JPS60194075A - 炭素皮膜の製造方法 - Google Patents

炭素皮膜の製造方法

Info

Publication number
JPS60194075A
JPS60194075A JP59049166A JP4916684A JPS60194075A JP S60194075 A JPS60194075 A JP S60194075A JP 59049166 A JP59049166 A JP 59049166A JP 4916684 A JP4916684 A JP 4916684A JP S60194075 A JPS60194075 A JP S60194075A
Authority
JP
Japan
Prior art keywords
carbon film
film
substrate
carbon
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59049166A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6147904B2 (https=
Inventor
Susumu Yoshimura
吉村　進
Mutsuaki Murakami
睦明 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Research Development Corp of Japan
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan, Shingijutsu Kaihatsu Jigyodan filed Critical Research Development Corp of Japan
Priority to JP59049166A priority Critical patent/JPS60194075A/ja
Publication of JPS60194075A publication Critical patent/JPS60194075A/ja
Publication of JPS6147904B2 publication Critical patent/JPS6147904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
JP59049166A 1984-03-16 1984-03-16 炭素皮膜の製造方法 Granted JPS60194075A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59049166A JPS60194075A (ja) 1984-03-16 1984-03-16 炭素皮膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59049166A JPS60194075A (ja) 1984-03-16 1984-03-16 炭素皮膜の製造方法

Publications (2)

Publication Number Publication Date
JPS60194075A true JPS60194075A (ja) 1985-10-02
JPS6147904B2 JPS6147904B2 (https=) 1986-10-21

Family

ID=12823492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59049166A Granted JPS60194075A (ja) 1984-03-16 1984-03-16 炭素皮膜の製造方法

Country Status (1)

Country Link
JP (1) JPS60194075A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012156202A (ja) * 2011-01-24 2012-08-16 Kaneka Corp グラフェン／高分子積層体およびその利用

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3033357U (ja) * 1996-07-09 1997-01-21 株式会社リアル 折りたたみ式整髪用ブラシ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012156202A (ja) * 2011-01-24 2012-08-16 Kaneka Corp グラフェン／高分子積層体およびその利用

Also Published As

Publication number Publication date
JPS6147904B2 (https=) 1986-10-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term