JPS60236062A - Ultrasonic test equipment - Google Patents

Abstract

PURPOSE:To eliminate an aberration in an ultrasonic focusing, and to improve a flaw detecting resolution by giving a delay to a transmission timing of each vibrator of an array type probe, and also adding simultaneously a receiving signal. CONSTITUTION:A transmission timing of a vibrator 9 being in a distance (ai) from a center point P of a probe aperture size A by a selected vibrator group of an array type probe 1 is set based on an ultrasonic refractive angle phi of a body to be inspected 8 and an ultrasonic contact medium 7. As a result, an ultrasonic focusing is executed to a desired position. A scan of a vibrator is executed by moving it by N/M of a vibrator array pitch P' in the vibrator array direction. At the time of reception, an ultrasonic beam is considered to be a parallel beam, and a receiving signal is added without giving a delay time between each vibrator. According to such a constitution, there is the same effect that a reflected echo from an area of the ultrasonic beam brought to ultrasonic focusing is received by one usual probe, and the focusing accuracy is high, therefore, the azimuty resolution is improved comparing with a conventional one.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention uses an array I-reprobe to
r)-〇 ultrasonic flaw detection equipment ``Niryo related J'6゜ [Technical back shell of the invention and -t 1-11)], 1.4.1 Electronic scanning type ultra-1 wave flaw detection In the l+lλ Ge/V Luss reflection method, multiple ultrasonic beams are arranged in a pure, curved, or planar shape and a lF-γ ray Qll probe r is used. Now, the ultrasonic beam formed in the excitation Jtrjl-1 specimen is controlled by the 11 prefecture itself, and received by a high-performance transducer (the ultra-II wave reception signals obtained in step 7 are delayed and boosted). Therefore, ultrasonic δν information is selectively collected from within a desired area of the subject and used for the detection of the subject.

Here, a case where flaw detection is performed on the transmitting/receiving surface of an array type probe via a contact medium such as acrylic or water will be described with reference to FIG. That is, focus on the ultrasound main beam 2 transmitted from the center of the array 1-li probe 1, and focus on the desired focal point 3 (
The time difference corresponding to the distance difference 6 between each excavator and the cylindrical surface 5 centered on the virtual concentration point 4 (N[Ittz XC2/C+) calculated from the distance tlif17-z) as shown in the figure is and tj respectively. When excited in this manner, the ultrasonic beams from each vibrator are not focused on the desired focusing point 3, resulting in so-called convergence. This focusing difference is caused by the contact medium (distance t
I: The sound speed difference C1-C between the sound speed CI7 and the object (sound speed CI) S is large, and the ultrasound focusing distance in the object 8 is 1. However, this will occur significantly if the aperture size A is not sufficiently large compared to the aperture size A of the array type probe.

Therefore, in flaw detection using the contact medium 7, even if each vibrator is excited by giving a delay time, sufficient ultrasonic focusing cannot be obtained, and therefore good ultrasonic flaw detection cannot be performed.

Further, in the electronic scanning type ultrasonic flaw detection device described above, a transmitter is required in correspondence with the vibrator. Further, it is necessary to delay the received signals by a predetermined time corresponding to the time of transmission and add the waveforms. In this case, there are various delay methods for this received signal, such as an analog delay method combining delay lines, a CCn element r-, and a digital delay method using analog/digital conversion. In the j type, the configuration is complicated due to the required number of transmitters to be installed, and there is a problem in that the (g process is performed in the number of steps).

[Purpose of the invention]

The present invention is based on the following considerations. 1st thing,
The purpose of this is to
Obtain t17 focusing and also reduce tII of the ultrasound transmitter.
-1- It is an object of the present invention to provide an ultrasonic flaw detection device fIM which is capable of simplifying each of the eight receivers.

