JPS60221334A - Feeding device of raw material gas for preparation of optical fiber parent material - Google Patents

Feeding device of raw material gas for preparation of optical fiber parent material

Info

Publication number
JPS60221334A
JPS60221334A JP7706784A JP7706784A JPS60221334A JP S60221334 A JPS60221334 A JP S60221334A JP 7706784 A JP7706784 A JP 7706784A JP 7706784 A JP7706784 A JP 7706784A JP S60221334 A JPS60221334 A JP S60221334A
Authority
JP
Japan
Prior art keywords
raw material
optical fiber
gas
carrier gas
raw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7706784A
Other languages
Japanese (ja)
Inventor
Masaharu Niizawa
新沢　正治
Tsutomu Yabuki
矢吹　勉
Yoshihiro Narita
芳大 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP7706784A priority Critical patent/JPS60221334A/en
Publication of JPS60221334A publication Critical patent/JPS60221334A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

PURPOSE:To obtain a parent material for optical fiber having superior characteristics with sufficient reproducibility by stabilizing feed of the raw materials by installing a heating device of carrier gas and tanks for the raw materials and feeding devices for the gaseous raw materials in a thermostat. CONSTITUTION:After heating carrier gas introduced from a gas introducing pipe 1 by a heating device 3 installed in a thermostat 11, the gas is introduced into a bubbling device 6 in a raw material tank 4, and the gas is bubbled to evaporate the liquid raw material 5, and prepd. gaseous mixture 7 is fed to a burner in the reaction zone of the prepg. device of the parent material of the optical fiber through a feed controlling device 2 of the raw material gas. By this method, the raw material is supplied stably even if a large amt. of the raw material for the glass is supplied, and a parent material for optical fiber having superior characteristics is obtd.

Description

【発明の詳細な説明】 〔発明の背量と目的〕 本発明は光フアイバ母材製造用原料ガス供給装置に係り
、特に、ＶＡＤ法（気相軸相法）による光ファイバ母材
製造用原刺ガス供給装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Size and purpose of the invention] The present invention relates to a raw material gas supply device for manufacturing an optical fiber preform, and in particular, a raw material gas supply device for manufacturing an optical fiber preform by the VAD method (vapor axial phase method). This invention relates to a stinging gas supply device.

コアがＧｅｓ　Ｐ等を含む石英ガラス、クラッドアイバ
は、低損失、広帯域（ＧＩ型ファイノくの場合）、製造
容易等の諸条件を満足し、現在通信用として最も広範囲
に使用されている。この光ファイバを製作するのに用い
られる光フアイバ母材は、近年は生産性の高いＶＡＤ法
あるいはこれに類似した方法で製造されている。Silica glass and clad glass whose core contains GesP or the like satisfy various conditions such as low loss, wide band (in the case of GI type fins), and ease of manufacture, and are currently most widely used for communications. In recent years, the optical fiber base material used to manufacture this optical fiber has been manufactured by the highly productive VAD method or a method similar thereto.

これらの方法は、ガラスの原料（ＳｉＣｔ、Ｉ、ａｃｉ
４、ＰＯＣｔ３等で常温では液体）を、キャリヤガス（
Ａｒ、　０２、Ｈ２等）でバブリングし、キャリヤガス
中に上記原料を気化させて混入させ、この混合ガスを酸
水素炎等で刃口熱し、反応を起こさせてガラス微粉末（
スート）としながらダミーの石英棒の先端に順次堆積さ
せ、出来だ微粉末母材（スートロンドと称する）をさら
に高温に加熱し、透明なカラスに焼結させてコアガラス
を製造するものである。These methods use glass raw materials (SiCt, I, aci
4. POCt3, etc., which is a liquid at room temperature, is converted into a carrier gas (
The above raw materials are vaporized and mixed into the carrier gas by bubbling with Ar, 02, H2, etc., and this mixed gas is heated at the edge of the blade with an oxyhydrogen flame, etc., to cause a reaction and produce fine glass powder (
Core glass is produced by sequentially depositing soot on the tip of a dummy quartz rod, heating the resulting fine powder base material (called sootrond) to a higher temperature, and sintering it into a transparent glass.

