JPS60201601A - Resistor element - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a resistor element, and more particularly to an electrode consisting of a resistor formed on a ceramic substrate and electrodes formed at both ends of the resistor. The present invention relates to a resistor (hereinafter referred to as a resistor element) with an attached resistor.

Conventional technology In conventional hybrid ICs, resistors, electrodes, and wiring patterns are formed on an insulating substrate such as ceramic by vapor deposition or printing, and chip capacitors, semiconductor ICs, etc. are mounted on the same insulating substrate. Ta. This kind of hybrid IC
Noyoshi is even more compact.

Higher integration requires the formation of higher-density wiring patterns and small, yet high-performance resistors. However, the following obstacles lie in meeting these demands. That is, in conventional hybrid ICs, resistors, electrodes, and wiring patterns are generally formed on a ceramic substrate sintered with alumina powder by vapor deposition or printing.

In this case, since the ceramic substrate is sintered at high temperature in advance, when forming the resistor, electrodes, and wiring patterns, for example, the resistor and electrodes are printed using a resistor paste or conductor paste. Even if a wiring pattern including the above is formed and fired, the firing temperature in this case is considerably lower than the sintering temperature of the ceramic substrate. Therefore, the chemical reaction of the resistor paste and the conductor paste with respect to the ceramic substrate is extremely small, and the influence of mutual diffusion between various harmful substances is largely dependent on at least the various pastes, and the involvement of the ceramic substrate is extremely small. but,
When a raw ceramic sheet, that is, a ceramic green sheet, is used, and a wiring pattern including resistors and electrodes is formed on this sheet using a paste printing method, etc., and multiple sheets are laminated and fired at the same time, firing is performed. As a result, the glass material of the sheet material induced complex chemical reactions with the resistor and conductor pastes, and interdiffusion reactions between the materials were particularly pronounced during firing, making it impossible to achieve the desired characteristics.

Purpose of the Invention The present invention has been made in view of the actual state of the prior art and future trends, and its purpose is to create an ultra-small and high-performance composite component in a ceramic substrate. The object of the present invention is to provide a built-in resistor element.

21. Constitution of the Invention According to the present invention, a composition in which the weight ratio of ruthenium dioxide and inorganic oxides excluding ruthenium dioxide is 50,150 to 5/95 is formed on a ceramic green seed made of lead borosilicate glass and aluminum oxide. A resistor as a main component and an electrode as a main component with a weight ratio of silver and palladium of 9515 to 70/30 are deposited, and a plurality of ceramic green sheets are coated with the resistor and the electrode. A resistor element is obtained by laminating the layers and firing them.

Principles of the Invention When alumina powder and lead borosilicate glass are used as fillers for ceramic green sheets, various resistor pastes and conductor pastes have been investigated for materials with low interdiffusion. As a result, in the acid salt structure of ruthenium oxide, such as bismuth ruthenate oxide and gadolinium ruthenate oxide, which are commonly used as resistor pastes, the conductive metal and the glass components in the sheet are involved in a complicated manner during firing. It was found that a change occurred and the predetermined resistance value characteristics were not expressed. On the other hand, when the resistor is made of ruthenium dioxide (RuO*), the effect during firing is extremely small (at a firing temperature of about 700 to 900°C, results were obtained that were sufficiently usable for general use.

In particular, there is a strong relationship with conductive materials, and when the conductive material is silver or palladium alone, a significant interdiffusion reaction is observed.
Even if ruthenium dioxide was used as a resistor, the result could not be put to practical use because the specified resistance value and temperature coefficient of resistance were not achieved. However, when it was composed of a composition ratio of silver and palladium, good results were obtained. was gotten. This is thought to be because the alloy state of silver and palladium exhibits an effect that makes it extremely difficult for the ruthenium dioxide of the resistor to diffuse into each other even in the presence of the glass material of the sheet. As for the composition ratio of the resistor,
Change the sheet resistance value from low resistance (approximately 100/mouth) to high resistance value (approx.
Since the amount of ruthenium dioxide required is 50,150 to 5/95 with respect to other inorganic oxides except ruthenium dioxide, the composition ratio of ruthenium dioxide was selected to be 50,150 to 5/95.

For this purpose, conductor pastes, in particular the silver and palladium conductor materials according to the invention, can be used with aluminum oxide (AA!
*Os) and a ceramic green sheet made of lead borosilicate glass, we investigated in detail the composition ratio of silver and palladium, which causes relatively little interdiffusion with the sheet and the resistor. As a result, if the conductor material has a MW composition ratio of silver and palladium of 9515 to 70/30 as its main component, the effect on the resistor and the ceramic green sheet whose main component is ruthenium dioxide in the above composition ratio range is as follows. found that it was reduced. As described above, in the resistor element of the present invention, when ceramic green sheets of aluminum oxide and lead borosilicate glass are used, it is particularly effective, that is, there is little influence on characteristic deterioration due to interaction, and predetermined resistance characteristics can be achieved. It can be expressed.

