JPS60219523A - Photosensor - Google Patents
PhotosensorInfo
- Publication number
- JPS60219523A JPS60219523A JP7490884A JP7490884A JPS60219523A JP S60219523 A JPS60219523 A JP S60219523A JP 7490884 A JP7490884 A JP 7490884A JP 7490884 A JP7490884 A JP 7490884A JP S60219523 A JPS60219523 A JP S60219523A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrates
- adhesive
- wire bonding
- sealant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/041—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00
- H01L25/042—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
本発明はフォトセンサに関し、特に薄膜半導体を用いた
光電変換素子が形成された第1の基板と、上記光電変換
素子の駆動部を有する第2の基板がそれぞれ第3の基板
に接着剤にて固定され、かつ上記第1の基板と第2の基
板とがワイヤボンディングにて互いに接続されたフォト
センサに関する。[Detailed Description of the Invention] [Technical Field] The present invention relates to a photosensor, and in particular, a first substrate on which a photoelectric conversion element using a thin film semiconductor is formed, and a second substrate having a drive section for the photoelectric conversion element. The present invention relates to a photosensor in which the first and second substrates are each fixed to a third substrate with an adhesive, and the first and second substrates are connected to each other by wire bonding.
この種のフォトセンサの従来例を第5図に示す。 A conventional example of this type of photosensor is shown in FIG.
同図において1は第3の基板、2は接着剤、3は第1の
基板、4は第2の基板、5はワイヤボンディング、6は
ワイヤボンディング保護封止剤である。上記第1および
第2の基板3,4と第3の基板1との接着は、第1およ
び第2の基板3.4の6個所程度にそれぞれ接着剤2を
塗布して行なっていた。In the figure, 1 is a third substrate, 2 is an adhesive, 3 is a first substrate, 4 is a second substrate, 5 is wire bonding, and 6 is a wire bonding protective sealant. The first and second substrates 3, 4 and the third substrate 1 are bonded together by applying adhesive 2 to about six locations on each of the first and second substrates 3.4.
このため、ワイヤボンディング5に封止剤6をコーティ
ングすると、との封止剤6が接着剤2と接着剤2の間の
間隙から基板3,4の裏側に徐々に漏れていき、封止剤
6が硬化したときにはワイヤビンディング5の上端部が
露出してし寸う場合があった。また封止剤6が基板3,
4の裏側へ流れ込むことKよシ、基板3,4が反るなど
の不都合も生じていた。Therefore, when the wire bonding 5 is coated with the sealant 6, the sealant 6 gradually leaks from the gap between the adhesives 2 to the back sides of the substrates 3 and 4, and the sealant When the wire binding 6 was hardened, the upper end of the wire binding 5 was sometimes exposed. Further, the sealing agent 6 is applied to the substrate 3,
In addition to flowing into the back side of the substrates 3 and 4, there were also problems such as the substrates 3 and 4 being warped.
本発明はこのような事情に鑑みて発明するに至ったもの
であって、その目的はワイヤデンディングの保護封止剤
が基板の裏側に漏れることのないフォトセンサを提供す
ることにある。The present invention was developed in view of the above circumstances, and its purpose is to provide a photosensor in which a protective sealant for wire endings does not leak to the back side of the substrate.
本発明の要旨は、薄膜半導体を用い先光電変換素子が形
成された第1の基板と、上記光電変換素子の駆動部を有
する第2の基板がそれぞれ第3の基板に接着剤にて固定
され、かつ上記第1の基板と第2の基板とがワイヤボン
ディングにて互いに接続されたフォトセンサにおいて、
上記ワイヤデンディングの近傍部分における上記第1お
よび第2の基板と、上記第3の基板との間の間隙に、上
記接着剤を線状に連続させて充填したことを特徴とする
フォトセンサに6る。The gist of the present invention is that a first substrate on which a photoelectric conversion element is formed using a thin film semiconductor, and a second substrate having a drive section for the photoelectric conversion element are each fixed to a third substrate with an adhesive. , and a photosensor in which the first substrate and the second substrate are connected to each other by wire bonding,
A photosensor characterized in that a gap between the first and second substrates and the third substrate in the vicinity of the wire ending is filled with the adhesive in a continuous line. 6ru.