[Outline of the invention]

According to the present invention, the supert(branch If1% horn/I1.: 11
, the flaws are detected through a VC ultrasonic contact medium between the array type probe and the object, as in the σ method, etc.
? '+ Change the transmission timing of lb4 mover to -1・h11
Based on the ultrasonic refraction color black with the ultrasonic contact medium described in Wave God Table 1, the ultrasonic waves concentrated at the time of ultrasonic transmission j, I are set to 1 of the integer part of the array pitch of 1r. Every"! +6! II
When moving toward the I+-f array knob and performing electronic scanning, the delay time that defines the 14-hour transmission timing is set only for the ultrasonic transmitter: l/, and when receiving, the reception from each transducer is 6. It is characterized by transmitting signals at the same time.

[Examples of the invention]

Fig. 2 shows the ultrasonic flaw detection device according to Akira Ishimoto,
Description will be made based on an example. In Figure 2, 7&
: is a play Qli contactor composed of 9 transducers. 10 corresponds to each vibrator 9, J+? This is a transmitter/IT+ consisting of tf number of ultrasonic transmitters. 1
Reference numeral 1 denotes a switch for selecting a received signal from each camera element 9. Reference numeral 12 denotes a receiver group composed of receivers (H receivers) into which the received signal that has passed through the electronic switchboard II is taken in.

131, J is an adder that receives the outputs of the respective receivers of the receiver group 12 and adds them to i.

14 to 1 transmitter group 10I7) name transmitter to transmission delay time (
It'-i (+: 4, %4Q□ is a time setting device that applies a reception delay time signal synchronized with the time signal to each receiver of the receiver group I2. 15 is data + j dimension In: 18 from vessel 16
This computer provides control signals to the delay time setting unit 14, the electronic switch 1 and the adder t't, and also performs input/output to the signal generators 17 and 11). t: Ii+::
Data setting device 161J number processing device 17Q) f
- Control evening reading (M)j'c jR>'zi
, (.18 is an image display device that displays the output of the signal processor 17, and this image 1ψ6/1〈device 7
s C, (1) The resulting signal is input to the signal processor I7.

Next, regarding the detailed explanation 1 of the above configuration, FIG. 2 shows that by receiving the L' and hth waves, a single excited monthly wave is given to the corresponding vibrator 9. The delay time setter 14 receives the delay time 7° from the computer 5, resets the internal register to 7°, and sets the delay time setting to 7°, and further sets the delay time setting z4 when the reset of the predetermined register is completed.
The internal oscillator of it operates and sends a pulse signal to the transmitter group 10 according to the input value (+T).

Note that the selection of the register in the delay time setting device 14 is performed by setting the electronic switch 1, selecting the addition signal of the adder 13, and transmitting the selected transducer group data to the signal processor 17 from the computer 15. This is what is output.

Next, the received signals from the transducer group 9 selected by the electronic switch 11 are each amplified by the receiver group 12 and then input to the adder 13 where they are analog-added. Here, the adder 13 performs non-delayed addition or delayed addition of manually input received signals, and this added received signal is adjusted to an appropriate signal level by the attenuator and amplifier built in the adder I3, and then sent to the signal processor. 17.

The addition received signal input to the signal processor 17 is processed through signal processing [
11! vessel! After the signal is detected in the signal processor 7, a signal for brightness modulation to an image display 18 having a CRT (cathode ray tube) is generated according to a discretization level in the signal processor 17, which can be set arbitrarily. If the predetermined signal level is 100 degrees, this brightness modulation signal is 100% or more, 100 to 50 degrees, 5 degrees
It is a signal output with hierarchical 1 for each stage from 0% to 20% and below 20%, and of course it is a signal output with 1' for super 1' wave.
411'j for brightness modulation taking into consideration separation and attenuation characteristics. In addition, the signal processor 17 receives the data of the selected transducer group and the super i''1 wave focusing position data from the combination controller J5, and adjusts the image sweep speed to the white ψ display device 18. 3N and others receive a cursor 11°111, which will be described later, from the image display 18, and convert the cursor position into the ultrasonic beam propagation distance length based on the correspondence with the image sweep speed. 'Output to C computer.',・±
Six:,1? ! The bow processing unit 17 outputs data in which one song, one image, 21, 17, and 17 L scan line groups are selected from the picture f, I, I, and I8 (r + j, AS I - zo, These A/S:7-f table waveform signal groups are displayed on the image display 114.
Output 17 to

