JPS60218002A - 光点位置計測方法 - Google Patents

光点位置計測方法

Info

Publication number
JPS60218002A
JPS60218002A JP7298484A JP7298484A JPS60218002A JP S60218002 A JPS60218002 A JP S60218002A JP 7298484 A JP7298484 A JP 7298484A JP 7298484 A JP7298484 A JP 7298484A JP S60218002 A JPS60218002 A JP S60218002A
Authority
JP
Japan
Prior art keywords
light spot
camera
cross
measurement
cross filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7298484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331362B2 (https=
Inventor
Akio Aoki
昭雄 青木
Toshiya Maekawa
俊哉 前川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP7298484A priority Critical patent/JPS60218002A/ja
Publication of JPS60218002A publication Critical patent/JPS60218002A/ja
Publication of JPH0331362B2 publication Critical patent/JPH0331362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP7298484A 1984-04-13 1984-04-13 光点位置計測方法 Granted JPS60218002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7298484A JPS60218002A (ja) 1984-04-13 1984-04-13 光点位置計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7298484A JPS60218002A (ja) 1984-04-13 1984-04-13 光点位置計測方法

Publications (2)

Publication Number Publication Date
JPS60218002A true JPS60218002A (ja) 1985-10-31
JPH0331362B2 JPH0331362B2 (https=) 1991-05-02

Family

ID=13505160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7298484A Granted JPS60218002A (ja) 1984-04-13 1984-04-13 光点位置計測方法

Country Status (1)

Country Link
JP (1) JPS60218002A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5548392A (en) * 1995-01-31 1996-08-20 Kabushikikaisha Wacom Optical position detector having scale pattern spot-illuminated to increase resolution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5548392A (en) * 1995-01-31 1996-08-20 Kabushikikaisha Wacom Optical position detector having scale pattern spot-illuminated to increase resolution

Also Published As

Publication number Publication date
JPH0331362B2 (https=) 1991-05-02

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