JPS60220924A - 半導体ウエハカセツトのストツカ - Google Patents

半導体ウエハカセツトのストツカ

Info

Publication number
JPS60220924A
JPS60220924A JP7732084A JP7732084A JPS60220924A JP S60220924 A JPS60220924 A JP S60220924A JP 7732084 A JP7732084 A JP 7732084A JP 7732084 A JP7732084 A JP 7732084A JP S60220924 A JPS60220924 A JP S60220924A
Authority
JP
Japan
Prior art keywords
shelf
stocker
guide rail
shelves
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7732084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452622B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Ryozo Sato
佐藤　亮三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP7732084A priority Critical patent/JPS60220924A/ja
Priority to US06/650,886 priority patent/US4615430A/en
Publication of JPS60220924A publication Critical patent/JPS60220924A/ja
Publication of JPH0452622B2 publication Critical patent/JPH0452622B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like
    • B65G1/127—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like the circuit being confined in a vertical plane

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
JP7732084A 1983-10-06 1984-04-17 半導体ウエハカセツトのストツカ Granted JPS60220924A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7732084A JPS60220924A (ja) 1984-04-17 1984-04-17 半導体ウエハカセツトのストツカ
US06/650,886 US4615430A (en) 1983-10-06 1984-09-17 Precision pallet stacking type storage system for use in clean environment or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7732084A JPS60220924A (ja) 1984-04-17 1984-04-17 半導体ウエハカセツトのストツカ

Publications (2)

Publication Number Publication Date
JPS60220924A true JPS60220924A (ja) 1985-11-05
JPH0452622B2 JPH0452622B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-24

Family

ID=13630638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7732084A Granted JPS60220924A (ja) 1983-10-06 1984-04-17 半導体ウエハカセツトのストツカ

Country Status (1)

Country Link
JP (1) JPS60220924A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers

Also Published As

Publication number Publication date
JPH0452622B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-08-24

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