JPS60235347A - イオンビ−ム発生装置 - Google Patents

イオンビ−ム発生装置

Info

Publication number
JPS60235347A
JPS60235347A JP59093495A JP9349584A JPS60235347A JP S60235347 A JPS60235347 A JP S60235347A JP 59093495 A JP59093495 A JP 59093495A JP 9349584 A JP9349584 A JP 9349584A JP S60235347 A JPS60235347 A JP S60235347A
Authority
JP
Japan
Prior art keywords
laser
ion beam
substance
state
beam generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59093495A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512814B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Ueda
植田　至宏
Koichi Ono
高一 斧
Tatsuo Omori
達夫 大森
Shigeto Fujita
重人 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59093495A priority Critical patent/JPS60235347A/ja
Publication of JPS60235347A publication Critical patent/JPS60235347A/ja
Publication of JPH0512814B2 publication Critical patent/JPH0512814B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59093495A 1984-05-08 1984-05-08 イオンビ−ム発生装置 Granted JPS60235347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59093495A JPS60235347A (ja) 1984-05-08 1984-05-08 イオンビ−ム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59093495A JPS60235347A (ja) 1984-05-08 1984-05-08 イオンビ−ム発生装置

Publications (2)

Publication Number Publication Date
JPS60235347A true JPS60235347A (ja) 1985-11-22
JPH0512814B2 JPH0512814B2 (enrdf_load_stackoverflow) 1993-02-19

Family

ID=14083924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59093495A Granted JPS60235347A (ja) 1984-05-08 1984-05-08 イオンビ−ム発生装置

Country Status (1)

Country Link
JP (1) JPS60235347A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022999A (enrdf_load_stackoverflow) * 1973-06-28 1975-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022999A (enrdf_load_stackoverflow) * 1973-06-28 1975-03-12

Also Published As

Publication number Publication date
JPH0512814B2 (enrdf_load_stackoverflow) 1993-02-19

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