JPS60208035A - イオンビ−ム発生装置 - Google Patents
イオンビ−ム発生装置Info
- Publication number
- JPS60208035A JPS60208035A JP59066895A JP6689584A JPS60208035A JP S60208035 A JPS60208035 A JP S60208035A JP 59066895 A JP59066895 A JP 59066895A JP 6689584 A JP6689584 A JP 6689584A JP S60208035 A JPS60208035 A JP S60208035A
- Authority
- JP
- Japan
- Prior art keywords
- substance
- laser beam
- laser
- gas discharge
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59066895A JPS60208035A (ja) | 1984-04-02 | 1984-04-02 | イオンビ−ム発生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59066895A JPS60208035A (ja) | 1984-04-02 | 1984-04-02 | イオンビ−ム発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60208035A true JPS60208035A (ja) | 1985-10-19 |
JPH0527211B2 JPH0527211B2 (enrdf_load_html_response) | 1993-04-20 |
Family
ID=13329110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59066895A Granted JPS60208035A (ja) | 1984-04-02 | 1984-04-02 | イオンビ−ム発生装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60208035A (enrdf_load_html_response) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62216135A (ja) * | 1986-03-15 | 1987-09-22 | Shimadzu Corp | イオン銃 |
US6140656A (en) * | 1995-01-10 | 2000-10-31 | Mitsubishi Denki Kabushiki Kaisha | Ion implantation apparatus, ion implantation method and semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022999A (enrdf_load_html_response) * | 1973-06-28 | 1975-03-12 |
-
1984
- 1984-04-02 JP JP59066895A patent/JPS60208035A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022999A (enrdf_load_html_response) * | 1973-06-28 | 1975-03-12 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62216135A (ja) * | 1986-03-15 | 1987-09-22 | Shimadzu Corp | イオン銃 |
US6140656A (en) * | 1995-01-10 | 2000-10-31 | Mitsubishi Denki Kabushiki Kaisha | Ion implantation apparatus, ion implantation method and semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPH0527211B2 (enrdf_load_html_response) | 1993-04-20 |
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