以下に本発明の一実施例を第2図〜第4図忙基づいて説
明する。なお第5図と同一部分には同一符号を付する。An embodiment of the present invention will be described below with reference to FIGS. 2 to 4. Note that the same parts as in FIG. 5 are given the same reference numerals.
本発明に係るフォトセンサは、第1図に示す如く接着剤
2が第3の基板1の長手方向に直線的に4筋塗布され、
この4筋の接着剤2にて第1卦よび第2の基板3,4が
接着されている。従って接着面積が従来よシも広く、基
板3゜4の全体的な安定接着が得られる。またワイヤボ
ンディング5の近傍1cおける基板3,4と基板1との
間の間隙に、接着剤2が線状に連続して充填されている
ので、ワイヤデンディング5の封止剤6が基板3,4の
裏側に漏れることがない。従って封止剤6が硬化したと
きでも、ワイヤyIホンディング5の上端部が露出する
ようなことはない。また封止剤6の漏れがないので基板
3,4が変形するおそれもない。In the photosensor according to the present invention, as shown in FIG. 1, the adhesive 2 is applied in four linear stripes in the longitudinal direction of the third substrate 1, and
The first square and the second substrates 3 and 4 are bonded with these four lines of adhesive 2. Therefore, the adhesion area is wider than in the past, and stable adhesion of the entire substrate 3.4 can be obtained. Further, since the adhesive 2 is continuously filled in a linear manner in the gap between the substrates 3 and 4 and the substrate 1 in the vicinity 1c of the wire bonding 5, the sealing agent 6 of the wire bonding 5 is applied to the substrate 1. , No leakage to the back side of 4. Therefore, even when the sealant 6 hardens, the upper end of the wire yI bonding 5 will not be exposed. Furthermore, since there is no leakage of the sealant 6, there is no fear that the substrates 3 and 4 will be deformed.
次に、上記フォトセンサの組立工程を順を追って詳細に
説明する。まず第3の基板1上に第2図に示す如く4筋
の接着剤2をスクリーン印刷にて塗布する。なおこの際
、内側の2筋の接着剤は、後に接着される第1および第
2の基板3,4のワイヤデンディング近傍に位置するよ
うに塗布する。Next, the steps for assembling the photosensor will be explained in detail. First, as shown in FIG. 2, four stripes of adhesive 2 are applied onto the third substrate 1 by screen printing. At this time, the two inner lines of adhesive are applied so as to be located near the wire endings of the first and second substrates 3 and 4 to be bonded later.
次に、薄膜半導体を用いた光電変換素子が形成された第
1の基板3と、前記光電変換素子の駆動部を有する第2
の基板4をそれぞれ第3図に示す如(接着剤2の上に貼
付け、かつ接着剤2が均一に広がるように基板3,4に
圧力を加える。そして接着剤2が充分に硬化する24時
間後、基板3゜4をワイヤデンディングにて接続する。Next, a first substrate 3 on which a photoelectric conversion element using a thin film semiconductor is formed, and a second substrate 3 having a drive section for the photoelectric conversion element.
As shown in FIG. 3, each of the substrates 4 is pasted onto the adhesive 2, and pressure is applied to the substrates 3 and 4 so that the adhesive 2 spreads uniformly. After that, the boards 3 and 4 are connected by wire ending.
次にワイヤビンディング5部に対し、ディスペンサーを
用いて保護封止剤6を第1図に示す如くコーティングす
る。以上で7オトセンサの組立工程が完了する。Next, 5 portions of the wire binding are coated with a protective sealant 6 using a dispenser as shown in FIG. This completes the assembly process of the 7 otosensors.
