Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP59093496ApriorityCriticalpatent/JPS60235348A/ja
Publication of JPS60235348ApublicationCriticalpatent/JPS60235348A/ja
Publication of JPH0527213B2publicationCriticalpatent/JPH0527213B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32321—Discharge generated by other radiation
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J27/00—Ion beam tubes
H01J27/02—Ion sources; Ion guns
H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam