JPS60192338A - 終点検出方法 - Google Patents

終点検出方法

Info

Publication number
JPS60192338A
JPS60192338A JP59048917A JP4891784A JPS60192338A JP S60192338 A JPS60192338 A JP S60192338A JP 59048917 A JP59048917 A JP 59048917A JP 4891784 A JP4891784 A JP 4891784A JP S60192338 A JPS60192338 A JP S60192338A
Authority
JP
Japan
Prior art keywords
layer
state
signal
electric signal
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59048917A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139648B2 (show.php
Inventor
Yoshiyuki Imada
今田　善之
Masatoshi Tahira
昌俊 田平
Kenji Inoue
井上　憲二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainichi Nippon Cables Ltd
Original Assignee
Dainichi Nippon Cables Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainichi Nippon Cables Ltd filed Critical Dainichi Nippon Cables Ltd
Priority to JP59048917A priority Critical patent/JPS60192338A/ja
Publication of JPS60192338A publication Critical patent/JPS60192338A/ja
Publication of JPH0139648B2 publication Critical patent/JPH0139648B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
JP59048917A 1984-03-13 1984-03-13 終点検出方法 Granted JPS60192338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59048917A JPS60192338A (ja) 1984-03-13 1984-03-13 終点検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59048917A JPS60192338A (ja) 1984-03-13 1984-03-13 終点検出方法

Publications (2)

Publication Number Publication Date
JPS60192338A true JPS60192338A (ja) 1985-09-30
JPH0139648B2 JPH0139648B2 (show.php) 1989-08-22

Family

ID=12816599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59048917A Granted JPS60192338A (ja) 1984-03-13 1984-03-13 終点検出方法

Country Status (1)

Country Link
JP (1) JPS60192338A (show.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2598508A1 (fr) * 1986-05-09 1987-11-13 Guillaume Michel Procede et appareil de determination de fin d'attaque d'une surface gravee
US4767495A (en) * 1986-12-10 1988-08-30 Dainippon Screen Mfg. Co., Ltd. Method for detecting time for termination of surface layer removal processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2598508A1 (fr) * 1986-05-09 1987-11-13 Guillaume Michel Procede et appareil de determination de fin d'attaque d'une surface gravee
US4767495A (en) * 1986-12-10 1988-08-30 Dainippon Screen Mfg. Co., Ltd. Method for detecting time for termination of surface layer removal processing

Also Published As

Publication number Publication date
JPH0139648B2 (show.php) 1989-08-22

Similar Documents

Publication Publication Date Title
EP0809098B1 (en) A method and apparatus for optically discriminating between the phases of a three-phase fluid
US4711126A (en) Sensor for the measurement of the refractive index of a fluid and/or phase boundary between two fluids by means of visible or invisible light
CN102645253B (zh) 一种光电式连续液位测量方法及装置
EP0107410A1 (en) Method of photometric measurement
EP0516481A2 (en) Internal reflectance element with very small sample contacting surface
US20030121889A1 (en) Thickness measuring apparatus, thickness measuring method, and wet etching apparatus and wet etching method utilizing them
US20030090671A1 (en) Thickness measuring apparatus, thickness measuring method, and wet etching apparatus and wet etching method utilizing them
EP0393144A4 (en) Optical liquid level sensors
US6356675B1 (en) Fiber optic refractive index monitor
EP0367786A1 (en) Optical liquid level sensor
US5058420A (en) Fiber optic liquid leak detector
CN118243221A (zh) 一种光传感器的浸没因子测量装置及测量方法
JPS60192338A (ja) 終点検出方法
JPH0228541A (ja) 光式濃度検出装置
JPH11311602A (ja) 光通過率測定用プロ―ブ
IE66055B1 (en) Measuring a gap between a tube and a float
JPS60501125A (ja) 流動媒体中の懸濁物質含有率を測定する方法及びその装置
US7212280B1 (en) Device for measuring the dimension and controlling of defects in optical fibres during production
JP2002372493A (ja) 液体の測定方法
JPH05133871A (ja) 浸漬型液体比重測定装置
JPS61226639A (ja) 投入式成分々析計
JPS5995439A (ja) 腐食速度測定方法
JPS6197551A (ja) 管球用拡散被膜の被着強度試験方法
JPS587550A (ja) 自動曇り点測定装置
JPH0387605A (ja) 膜厚測定方法とその装置