To, Example Next, the present invention will be explained by examples.

FIG. 1 is a process block diagram for explaining the manufacturing process of a resistor element according to an embodiment of the present invention, FIG. 2 is a perspective view immediately before stacking and firing a plurality of green sheets,
FIG. 3 is a circuit diagram of a resistor element manufactured by the process shown in FIG. First, as shown in Table 1, inorganic powder A consisting of aluminum oxide (A110g) and silicon oxide (8i
0z), lead oxide (pbo) and boron oxide (BsOs)
and inorganic powder B containing as the main component were mixed at the mixing ratio shown in Table 2. Inorganic powder 100 shown in FIG. 1 of A+H
f, as shown in FIG.

Table 1 Table 2 Organic solvent ethyl cellosolve 60-100cc1 butyl carpitol 10-20cc1 and butyl phthalyl glycolate 1.5-3cc and organic binder polyvinyl butyral 5-3cc as shown in FIG. 2
Add 0F and mix thoroughly to obtain slurry 4. this slurry 4
is formed into a film 5 by a casting film formation method using a doctor blade, dried to form an unfired insulating sheet 6 shown in FIGS. 1 and 2, and punched P1 * P with a mold made of stainless steel or the like. 2 + ---P n
At the same time, n types of holes 7, 7, -m= are formed. Next, ruthenium oxide (几u02) and lead oxide (PbO)
, 'Silicon oxide (StO), aluminum oxide (AA!)
Resistor 11 made of a ruthenium-based composition such that the weight ratio of 20g) + glass made of copper oxide (CuO) etc. is 50150 to 5/95, and silver (Ag)
and palladium (Pd) weight ratio is 9515 to 70/30
A conductor electrode 12 and a wiring pattern 13 having as main components DI, D2, ---Dn are printed on the insulating sheet 6.

Next, a plurality of these sheets are laminated so as to constitute the circuit of the resistor network shown in FIG.

Thermocompression bonding 7 is carried out for about 20 minutes under pressure conditions of 200 to 300 kg/ca, and then the peak temperature is 800 to 1000 kg/ca.
Firing 8 is completed under temperature conditions that allow holding at ℃ for about 10 minutes.

FIG. 4 is a graph showing the temperature characteristics of the resistor network built into the ceramic substrate according to the present invention, and FIG.
3 is a graph showing the results of a life test when applying a load of . Here, the temperature coefficient (TCi'L) is -5 at a temperature of 25°C.
Resistance values at 5℃ and 125℃ 2B r R-1i1i
It was determined by subtracting from tR115 using the following formula.

In addition, the life test is 10Ω/mouth, 10Ω/mouth, 103Ω/mouth.
The rate of change in resistance value up to 1000 hours was measured for each resistor element of 0.10 Ω/port, 10 Ω/port, and 10 Ω/port. As shown in Figure 5, the results are 10Ω/
TC is ±100p in the resistance value range of ~106Ω/mouth
pm/℃ and high temperature load life test, the resistance value change rate is ±0.
A very stable ceramic built-in resistor element within 5 inches was obtained.

In addition to the effects of Toro's invention, according to the present invention, as shown in FIG. 2, the resistor and electrode can be formed in layers inside the ceramic, making it easier to downsize and integrate the material than the conventional hybrid technology. A high-performance resistor element can be obtained.

In the above embodiments, the resistor elements having a network configuration have been described, but it goes without saying that the present invention can be applied to individual resistor elements.

[Brief explanation of the drawing]

Fig. 1 is a process block diagram for explaining the manufacturing process of a resistor element according to an embodiment of the present invention, Fig. 2 is a perspective view of the work-in-progress in the process of Fig. 1, and Fig. 3 is after completion. FIG. 4 is a graph showing the temperature characteristics of a resistor element according to an embodiment of the present invention, and FIG. 5 is a graph showing the life test characteristics. 6... Insulating sheet, 7... Hole, 11
...Resistor, 12...Electrode, 13...
...Wiring pattern. z l diagram

Claims (1)

[Claims] On a ceramic green sheet made of lead borosilicate glass and aluminum oxide, the weight ratio of ruthenium dioxide and inorganic oxides excluding ruthenium dioxide is 50,150 to 50,150.
A ceramic green coated with a resistor whose main component is a composition of 5/95 and a conductor electrode whose main component is a composition with a weight ratio of silver and palladium of 9515 to 70/30, and the resistor and electrode are coated thereon. A resistor element characterized by being made by laminating a plurality of sheets and firing them.