP 10104984 A JP10104984 A JP 10104984A JP S60242996 A JPS60242996 A JP S60242996A
Authority
JP
Japan
Prior art keywords
dust
gripping
cover
wafer
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59101049A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327350B2 (https=
Inventor
隆憲 舟橋
明良 中田
夛田　治夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59101049A priority Critical patent/JPS60242996A/ja
Publication of JPS60242996A publication Critical patent/JPS60242996A/ja
Publication of JPH0327350B2 publication Critical patent/JPH0327350B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP59101049A 1984-05-18 1984-05-18 無塵把持装置 Granted JPS60242996A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59101049A JPS60242996A (ja) 1984-05-18 1984-05-18 無塵把持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59101049A JPS60242996A (ja) 1984-05-18 1984-05-18 無塵把持装置

Publications (2)

Publication Number Publication Date
JPS60242996A true JPS60242996A (ja) 1985-12-02
JPH0327350B2 JPH0327350B2 (https=) 1991-04-15

Family

ID=14290263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59101049A Granted JPS60242996A (ja) 1984-05-18 1984-05-18 無塵把持装置

Country Status (1)

Country Link
JP (1) JPS60242996A (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5790956A (en) * 1980-11-28 1982-06-05 Hitachi Ltd Gripper for wafer
JPS5848914A (ja) * 1981-09-18 1983-03-23 Toshiba Corp ウエハピンセツト

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5790956A (en) * 1980-11-28 1982-06-05 Hitachi Ltd Gripper for wafer
JPS5848914A (ja) * 1981-09-18 1983-03-23 Toshiba Corp ウエハピンセツト

Also Published As

Publication number Publication date
JPH0327350B2 (https=) 1991-04-15

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