以上、本発明の一実施例につき説明したが、本発明は上
記実施例に限定されることなく種々の変形が可能である
。Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment and can be modified in various ways.
本発明は上述の如く、第1および第2の基板を接着する
接着剤を、ワイヤボンディングの近傍部分において線状
に連続させて充填しているので、ワイヤボンディングの
封止剤が第1および第2の基板の裏側に漏れることがな
い。従って封止剤が硬化したときで本、ワイヤがンディ
ングの上端部が露出するよう々ことはない。1だ封止剤
の漏れがないので基板3.4が変形するおそれもない。As described above, in the present invention, since the adhesive for bonding the first and second substrates is continuously filled in a linear manner in the vicinity of the wire bonding, the sealant for the wire bonding is applied to the first and second substrates. There is no leakage to the back side of the second board. Therefore, when the sealant hardens, the upper end of the book or wire will not be exposed. Since there is no leakage of the sealant, there is no risk of deformation of the substrate 3.4.
さらに、接着面積が従来よシも広いので、第1および第
2の基板の全体的な安定接着が得られる。Furthermore, since the bonding area is wider than conventionally, stable bonding of the first and second substrates can be achieved overall.
第1図〜第4図は本発明の一実施例を示したものであっ
て、第1図(a)はンオトセンサの平面図、第1図(b
)は同上のB−B線断面図、第2図〜第4図はフォトセ
ンサの組立工程図である。また第5図は従来のフォトセ
ンサを示したものであって、第5図(a)はフォトセン
サの平面図、第5図(b)は同上のA−A線断面図であ
る。
l・・・第3の基板、2・・・接着剤、3・・・第1の
基板、4・・・第2の基板、5・・・ワイヤボンディン
グ、6・・・ワイヤボンディング保護封止剤。
箪 1 図
81 (0)
第 5 叉
(0)
−−1
A山
(b)
2
第 2 図
第 3 図
第4図1 to 4 show an embodiment of the present invention, in which FIG. 1(a) is a plan view of an auto sensor, and FIG.
) is a sectional view taken along the line B-B as above, and FIGS. 2 to 4 are assembly process diagrams of the photosensor. Further, FIG. 5 shows a conventional photosensor, and FIG. 5(a) is a plan view of the photosensor, and FIG. 5(b) is a sectional view taken along line A--A of the same. l...Third substrate, 2...Adhesive, 3...First substrate, 4...Second substrate, 5...Wire bonding, 6...Wire bonding protective sealing agent. Chest 1 Figure 81 (0) Fifth fork (0) --1 Mount A (b) 2 Figure 2 Figure 3 Figure 4
Claims (1)
1の基板と、上記光電変換素子の駆動部を有する第2の
基板がそれぞれ第3の基板に接着剤にて固定され、かつ
上記第1の基板と第2の基板とがワイヤビンディングに
て互いに接続されたフォトセンサにおいて、上記ワイヤ
ビンディングの近傍部分における上記第1および第2の
基板と、上記第3の基板との間の間隙に、上記接着剤を
線状に連続させて充填したことを特徴とするフォトセン
サ。(1) A first substrate on which a photoelectric conversion element using a thin film semiconductor is formed and a second substrate having a drive section for the photoelectric conversion element are each fixed to a third substrate with an adhesive, and the In a photosensor in which a first substrate and a second substrate are connected to each other by a wire binding, a gap between the first and second substrates and the third substrate in a portion near the wire binding; A photosensor characterized in that the above adhesive is filled in a continuous line.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7490884A JPS60219523A (en) | 1984-04-16 | 1984-04-16 | Photosensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7490884A JPS60219523A (en) | 1984-04-16 | 1984-04-16 | Photosensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60219523A true JPS60219523A (en) | 1985-11-02 |
Family
ID=13560953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7490884A Pending JPS60219523A (en) | 1984-04-16 | 1984-04-16 | Photosensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60219523A (en) |
-
1984
- 1984-04-16 JP JP7490884A patent/JPS60219523A/en active Pending
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