Image display a 1 B & 1 sll description, #, t:
') K CRT yl alofv! A cursor that can be moved arbitrarily on the sweep and a group of scan lines for displaying 1 "cursor 31" is displayed.
These cursor position signals are output to the signal processor 17. It also receives a sweep signal and a brightness modulation signal for image display from the signal processing 17, displays a B scope image (cross-sectional image) of the material to be tested, receives a group of waveform signals displayed in A-1, and receives a group of waveform signals displayed in A-1. 1 display on the CRT.

Next, as shown in FIG. 4, the data setting device 16 uses a digital switch 19 or the like to set the sound velocity CI in the ultrasonic contact medium and the sound velocity C2 in the subject, which are necessary for externally setting the electronic scanning. , the transducer arrangement pitch P of the array type probe 1 , the number of combinations of transducers 9 during transmission and reception, and the pitch of the electronic scanning line are provided to the computer 15 via the data path line via the decoder 20 and the import 21 It is something. The computer 15 uses these numerical data and the ultrasonic coupling medium length and the ultrasonic focusing distance in the subject based on the ultrasonic propagation distance corresponding to the cursor position from the signal processor 17 to calculate each predetermined value. Calculate the delay time that should be set for the vibrator. In addition, the computer-9-ta 15 is the tune white ψ output from the 1g processor I7.
The timing (rt 'j 'K
4g '3 Received from sister 17, this computer I
5p411 (Program that was set up in advance &('
Select the silk combination of the transducer group to be scanned next time.7
TeJ! '1 hex 11 1 hour setting device 14, electronic switch, fl
I, addition'pE l:; t3 and signal processor I7
It's easy to output to.

Next, the effects (flaw detection force θ,) of this embodiment are listed (7-(explained in order).

The first method is shown in FIG.
Aperture size Distance a-(delay time ΔT1 given to a certain lift r9 from the center point P of the person is determined as follows.

Ru. Here, it is assumed that the array type probe 1 and the wandering specimen 8 are set to be tilted at an angle θ. In this case, the following formula (
1) The refraction angle ψ of the ultrasonic beam to the subject 8 can be easily determined by Snell's law where −CyHe is J. Furthermore, we know that the ultrasonic beam from the center point P propagates in the ultrasonic contact IN body 7 by a distance of M+1 and 1110-, and in the object 8 by a distance t1 at the focal point 31. It is determined.

J-θ/self -8 stone ψ/C! ...(1) ΔT, =
(+ (84-blcos)2+(tI-blsl
nθ)2)/CI(1+/self+t@/CZ)...
(2) Here, b is I11 as shown in FIG.
1λ of position! is the distance between the ultrasonic beam from the moving element and the ultrasonic beam from the center point P on the surface of the subject 8,
This can be determined by the following (3) according to Snell's law.

(t1slnθ0al(XISθ−+) l )/(
〆(aI-1)ICO8θ)2+(tI-b l5in
θ)2×c1) Here, bl is an implicit function in equation (3), and it is generally difficult to fit it into a closed form.

In this first method, 1, transform equation (3) and 't'V
It is expressed as in equation (4), and 7 bars J + b in the route of equation (4) is approximated by the bl car of equation (5). That is, as shown in FIG.
Distance from the surface of 1.H 1 * X C * ICll1r
'it? Before c time N+: (17 This is the distance between the ultrasonic beam from the transducer 9 of $1a1 and the ultrasonic beam from the center point P on the surface -F of the object 80, b *= a -14C2/(1+ C1+lI C2
)cmθ-(5)1 Therefore, from equations (4) and (5), bl can be easily determined from equation (6) below, and from equation (2), the delay time Δ'r1 is calculated.

