JPS60192338A - 終点検出方法 - Google Patents
終点検出方法Info
- Publication number
- JPS60192338A JPS60192338A JP4891784A JP4891784A JPS60192338A JP S60192338 A JPS60192338 A JP S60192338A JP 4891784 A JP4891784 A JP 4891784A JP 4891784 A JP4891784 A JP 4891784A JP S60192338 A JPS60192338 A JP S60192338A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- state
- signal
- electric signal
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract description 14
- 238000001514 detection method Methods 0.000 claims description 12
- 230000001427 coherent effect Effects 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 5
- 239000010410 layer Substances 0.000 abstract description 19
- 239000013307 optical fiber Substances 0.000 abstract description 17
- 239000002344 surface layer Substances 0.000 abstract description 11
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 238000005530 etching Methods 0.000 description 8
- 230000018109 developmental process Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000005070 sampling Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 206010020710 Hyperphagia Diseases 0.000 description 1
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000020830 overeating Nutrition 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4891784A JPS60192338A (ja) | 1984-03-13 | 1984-03-13 | 終点検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4891784A JPS60192338A (ja) | 1984-03-13 | 1984-03-13 | 終点検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60192338A true JPS60192338A (ja) | 1985-09-30 |
| JPH0139648B2 JPH0139648B2 (enExample) | 1989-08-22 |
Family
ID=12816599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4891784A Granted JPS60192338A (ja) | 1984-03-13 | 1984-03-13 | 終点検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60192338A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2598508A1 (fr) * | 1986-05-09 | 1987-11-13 | Guillaume Michel | Procede et appareil de determination de fin d'attaque d'une surface gravee |
| US4767495A (en) * | 1986-12-10 | 1988-08-30 | Dainippon Screen Mfg. Co., Ltd. | Method for detecting time for termination of surface layer removal processing |
-
1984
- 1984-03-13 JP JP4891784A patent/JPS60192338A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2598508A1 (fr) * | 1986-05-09 | 1987-11-13 | Guillaume Michel | Procede et appareil de determination de fin d'attaque d'une surface gravee |
| US4767495A (en) * | 1986-12-10 | 1988-08-30 | Dainippon Screen Mfg. Co., Ltd. | Method for detecting time for termination of surface layer removal processing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0139648B2 (enExample) | 1989-08-22 |
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