JPS60194066A - 硬質膜被覆材料の製造方法 - Google Patents
硬質膜被覆材料の製造方法Info
- Publication number
- JPS60194066A JPS60194066A JP4926784A JP4926784A JPS60194066A JP S60194066 A JPS60194066 A JP S60194066A JP 4926784 A JP4926784 A JP 4926784A JP 4926784 A JP4926784 A JP 4926784A JP S60194066 A JPS60194066 A JP S60194066A
- Authority
- JP
- Japan
- Prior art keywords
- irradiated
- rotating body
- laser light
- laser beam
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 claims abstract description 18
- 230000001678 irradiating effect Effects 0.000 claims abstract description 8
- 229910052582 BN Inorganic materials 0.000 claims description 22
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 7
- 239000010432 diamond Substances 0.000 claims description 7
- 239000007888 film coating Substances 0.000 claims description 7
- 238000009501 film coating Methods 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 3
- 229910001315 Tool steel Inorganic materials 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 230000008020 evaporation Effects 0.000 abstract description 6
- 238000001704 evaporation Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000005520 cutting process Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 150000002736 metal compounds Chemical class 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000005524 ceramic coating Methods 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000004227 thermal cracking Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910010421 TiNx Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- -1 cemented carbide Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012976 tarts Nutrition 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4926784A JPS60194066A (ja) | 1984-03-16 | 1984-03-16 | 硬質膜被覆材料の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4926784A JPS60194066A (ja) | 1984-03-16 | 1984-03-16 | 硬質膜被覆材料の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60194066A true JPS60194066A (ja) | 1985-10-02 |
| JPS6338427B2 JPS6338427B2 (enrdf_load_stackoverflow) | 1988-07-29 |
Family
ID=12826054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4926784A Granted JPS60194066A (ja) | 1984-03-16 | 1984-03-16 | 硬質膜被覆材料の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60194066A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63227766A (ja) * | 1986-10-27 | 1988-09-22 | Hitachi Ltd | 超微粒子膜の形成方法 |
| US5450434A (en) * | 1992-05-26 | 1995-09-12 | Sumitomo Electric Industries, Ltd. | Method to work cubic boron nitride article |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1832903A (zh) * | 2003-08-20 | 2006-09-13 | 日本电气株式会社 | 用于制造纳米碳的装置和方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158377A (en) * | 1981-03-27 | 1982-09-30 | Ishikawajima Harima Heavy Ind Co Ltd | Plating device for inside surface of pipe utilizing laser beam |
-
1984
- 1984-03-16 JP JP4926784A patent/JPS60194066A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158377A (en) * | 1981-03-27 | 1982-09-30 | Ishikawajima Harima Heavy Ind Co Ltd | Plating device for inside surface of pipe utilizing laser beam |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63227766A (ja) * | 1986-10-27 | 1988-09-22 | Hitachi Ltd | 超微粒子膜の形成方法 |
| US5450434A (en) * | 1992-05-26 | 1995-09-12 | Sumitomo Electric Industries, Ltd. | Method to work cubic boron nitride article |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6338427B2 (enrdf_load_stackoverflow) | 1988-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Voevodin et al. | Nanocrystalline WC and WC/a-C composite coatings produced from intersected plasma fluxes at low deposition temperatures | |
| JP5237124B2 (ja) | 窒化炭素を用いたコーティングおよび窒化炭素をコーティングした製品 | |
| US5620754A (en) | Method of treating and coating substrates | |
| US5731046A (en) | Fabrication of diamond and diamond-like carbon coatings | |
| US6274206B1 (en) | Method of coating a silicon or silicide substrate | |
| EP0474369B1 (en) | Diamond-like carbon coatings | |
| EP0752018A1 (en) | Surface treatment techniques | |
| JP3448884B2 (ja) | 人工ダイヤモンド被覆材 | |
| JP2005526905A (ja) | 鉄ベース基材上にダイヤモンド被膜を形成する方法およびｃｖｄダイヤモンド被膜を施すためのかかる鉄ベース基材の使用。 | |
| JPS60194066A (ja) | 硬質膜被覆材料の製造方法 | |
| JPS6338428B2 (enrdf_load_stackoverflow) | ||
| JPS61195971A (ja) | 耐摩耗性皮膜の形成方法 | |
| US5001001A (en) | Process for the fabrication of ceramic monoliths by laser-assisted chemical vapor infiltration | |
| JP5232942B2 (ja) | 切削工具の表面処理方法 | |
| JP4701386B2 (ja) | 高硬度材料 | |
| JP4133150B2 (ja) | ダイヤモンド膜被覆部材の製造方法 | |
| Novikov et al. | Superhard iC coatings used in complex processes of surface strengthening of tools and machine parts | |
| RU2092610C1 (ru) | Способ получения аморфных покрытий | |
| JP2004211136A (ja) | 密着性に優れた硬質皮膜およびその製造方法 | |
| JP2000129420A (ja) | 高温摺動部材用硬質膜 | |
| Fenker et al. | Deposition of CVD diamond onto ion beam modified ASP 23 cutting tools | |
| JP3787586B2 (ja) | 非晶質窒化ホウ素薄膜被覆摺動部材および摺動部材の製造方法 | |
| JPH11124665A (ja) | 摩擦摺動部材及びその製造方法 | |
| JPS62256964A (ja) | セラミツクスが被着された部材 | |
| Tkachev et al. | Structure and Frictional Properties of Ultrahard AlMgB14 Thin Coatings. Nanomaterials 2023, 13, 1589 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |