JPS60223480A - 積層型圧電素子を利用した微動装置 - Google Patents
積層型圧電素子を利用した微動装置Info
- Publication number
- JPS60223480A JPS60223480A JP59076785A JP7678584A JPS60223480A JP S60223480 A JPS60223480 A JP S60223480A JP 59076785 A JP59076785 A JP 59076785A JP 7678584 A JP7678584 A JP 7678584A JP S60223480 A JPS60223480 A JP S60223480A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- laminated piezoelectric
- elements
- voltage
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 abstract description 6
- 239000000919 ceramic Substances 0.000 description 12
- 239000010410 layer Substances 0.000 description 9
- 230000008602 contraction Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000452 restraining effect Effects 0.000 description 2
- 241000256247 Spodoptera exigua Species 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
Landscapes
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Machine Tool Units (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59076785A JPS60223480A (ja) | 1984-04-17 | 1984-04-17 | 積層型圧電素子を利用した微動装置 |
US06/662,881 US4570096A (en) | 1983-10-27 | 1984-10-19 | Electromechanical translation device comprising an electrostrictive driver of a stacked ceramic capacitor type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59076785A JPS60223480A (ja) | 1984-04-17 | 1984-04-17 | 積層型圧電素子を利用した微動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60223480A true JPS60223480A (ja) | 1985-11-07 |
JPH0522474B2 JPH0522474B2 (enrdf_load_html_response) | 1993-03-29 |
Family
ID=13615257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59076785A Granted JPS60223480A (ja) | 1983-10-27 | 1984-04-17 | 積層型圧電素子を利用した微動装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60223480A (enrdf_load_html_response) |
-
1984
- 1984-04-17 JP JP59076785A patent/JPS60223480A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0522474B2 (enrdf_load_html_response) | 1993-03-29 |
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