JPS60208866A - 圧覚センサの製造方法 - Google Patents

圧覚センサの製造方法

Info

Publication number
JPS60208866A
JPS60208866A JP59065210A JP6521084A JPS60208866A JP S60208866 A JPS60208866 A JP S60208866A JP 59065210 A JP59065210 A JP 59065210A JP 6521084 A JP6521084 A JP 6521084A JP S60208866 A JPS60208866 A JP S60208866A
Authority
JP
Japan
Prior art keywords
pressure
cell
pressure sensor
cells
strain gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59065210A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473634B2 (enExample
Inventor
Shinobu Sagisawa
鷺沢　忍
Mitsuo Kobayashi
光男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59065210A priority Critical patent/JPS60208866A/ja
Publication of JPS60208866A publication Critical patent/JPS60208866A/ja
Publication of JPH0473634B2 publication Critical patent/JPH0473634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59065210A 1984-04-03 1984-04-03 圧覚センサの製造方法 Granted JPS60208866A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59065210A JPS60208866A (ja) 1984-04-03 1984-04-03 圧覚センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59065210A JPS60208866A (ja) 1984-04-03 1984-04-03 圧覚センサの製造方法

Publications (2)

Publication Number Publication Date
JPS60208866A true JPS60208866A (ja) 1985-10-21
JPH0473634B2 JPH0473634B2 (enExample) 1992-11-24

Family

ID=13280320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59065210A Granted JPS60208866A (ja) 1984-04-03 1984-04-03 圧覚センサの製造方法

Country Status (1)

Country Link
JP (1) JPS60208866A (enExample)

Also Published As

Publication number Publication date
JPH0473634B2 (enExample) 1992-11-24

Similar Documents

Publication Publication Date Title
EP0162565B1 (en) Pressure sense recognition control system
US8966996B2 (en) Force sensor
US7490524B2 (en) Force sensor chip
Liang et al. Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams
KR102080426B1 (ko) 4개 미만의 빔 표면 상에 계측기기를 갖는 힘／토크 센서
US20080053247A1 (en) Force sensor chip
US20080295610A1 (en) Triaxial force sensor and triaxial force detection method
US7707899B2 (en) Force sensor chip
KR19980083857A (ko) 6분력 로드셀
KR20050111009A (ko) 아날로그 신호처리회로를 내장한 6축 힘토크센서
JPS60208866A (ja) 圧覚センサの製造方法
CN119984615A (zh) 多维力传感器及加工方法
KR102015784B1 (ko) 다축 로드 셀
JPH04328434A (ja) 複合センサ
JPS60153170A (ja) 圧覚センサ
JPS6093933A (ja) 荷重計
JPS60153172A (ja) 圧覚センサ
JPH07113588B2 (ja) 力‐モーメント・センサ
JPH0473303B2 (enExample)
JPH0676929B2 (ja) 分布型圧覚センサ
JPH0246092B2 (enExample)
CN119984613A (zh) 多维力传感器及加工方法
JPS60153173A (ja) 圧覚センサ
JP2771070B2 (ja) 差圧センサ
CN120778272A (zh) 一种应变计及使用该应变计的多维力传感器