ところで、光ファイバで最も重責な点は、コアの屈折率
分布形状をいかに目標通りに再現性良く製造するかとい
うことであり、このことは、スーＯ２あるいは屈折率分
布制御用の各種ガス（Ｎ、、Ａｒ、ＩＩｅ等）の供給状
態をいかに安定させるかということにある。By the way, the most important point in optical fiber is how to manufacture the refractive index distribution shape of the core with good reproducibility as per the target. , , Ar, IIe, etc.) is to be stabilized.

ところが、生産性を上げるために大量のガラス原料を供
給しようとした場合、気化熱により原料液が、その原料
タンクと共に冷却され、そのために製造条件が変化し、
特性が不安定になるという問題が生じる。However, when trying to supply a large amount of glass raw materials to increase productivity, the raw material liquid is cooled together with the raw material tank due to heat of vaporization, which changes the manufacturing conditions.
A problem arises in that the characteristics become unstable.

その対策としては、従来から原料タンクを外部から加熱
するか、あるいは原料タンクを恒温槽内に入れる等の方
法が行われているが、熱対応性が悪く、原料タンク内の
原料液の温度を安定な状態に調節することは困難であっ
た。Conventional countermeasures have been to heat the raw material tank from the outside or to place the raw material tank in a constant temperature oven, but these methods have poor thermal response and the temperature of the raw material liquid in the raw material tank cannot be controlled. It was difficult to adjust to a stable state.

本発明の目的は、上記難点を解決し、大量のガラス原料
を供給する場合にも、安定した原料供給ができる光ファ
イバ母材製造川原側ガス供給装置を提供することにある
。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned difficulties and to provide a riverside gas supply apparatus for manufacturing optical fiber preforms that can stably supply raw materials even when a large amount of glass raw materials are supplied.

〔発明の概要〕[Summary of the invention]

本発明は、キャリヤガスを加熱装置により加熱して原料
タンク内に導入し、該原料タンク内の原料液をガス化さ
せるとともに前記キャリヤガスと混合させ、該混合ガス
を原料ガス供給調節装置を通じて光フアイバ母材製造装
置の反応系バーナに供給する装置を恒温槽内に設置した
構成になっていることを特徴とするものである。The present invention heats a carrier gas with a heating device and introduces it into a raw material tank, gasifies the raw material liquid in the raw material tank and mixes it with the carrier gas, and the mixed gas is exposed to light through a raw material gas supply adjustment device. The present invention is characterized in that a device for supplying to a reaction system burner of a fiber base material manufacturing device is installed in a constant temperature bath.

〔実施例〕〔Example〕

以下、本発明の一実施例を図面に基づいて説明する。図
は光フアイバ母材製造用原料ガス供給装置の縦断面図で
、１はＡｒ等のキャリヤガス導入管、２は原料ガス供給
調節装置、６は加熱装置、４は原料タンク、５はＳｉ　
ＣＬ４等の原料液、６は熱交換装置を兼ねたバブリング
装置、７は原料液をガス化させてキャリヤガスと共に送
出させる混合ガス、８は原料液中に設けた液温計、９は
原料液の温度を一定に維持するように加熱装置乙に加え
る電流を調節する温匿調節装置、１０は反応系バーナに
混合ガスを送入する混合ガス供−ｆ＠肯、１１は混合ガ
スが結露するなどの支障を生じないように装置全体を保
温する恒温槽である。すなわち、キャリヤガス１を卯熱
装置乙により加熱して原料タンク４内のバブリング装置
６に導入して原料液５をガス化させ、キャリヤガス１に
より搬送する混合ガス７としながら原料ガス供給調節装
置２を通して原料ガスの供給流量を調節し、光フアイバ
母材製造装置の反応系バーナに供給する装置を恒温槽１
１内に設置した構成になっている。Hereinafter, one embodiment of the present invention will be described based on the drawings. The figure is a longitudinal cross-sectional view of a raw material gas supply device for manufacturing optical fiber base material, in which 1 is a carrier gas introduction pipe such as Ar, 2 is a raw material gas supply adjustment device, 6 is a heating device, 4 is a raw material tank, and 5 is a Si
Raw material liquid such as CL4, 6 is a bubbling device that also serves as a heat exchange device, 7 is a mixed gas that gasifies the raw material liquid and is sent out together with the carrier gas, 8 is a liquid thermometer installed in the raw material liquid, 9 is the raw material liquid 10 is a mixed gas supply for feeding the mixed gas into the reaction burner, 11 is the mixed gas that condenses. This is a constant temperature bath that keeps the entire device warm to prevent problems such as That is, the carrier gas 1 is heated by the heat exchanger B and introduced into the bubbling device 6 in the raw material tank 4 to gasify the raw material liquid 5, and while the raw material liquid 5 is made into a mixed gas 7 to be transported by the carrier gas 1, the raw material gas supply adjustment device A device for adjusting the supply flow rate of the raw material gas through 2 and supplying it to the reaction system burner of the optical fiber base material manufacturing device is connected to the constant temperature chamber 1.
The configuration is that it is installed within 1.