...(6) On the other hand, when the array type probe 1 is arranged parallel to the subject 8, it is simplified and expressed by equation (2) 1 and equation (6) 1, respectively.

ΔT17 / (aH−bρ2+t+ 2/cI vbl
2+t2'/Cz-(4/cI+/Cs)...
(2) Even if there is a match, the values obtained strictly using equations (2) and (3) match with an accuracy of 1 or more, and the delay time ΔT1 obtained from the conventional equations (5) and (2) Compared to the previous case where the value had an error of 10% or more from the exact value, the accuracy is extremely high.

13- As mentioned above, in this example ('', r-ta fly) 5i
Based on the output from the quadrupler 16, it is easy to generate the MIn wave beamle (
Since the delay time ΔT (transmission timing) is set by this ultrasonic refraction angle ψ, the ultrasonic waves are concentrated at the desired position and a good flaw detection image (A scope, B scope) is obtained. It will be done.

Next, in the second method of this example, the ultrasonic focusing point is moved in the electronic scanning direction to a transducer array pitch of N7M (N, Md
An example of the operation when electronic scanning is performed by moving an integer (N≦(M/2)) will be explained below. That is, as shown in FIG. 6(a), with the predetermined combination of transducers kept the same and fC, the ultrasound main beam 2 reaches a predetermined focal depth of the subject 8 at a position W l
It moves by N7M of the vibrator pitch P at m. 1 - To set the delay time ΔT, use equation (6) for the left eye, add the number of movements of the ultrasound focal point PX (N7M) to al given by (6)', or use an attenuated value. b[ is calculated, and the survival time ΔT1 is obtained from equation (2) or (2)'. FIG. 6(b) shows an example in which the ultrasonic focal point is moved left and right by 14-1/3 of the transducer pitch P, but the transducer combinations AI and A! and AI, respectively.
It is observed that the ultrasonic focusing point is moved as indicated by the O mark and the X mark, and the scanning line density of the ultrasonic wave becomes three times that of the female transducer pitch P. Although FIG. 6(,)(b) shows the case without the ultrasonic coupling medium for simplicity, it is of course possible to use the ultrasonic coupling medium 7 as in the first method. It can also be applied to

FIG. 7 shows an example of electronic scanning using the method described above. That is, after tilting the ultrasonic main beam 2 in the direction of the dashed line S in FIG. ing. By changing the inclination direction of the main ultrasonic beam 2 for each electronic scan in this way, the angle of refraction of the ultrasonic wave toward the object 8 can be specified as shown in FIG. 8 during the -th electronic scan. Therefore, ultrasonic waves are reflected in accordance with the inclination angle of the defect 23 inside the object 8. Therefore, an ultrasonic flaw detection id+i image corresponding to the specified ultrasonic refraction angle can be obtained 71, and f-11 cutting for inclined defects can be easily performed.

In the above, the first method and the second method may be used in combination or individually, and can be selected at any time.

Next, the third force rJ of this embodiment: , during ultrasound transmission, the ultrasound beam is concentrated and the focal point is shifted 411, and during reception, the ultrasound beam is made into a parallel beam, that is, for each imaging : This is a diagram of the 11Y sail time during the transmission and reception of the 11Y sail time between f. In FIG. 8, the ultrasonic transmission beam 24fJ is focused by fli control of the delay time and is incident on the 1t-C defect 23, but the reflected ultrasonic beam θ
The beam follows the reflection directivity of the t,I defect. therefore,
If the ultrasound beam is focused, the reflected echo of the ultrasound beam (IJ1. or C) will be reflected by the -J13.
The same effect occurs when the waves are received by the tentacles. This allows for
Compared to the transmission and reception of ultrasonic waves by Hatake's probe r-, this Jθ has a higher deflection focusing accuracy than the conventional one, so the azimuth resolution is significantly improved. Figure 9 shows that when a defect 23 in an artificial side hole is detected and an array type probe is used to focus ultrasonic waves for transmission and reception, only transmission is focused, but reception is not focused. This shows the received ultrasonic waveform when neither of the two images are focused.

