JPS60225408A - 垂直磁化磁性薄膜 - Google Patents
垂直磁化磁性薄膜Info
- Publication number
- JPS60225408A JPS60225408A JP8258284A JP8258284A JPS60225408A JP S60225408 A JPS60225408 A JP S60225408A JP 8258284 A JP8258284 A JP 8258284A JP 8258284 A JP8258284 A JP 8258284A JP S60225408 A JPS60225408 A JP S60225408A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic thin
- combination
- composition
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 123
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 118
- 239000000203 mixture Substances 0.000 claims abstract description 70
- 239000010408 film Substances 0.000 claims abstract description 25
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 16
- 230000005415 magnetization Effects 0.000 claims description 34
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 229910052723 transition metal Inorganic materials 0.000 claims description 5
- 150000003624 transition metals Chemical class 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 36
- 238000004519 manufacturing process Methods 0.000 abstract description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 17
- 239000013078 crystal Substances 0.000 abstract description 15
- 229910052786 argon Inorganic materials 0.000 abstract description 9
- 239000010453 quartz Substances 0.000 abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 9
- 239000007789 gas Substances 0.000 abstract description 8
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract description 6
- 229910052727 yttrium Inorganic materials 0.000 abstract description 3
- 229910052684 Cerium Inorganic materials 0.000 abstract description 2
- 229910052779 Neodymium Inorganic materials 0.000 abstract description 2
- 229910052777 Praseodymium Inorganic materials 0.000 abstract description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract description 2
- 239000002223 garnet Substances 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 101100194003 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) rco-3 gene Proteins 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 101100001670 Emericella variicolor andE gene Proteins 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 229910019599 ReO2 Inorganic materials 0.000 description 1
- -1 Wettstein : J Proteins 0.000 description 1
- 150000001485 argon Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8258284A JPS60225408A (ja) | 1984-04-23 | 1984-04-23 | 垂直磁化磁性薄膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8258284A JPS60225408A (ja) | 1984-04-23 | 1984-04-23 | 垂直磁化磁性薄膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60225408A true JPS60225408A (ja) | 1985-11-09 |
| JPH0354442B2 JPH0354442B2 (enrdf_load_stackoverflow) | 1991-08-20 |
Family
ID=13778472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8258284A Granted JPS60225408A (ja) | 1984-04-23 | 1984-04-23 | 垂直磁化磁性薄膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60225408A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5040068A (en) * | 1989-12-28 | 1991-08-13 | Eastman Kodak Company | Electronic imaging apparatus with interchangeable pickup units |
-
1984
- 1984-04-23 JP JP8258284A patent/JPS60225408A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5040068A (en) * | 1989-12-28 | 1991-08-13 | Eastman Kodak Company | Electronic imaging apparatus with interchangeable pickup units |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0354442B2 (enrdf_load_stackoverflow) | 1991-08-20 |
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