JPS6022404Y2 - ガス流量の制御装置 - Google Patents

ガス流量の制御装置

Info

Publication number
JPS6022404Y2
JPS6022404Y2 JP1978138701U JP13870178U JPS6022404Y2 JP S6022404 Y2 JPS6022404 Y2 JP S6022404Y2 JP 1978138701 U JP1978138701 U JP 1978138701U JP 13870178 U JP13870178 U JP 13870178U JP S6022404 Y2 JPS6022404 Y2 JP S6022404Y2
Authority
JP
Japan
Prior art keywords
gas
blower
flow rate
gas flow
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978138701U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5557807U (enrdf_load_stackoverflow
Inventor
繁 村瀬
敬二 横瀬
Original Assignee
東京熱処理工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京熱処理工業株式会社 filed Critical 東京熱処理工業株式会社
Priority to JP1978138701U priority Critical patent/JPS6022404Y2/ja
Publication of JPS5557807U publication Critical patent/JPS5557807U/ja
Application granted granted Critical
Publication of JPS6022404Y2 publication Critical patent/JPS6022404Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Positive-Displacement Air Blowers (AREA)
  • Flow Control (AREA)
JP1978138701U 1978-10-09 1978-10-09 ガス流量の制御装置 Expired JPS6022404Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978138701U JPS6022404Y2 (ja) 1978-10-09 1978-10-09 ガス流量の制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978138701U JPS6022404Y2 (ja) 1978-10-09 1978-10-09 ガス流量の制御装置

Publications (2)

Publication Number Publication Date
JPS5557807U JPS5557807U (enrdf_load_stackoverflow) 1980-04-19
JPS6022404Y2 true JPS6022404Y2 (ja) 1985-07-03

Family

ID=29112119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978138701U Expired JPS6022404Y2 (ja) 1978-10-09 1978-10-09 ガス流量の制御装置

Country Status (1)

Country Link
JP (1) JPS6022404Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9535253B2 (en) 2015-02-09 2017-01-03 Microsoft Technology Licensing, Llc Display system
US9513480B2 (en) 2015-02-09 2016-12-06 Microsoft Technology Licensing, Llc Waveguide

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248065Y2 (enrdf_load_stackoverflow) * 1973-08-11 1977-11-01
JPS5539544Y2 (enrdf_load_stackoverflow) * 1975-10-03 1980-09-16

Also Published As

Publication number Publication date
JPS5557807U (enrdf_load_stackoverflow) 1980-04-19

Similar Documents

Publication Publication Date Title
JPH0231408B2 (enrdf_load_stackoverflow)
US4417312A (en) Electronic controller for valve actuators
US6419455B1 (en) System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
US4687020A (en) Fluid mass flow controller
US8316879B2 (en) Method and device for controlling pressure of vacuum container
JPS60161724A (ja) 混合制御装置
US4758117A (en) Method for the transportation of a particulate material at controlled rate
US10754358B2 (en) Methods and systems for controlling gas flow using a proportional flow valve
JPS6022404Y2 (ja) ガス流量の制御装置
US20170293309A1 (en) Mass flow controller and a method for controlling a mass flow rate
KR101334998B1 (ko) 개스 분리 장치를 제어하는 방법
US4729295A (en) Method of operating an air-supplied type coating booth
AU2001294045B2 (en) Method of and system for controlling the ratio of a variable lead parameter and an adjustable lag parameter for lag-lead process
CN102016416A (zh) 锅炉的供氧控制方法以及装置
AU2001294045A1 (en) Method of and system for controlling the ratio of a variable lead parameter and an adjustable lag parameter for lag-lead process
JPS62276328A (ja) 燃焼制御装置
JPH09146610A (ja) 多変数非線形プロセス・コントローラー
KR20200083707A (ko) 약액 유량 제어 시스템
Allen et al. Development of a digital adaptive control system for PO2 regulation in a membrane oxygenator
JP2002093773A (ja) 基板処理装置
Turtle Automated chlorine residual control
SU504010A1 (ru) Способ автоматического поддержани давлени в обьединенном выходном канале группы компрессоров
JPS61202212A (ja) レベル制御装置
JPH09128006A (ja) 位相補償機能つき制御装置
JPS59142825A (ja) 排煙脱硫装置の制御方法