It can also be seen from FIG. 9 that sufficient flaw detection performance is achieved even if ultrasonic focusing is performed only during transmission. Note that Fig. 9 is an example when no ultrasonic medium is used. Fig. 9 (a) shows the flaw detection mode, and in Fig. 9 (b) El is transmitted (both at 8 o'clock and during reception). Defects 23 when ultrasound is not focused
(A) is an A-sco-1 display of the reflected echo of (A), and El is an A-scoe 7'' display of the reflected echo of (A), which is defect 2.9 when the ultrasound is focused during transmission and is not focused during reception. , E3 is an A Kuko-1 representation of the reflected echo of defect 23(A) when ultrasound is focused during both transmission and reception.

As shown in FIG. 9(-)(b), it is clear that similar effects can be obtained even when an ultrasonic contact medium is used. Therefore, analog (a ′r!J's 11
≠ A complicated configuration for performing sail addition can be omitted. In the system, the first, second, and third methods may be used in combination, or may be performed individually, and can be selected at any time.

This embodiment may be modified (7) as listed below. In this embodiment, the surface of the object 8 and the array type probe 1 are
Although the case is shown in which the vibration arrangement direction and the perpendicular direction E7 are arranged parallel to each other, it is of course possible to arrange the arrangement at an angle as shown in Fig. 1().

(2) In this embodiment, the transmitting transducer group and the receiver stationary group are the same, but the receiving monthly transducer group and the transmitting transducer group may be different. In this case, Fig. 11(a)
As shown in 4ki for reception! l! The + child group is fixed, and only the transmitting Di group is set to the 1st wave loop 22, and the *Ik14 child group is fixed to the wave transmitting 4 as shown in Fig. 11 (11), and the receiving wave is For ``drunk group +j'' ``drunk r-nol: test 22
It is a +r function to do something like that. Friends, I've never written an easy method for finding tan gum! hiIN VC up! 18- can be realized with high accuracy.

(3) It is also possible to sequentially change the delay time of the transmitting transducer group programmatically and transmit the ultrasonic beam in a so-called sector scanning (fan-shaped scanning) method. In the case of (2) above, for example, the B scozo display on the CRT is determined by the distance 1 between the main beams of the receiving transducer group 3 and the transmitting transducer group 34, as shown in FIG. , the transmission beam setting angle α by delay time control, and the distance ts between the array type probe and the subject.
By knowing the beam propagation time of the received signal, the image sweep signal T is created by the following equation (7).
"good.

However, c,'(c2...(7) where 〒, C2'+C2 are the sound velocities at the time of transmitting and receiving the ultrasonic beam to the subject, respectively, and L-nC!=C2
It is clear that the formula is simpler than in the case of .

According to the above formula (''), +r!+i image sweeping 1 is 7-E2'', which can be created according to the beam propagation time. Furthermore, the image sweep (t, t 7i+ to calculate the delay time for focusing the ultrasonic wave from the M number T)
M-piped image sweep 1. From the cursor of x, l' m: to the formula, L: to C1t, and t2 to the formula (2) -4
You only need to purchase hr, J set (2)' once a month.

