JPS60196659A - Resistance measuring electrode for sensor - Google Patents

Abstract

PURPOSE:To obtain an electrode excellent in mass productivity, by alternately laminating insulating layers and conductor layers and utilizing the cross-sectional area of the laminate to use the conductor layers as a resistance measuring electrode for a sensor. CONSTITUTION:A large number of conductor layers 5 and insulating layers 4 are alternately stacked. This process can be performed by utilizing a green sheet and thick film printing technique. Because the gaps between electrodes are determined by the thickness of each insulating layer 4, each gap can be reduced to about 10mum. Thereafter, right and left parts are cut and the cross-sectional area exposed by cutting is metallized to connect the conductor layers and a pair of comb shaped electrodes are formed while leads are attached to the metallized parts 6. Because of a structure only cutting the laminate of conductors and insulators as mentioned above, mass productivity is excellent.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a resistance measuring electrode for a sensor, and particularly to the structure and manufacturing method of an electrode suitable for a sensor using a sensitive material with high specific resistance.

[Background of the invention]

Conventionally, in resistance measurement using a sensor using a sensitive material with high specific resistance, in many cases, as shown in FIG. was used, and a layer of sensitive material was provided on top of it. (For example, JP 58-55847..5
8-73854.58-86447, etc.) In this case, due to printing dimensional accuracy issues, it is said that the minimum gap between electrodes is about 50 μm. For example, when the opposing length of comb-shaped electrodes is 50 mm, the measurement The sheet resistance of the material should be 1
It was difficult to measure when the resistance was larger than 0.010Ω/mouth.

[Purpose of the invention]

An object of the present invention is to provide a resistance measuring electrode for a sensor which can obtain a low resistance value even with a sensitive material for a sensor having a high specific resistance and is excellent in mass production.

[Summary of the invention]

To measure the resistance of materials with high resistivity, increase the opposing area (or opposing length) between the two electrodes.

All you have to do is make the gap between them smaller. Therefore, we devised a method of using a dimension in the thickness direction that allows the distance between electrodes to be further reduced than when a thick film is used in a planar manner as shown in FIG.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 2 shows a resistance measuring electrode for a sensor in which insulating layers 4 and conductor layers 5 are alternately laminated and a cross section thereof is used.

Every other conductor layer 5 is connected to the same metallized portion 6, and two of these are combined to form a pair of electrodes having a comb-shaped cross section. The conductive layer 5 is made of aluminum, gold, ruthenium oxide, etc., and the insulating layer 4 is made of alumina, glass, etc. Leads are taken out from the metallized portion 6 by means of solder (=I) or the like.

3 is a material formed on the electrode whose resistance is to be measured.

FIG. 3 shows the manufacturing process of the laminated type sensor resistance measuring electrode shown in FIG. Each process is as follows.

(1) Conductor layers 5 and insulating layers 4 are stacked alternately in many layers.

This process can be performed using green sheet and thick film printing techniques, and the following two methods are possible.

(1) Each layer of conductor and insulator is laminated by thick film printing and drying on the insulator green sheet, and finally fired.

(11) A number of thick insulating layers are printed on conductor green sheets, stacked, pressed together, and fired.

Since the gap between the electrodes is determined by the thickness of the insulation N4, it can be reduced to about 10 μm in this case.

(2) Cut the left and right parts, then metalize to connect each conductor layer.

(3) Finally, separate each chip.

In FIG. 2, the metallized portions are provided on the left and right surfaces. On the other hand, in the embodiment shown in FIG. 4, the metallized portion is formed only on one surface, which simplifies the work of attaching leads.

In the embodiment shown in FIG. 5, a heater 7 is used in addition to the resistance measuring electrode.
is provided. Since gas sensors using SnO and ZnO2 operate at high temperatures, they can be used as resistive materials to form gas sensors. Tungsten P t , NiCr, or the like is used as the material for the heater, but in this structure, the heater is not directly exposed to the air, so it is not oxidized and reliability is improved. Furthermore, since the distance d between the electrode and the heater shown in the figure can be made small, heating can be achieved with less electric power.

〔Effect of the invention〕

According to the present invention, when the size of the sensor is the same, it is possible to measure a resistance value approximately 115 lower than when using a conventional resistance measuring electrode for a sensor. In addition, it uses thick film printing and green sheet technology to create a structure where conductors and insulators are simply layered and separated, making it suitable for mass production.

In addition, the structure shown in Figure 4 not only reduces the manufacturing process of the sensor because the sensor material can be cut and separated after being deposited all at once, but it is also easy to make a leadless chip, making it easy to implement into a hybrid integrated circuit. .

Furthermore, since it has a layered structure, the facing area of the electrodes is large, so the capacitance is also large, and in combination with the sensor resistance, a CR oscillation type sensor that can obtain an output at a low frequency can be obtained.

It is also possible to detect temperature using part of the heater resistor.

[Brief explanation of drawings]

Figures 1 (a) and (b) are a plan view and an explanatory view of the A-A' section of a conventional resistance measuring electrode for a sensor, Figure 2 is a perspective view of a laminated resistance measuring electrode for a sensor, and Figure 3 is a perspective view of a laminated resistance measuring electrode for a sensor. The manufacturing process diagram of the electrode shown in FIG. 2, and FIGS. 4 and 5 are perspective views of other embodiments. 1... Ceramic plate, 2... Comb-shaped electrode, 3...
Material whose resistance is to be measured, 4... Insulating layer, 5... Conductor layer, 6... 2nd prisoner 3 l Continued from page 1 ■ Inventor Shu Ohara - 3-1 Saiwaimachi, Hitachi City No. 1 Hitachi Research Institute, Hitachi, Ltd.

Claims (1)

[Claims] (2) A resistance measuring electrode for a sensor, characterized in that conductive layers and insulating layers are alternately stacked by thick film printing and green sheets to form a laminated structure, and the conductive layer is used as an electrode using a cross section of the laminated structure.