JPS60208824A - 気相成長装置 - Google Patents
気相成長装置Info
- Publication number
- JPS60208824A JPS60208824A JP6606484A JP6606484A JPS60208824A JP S60208824 A JPS60208824 A JP S60208824A JP 6606484 A JP6606484 A JP 6606484A JP 6606484 A JP6606484 A JP 6606484A JP S60208824 A JPS60208824 A JP S60208824A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- chamber
- reaction
- gas
- transparent plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6606484A JPS60208824A (ja) | 1984-04-03 | 1984-04-03 | 気相成長装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6606484A JPS60208824A (ja) | 1984-04-03 | 1984-04-03 | 気相成長装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60208824A true JPS60208824A (ja) | 1985-10-21 |
JPH0518250B2 JPH0518250B2 (ko) | 1993-03-11 |
Family
ID=13305048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6606484A Granted JPS60208824A (ja) | 1984-04-03 | 1984-04-03 | 気相成長装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60208824A (ko) |
-
1984
- 1984-04-03 JP JP6606484A patent/JPS60208824A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0518250B2 (ko) | 1993-03-11 |
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