In addition, at t3, the cursor of crtTtile image can be easily set by bringing the sending transducer/+F and the receiving transducer group sufficiently close and detecting l'j-mJ JL Coco from a different surface of the subject. Shimera haru. In addition, the velocity of 1[ in the subject at the time of transmission and reception is calculated by C2' + C* V', i, and from the transmitting beam setting angle α, - (by Snell's law) the mode of the ultrasonic beam (longitudinal wave, transverse wave, Depending on the transmitting beam setting angle α, a 1M A & ultrasonic mode will occur in the subject, but if the transmitting beam nu > i: the angle α is constant, Since the refraction angle β into the specimen is determined by the ultrasonic mode, it can be easily determined which ultrasonic mode the ultrasonic echo is transmitted in from the geometric relationship shown in Figure 12. Furthermore, when the transmission beam setting angle is α, the delay time setting of each transducer is calculated by adding the delay time corresponding to the setting angle to the value of equation (2) or equation (2)'. For example, for the vibrator at the ai position, 141d
It goes without saying that the delay time of llθ/Cs is added by J.

In addition to the method, the present invention can be modified and implemented without departing from the gist thereof.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to provide an ultrasonic flaw detection device that has the following effects.

That is, the ultrasonic beam can be focused with high precision. - Also, since the ultrasonic beam can be moved minutely in the electronic operation direction at a desired ultrasonic beam focusing distance, it is possible to obtain a high electron scanning density with a small ultrasonic frequency, improving flaw detection resolution.

21- Furthermore, in order to provide a delay time at the excitation point of each transducer only when transmitting an ultrasonic beam, and to maintain a delay time between each transducer during reception, a complex 4-circuit circuit called delay addition of analog signals is required. In addition to eliminating the need for , it is possible to downsize the device. Furthermore, since the received signal is received as a parallel beam without delay addition, it is possible to detect flaws in a wider area without missing anything, compared to when the signal is focused during reception.

[Brief explanation of the drawing]

Figure 1 is a diagram explaining the focusing difference in conventional ultrasound focusing;
Fig. 2 is a diagram showing an embodiment of the ultrasonic flaw detection device according to the present invention, Fig. 3 is a diagram showing an example of the data setting device in Fig. 2, and Fig. 4 is a diagram showing an example of the ultrasonic flaw detection device according to the present invention. FIG. 5 is a diagram explaining the d [calculation method] for ultrasound focusing in this embodiment. FIG. 6 is a diagram explaining the movement of the ultrasound focusing point in this embodiment. The figures are diagrams illustrating an example of performing electronic scanning using the method of this embodiment, FIG.
The figures are diagrams explaining the effect of ultrasonic focusing in Example 22-, Figures 10 and 11.
The figures are diagrams explaining other embodiments of the present invention, and FIG. 12 is a diagram explaining an application method to FIG. 11. 1... Array type probe, 10... Transmitter group, 1...
...Electronic switch, I2...Receiver group, 13...Adder, 14...Delay time setter, 15...Computer, 16...Data setter, I7...Signal processing Device, 18... Image display device. Applicant's representative Patent attorney Takehiko Suzue Figure 3 21 Figure 4, -1A -To-/ ---, ///h, ~1, ・i I P7 7~ ・ ・°",'gu' -! Fan; is J, / //////. 7'/ 8~ //!2・7-/ //-/ L"f'25 Figure 7 z3 Figure 8 (a) (b) Figure 9 (a)

Claims (1)

[Claims] In an ultrasonic flaw detection device that performs electronic scanning using an array type probe with an ultrasonic coupling medium placed between it and the object to be inspected, at the time of transmission, the ultrasonic refraction angle between the object to be inspected and the ultrasonic coupling medium is calculated. By setting the transmission timing of each transducer of the array type probe, a desired area of the object (-C) is generated, and the ultrasonic waves are focused in the direction of the array of the transducers of the array type probe. Each time the focusing position is shifted by 1/N of the transducer array pitch P (N is an integer), the focusing position is sequentially moved to a range that does not exceed A of the transducer array pitch P, and at the time of reception, each of the above An ultrasonic flaw detection device characterized by being configured to add signals received from a vibrator without delay.