JPS60223687A - Cutting method by high energy beam - Google Patents

Abstract

PURPOSE:To cut a plate material, etc. to a required shape with high accuracy by adjusting a beam to substantially decreased output and repeating plural times the relative movement of the working shape to be applied to a material to be worked thereby working the material. CONSTITUTION:The laser beam focused by a lens 8 is irradiated onto the material 1 to be worked and the relative movement and feed for the required cutting shape is applied to the material 1 by an NC control device 5 which drives motors 3, 4. The beam output of a laser oscillator 6 is decreased substantially to make the beam diameter smaller so that working with high accuracy is made possible. The working is progressed by repeating plural times the relative movement of the working shape at the same locus by the NC control device 5.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of cutting a plate or the like into a desired shape using a high-energy beam such as a laser, microwave, electron beam, ion beam, or plasma.

In conventional machining using a high-energy beam, it has been usual to cut the workpiece at once using a beam output that is sufficient for cutting the material, plate thickness, etc. of the workpiece. In this case, as the beam output increases, it is not easy to narrow down the beam spot sufficiently, and since high output requires rough machining, it is inevitable that the accuracy of the machined shape will decrease.

The present invention has been proposed to eliminate this drawback.
The beam output is sufficiently reduced to enable high-precision machining, and the machining is performed by repeating the relative movement of the machining shape with the workpiece multiple times.

The present invention will be explained below with reference to one example. 1 is the workpiece,
2 is a table that fixedly supports the workpiece 1 and feeds the processed shape; 3 and 4 are X-axis and Y-axis motors that drive the table; 5 is a numerical controller that applies NC control signals to the motor; 6 is a laser oscillator; 7 is a reflecting mirror, and 8 is a lens that focuses the laser beam.

A focused laser beam is irradiated onto the workpiece 1 by the lens 8, and the motors 3 and 4 are driven and controlled by the NC controller @5 to give the workpiece 1 relative movement and feed in a required cut shape. As a result, the laser beam irradiation point on the workpiece 1 rapidly melts and vaporizes and melts, and by continuing processing while moving the irradiation point, the workpiece 1 can be cut into a relative moving shape.

However, as the energy of the beam spot connected to the workpiece 1 increases, it generally becomes difficult to narrow down the spot diameter to a small size. For example, when using a CO2 gas laser,
The beam diameter output from the oscillator 6 is 100W and approximately 1
21Ilφ, 16+amφ at 300W, 20 at 600W
W1mφ, and IKWr becomes about 381φ. Therefore, increasing the beam output increases the groove width of the beam cut and reduces the machining accuracy. In addition, the high energy makes the machined surface rough, and from this point as well, the accuracy deteriorates.

Therefore, in the present invention, processing is performed with the oscillation output sufficiently reduced.
Process by repeating multiple cuts. By reducing the energy, the beam spot can be narrowed down to a minimum value close to the wavelength, and precision machining can be performed by repeatedly cutting with this fine beam until the machining is completed.

To explain with an experimental example, when cutting a ruby with a thickness of 6II1 m using a YAG laser, when processing with a flat plate output of 50 W and focusing the beam to a spot diameter of about 8 μφ, the same trajectory can be repeated 6 times j. I cut it. For comparison, the inner diameter dimensional accuracy was shown as follows when cutting was performed once with an output of 250 W.

Output Upper side (l1m) Lower side (l111) 50W 42
．． 23 42.21 250W 43.11 43.24 In this way, the conventional method of increasing the beam output to 1
According to the method of cutting with three processing feeds, the dimensional accuracy is 11II11 or more higher than that of the present invention, and it can be seen that the method according to the present invention can improve accuracy in comparison. In addition, according to the present invention (50W), the dimensional difference between the upper and lower sides of the cut workpiece is approximately 0.02+nn+, which is approximately 0.13 for the conventional method (250W), and the accuracy is improved by vertical cutting. It can be seen that the value is high.

In the multiple repeated cuts according to the present invention, the locus of the machining feed shape may be shifted little by little, or the locus may be slightly enlarged or reduced in size during the final cut to finish the feed. By inputting a program into the NG device 5 in advance, feed control for such repeated machining can be automatically and accurately controlled. The processing shape feed can also be performed by fixing the workpiece and applying the feed to the head side that irradiates the laser beam.

Furthermore, the present invention can be used using microwaves as a high-energy beam for processing, and electrons and
Ion beams can also be used.

[Brief explanation of drawings]

The drawing is a configuration diagram of an embodiment of the device in this description. 1. Workpiece 2. table 3.4 Motor 5. NC control device 6. Laser oscillator 7. Reflector 8. Lens patent applicant

Claims (1)

[Claims] 1. A beam irradiation device for irradiating a high-energy beam onto a workpiece is provided, and a desired cut shape is moved relative to the workpiece and the irradiation beam of the beam irradiation device. In a device that is equipped with a movement control device and performs cutting by irradiating a relatively moving shape with a high-energy beam, the beam output of the beam irradiation device is set to be sufficiently reduced to enable high-precision machining, and the movement control device A high-energy beam cut processing method characterized by processing by repeating relative movement of the processed shape multiple times. 2. The high-energy beam cutting method according to claim 1, wherein the relative movement of the processed shape is repeated multiple times on the same locus. 3. The high-energy beam cutting method according to claim 1, in which the relative movement of the processed shape is repeated multiple times with a locus that shifts in the direction of reducing or enlarging. 4. The high-energy beam cutting method according to claim 1, in which the beam output of the beam irradiation device is reduced from the previous time during at least the final relative movement of the processed shape.