この装置を介して反応系バーナに供給された原料ガスを
用いて光フアイバ母材の製造を行った際に、ＳＺ　Ｃｌ
　４を１０ｆ／ｍｕ１以上供給した場合テも、原料液の
温度は正しく制御され、混合ガスのレンオ（キャリヤガ
スに対する原料ガス濃度）の変動も少なく、再現性よく
、特性の良好な光フアイバ母材を製造することができだ
。When manufacturing an optical fiber base material using the raw material gas supplied to the reaction system burner through this device, SZ Cl
Even when 4 is supplied at 10 f/mu1 or more, the temperature of the raw material liquid is correctly controlled, there is little variation in the mixed gas concentration (the raw material gas concentration relative to the carrier gas), and the optical fiber base material has good reproducibility and good characteristics. can be manufactured.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、ガラス原料を大
量に必要とする場合でも、安定した状態に原料を供給す
ることができ、＠性の良好な光フアイバ母材を製造し得
るというすぐれた工業的効果を奏することができる。As explained above, according to the present invention, even when a large amount of glass raw material is required, the raw material can be supplied in a stable state, and an optical fiber base material with good @ property can be manufactured. It can produce industrial effects.

Ａ　１ｉＶｌ＋／ｌ’′１臀古　Ｗ　−Ｌ　ｅ昌ロロ図
は本発明の一実施例の光フアイバ母材製造用原料ガス供
給装置の縦断面図である。A 1iVl+/l''1 耻子W-L e昭子图 is a longitudinal cross-sectional view of a raw material gas supply device for producing an optical fiber preform according to an embodiment of the present invention.

１；キャリヤガス導入管、６；加熱装置、［；原料タン
ク、５；原料液、１１；恒温槽。1; carrier gas introduction pipe; 6; heating device; [; raw material tank; 5; raw material liquid; 11; constant temperature bath.

Claims (1)

【特許請求の範囲】[Claims] （１）　キャリヤガスを加熱装置により加熱して原料タ
ンク内に導入し、該原料タンク内の原料液をガス化させ
るとともに前記キャリヤガスと混合させ、該混合ガスを
原料ガス供給調節装置を通じて光フアイバ母材製造装置
の反応系バーナに供給する装置を恒ｌ晶槽内に設置した
構成になっていることを特徴とする光ファイバｔＢ相製
造用原料ガス供給装置。(1) Carrier gas is heated by a heating device and introduced into a raw material tank, the raw material liquid in the raw material tank is gasified and mixed with the carrier gas, and the mixed gas is passed through an optical fiber through a raw material gas supply adjustment device. 1. A raw material gas supply device for producing an optical fiber tB phase, characterized in that a device for supplying a reaction system burner of a base material production device is installed in a constant crystal tank.
JP7706784A 1984-04-17 1984-04-17 Feeding device of raw material gas for preparation of optical fiber parent material Pending JPS60221334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7706784A JPS60221334A (en) 1984-04-17 1984-04-17 Feeding device of raw material gas for preparation of optical fiber parent material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7706784A JPS60221334A (en) 1984-04-17 1984-04-17 Feeding device of raw material gas for preparation of optical fiber parent material

Publications (1)

Publication Number Publication Date
JPS60221334A true JPS60221334A (en) 1985-11-06

Family

ID=13623451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7706784A Pending JPS60221334A (en) 1984-04-17 1984-04-17 Feeding device of raw material gas for preparation of optical fiber parent material

Country Status (1)

Country Link
JP (1) JPS60221334A (en)

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