JPS60203831A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS60203831A
JPS60203831A JP6177784A JP6177784A JPS60203831A JP S60203831 A JPS60203831 A JP S60203831A JP 6177784 A JP6177784 A JP 6177784A JP 6177784 A JP6177784 A JP 6177784A JP S60203831 A JPS60203831 A JP S60203831A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
receiving plate
pressure receiving
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6177784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582538B2 (enrdf_load_stackoverflow
Inventor
Toshio Abe
阿部　利男
Kazuo Mochizuki
望月　一夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP6177784A priority Critical patent/JPS60203831A/ja
Publication of JPS60203831A publication Critical patent/JPS60203831A/ja
Publication of JPH0582538B2 publication Critical patent/JPH0582538B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP6177784A 1984-03-28 1984-03-28 圧力センサ Granted JPS60203831A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6177784A JPS60203831A (ja) 1984-03-28 1984-03-28 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6177784A JPS60203831A (ja) 1984-03-28 1984-03-28 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60203831A true JPS60203831A (ja) 1985-10-15
JPH0582538B2 JPH0582538B2 (enrdf_load_stackoverflow) 1993-11-19

Family

ID=13180860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6177784A Granted JPS60203831A (ja) 1984-03-28 1984-03-28 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60203831A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002044680A1 (en) * 2000-12-01 2002-06-06 Ngk Spark Plug Co., Ltd. Charge amplifier for piezoelectric pressure sensor
WO2008025778A1 (de) * 2006-08-31 2008-03-06 Siemens Aktiengesellschaft Einrichtung zur energieumwandlung, insbesondere piezoelektrischer mikro-power-wandler

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5484979U (enrdf_load_stackoverflow) * 1977-11-28 1979-06-15
JPS5658632A (en) * 1979-10-18 1981-05-21 Seikosha Co Ltd Pressure detecting device
JPS5941735U (ja) * 1982-09-08 1984-03-17 ティーディーケイ株式会社 圧力センサ−

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5484979U (enrdf_load_stackoverflow) * 1977-11-28 1979-06-15
JPS5658632A (en) * 1979-10-18 1981-05-21 Seikosha Co Ltd Pressure detecting device
JPS5941735U (ja) * 1982-09-08 1984-03-17 ティーディーケイ株式会社 圧力センサ−

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002044680A1 (en) * 2000-12-01 2002-06-06 Ngk Spark Plug Co., Ltd. Charge amplifier for piezoelectric pressure sensor
US7042288B2 (en) 2000-12-01 2006-05-09 Ngk Spark Plus Co., Ltd. Charge amplifier for piezoelectric pressure sensor
WO2008025778A1 (de) * 2006-08-31 2008-03-06 Siemens Aktiengesellschaft Einrichtung zur energieumwandlung, insbesondere piezoelektrischer mikro-power-wandler

Also Published As

Publication number Publication date
JPH0582538B2 (enrdf_load_stackoverflow) 1993-11-19

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