JPS60227219A - レーザ加工装置 - Google Patents

レーザ加工装置

Info

Publication number
JPS60227219A
JPS60227219A JP60058323A JP5832385A JPS60227219A JP S60227219 A JPS60227219 A JP S60227219A JP 60058323 A JP60058323 A JP 60058323A JP 5832385 A JP5832385 A JP 5832385A JP S60227219 A JPS60227219 A JP S60227219A
Authority
JP
Japan
Prior art keywords
objective lens
scanning
laser beam
laser
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60058323A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333246B2 (en, 2012
Inventor
Hiroshi Yamaguchi
博司 山口
Takeoki Miyauchi
宮内　建興
Masao Mitani
正男 三谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60058323A priority Critical patent/JPS60227219A/ja
Publication of JPS60227219A publication Critical patent/JPS60227219A/ja
Publication of JPH0333246B2 publication Critical patent/JPH0333246B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP60058323A 1985-03-25 1985-03-25 レーザ加工装置 Granted JPS60227219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60058323A JPS60227219A (ja) 1985-03-25 1985-03-25 レーザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60058323A JPS60227219A (ja) 1985-03-25 1985-03-25 レーザ加工装置

Publications (2)

Publication Number Publication Date
JPS60227219A true JPS60227219A (ja) 1985-11-12
JPH0333246B2 JPH0333246B2 (en, 2012) 1991-05-16

Family

ID=13081074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60058323A Granted JPS60227219A (ja) 1985-03-25 1985-03-25 レーザ加工装置

Country Status (1)

Country Link
JP (1) JPS60227219A (en, 2012)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01248123A (ja) * 1988-03-30 1989-10-03 Agency Of Ind Science & Technol 方向および位置可変形リレー光学系
JPH01248121A (ja) * 1988-03-30 1989-10-03 Agency Of Ind Science & Technol 一軸駆動形多自由度リレー光学系
JPH01159989U (en, 2012) * 1988-04-21 1989-11-07
EP3801973A1 (de) * 2018-06-04 2021-04-14 FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. Vorrichtung zur laserbearbeitung schwer zugänglicher werkstücke

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391754A (en) * 1977-01-21 1978-08-11 Canon Inc Scannint type photo detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391754A (en) * 1977-01-21 1978-08-11 Canon Inc Scannint type photo detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01248123A (ja) * 1988-03-30 1989-10-03 Agency Of Ind Science & Technol 方向および位置可変形リレー光学系
JPH01248121A (ja) * 1988-03-30 1989-10-03 Agency Of Ind Science & Technol 一軸駆動形多自由度リレー光学系
JPH01159989U (en, 2012) * 1988-04-21 1989-11-07
EP3801973A1 (de) * 2018-06-04 2021-04-14 FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V. Vorrichtung zur laserbearbeitung schwer zugänglicher werkstücke

Also Published As

Publication number Publication date
JPH0333246B2 (en, 2012) 1991-05-16

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