JPS60192338A - 終点検出方法 - Google Patents

終点検出方法

Info

Publication number
JPS60192338A
JPS60192338A JP59048917A JP4891784A JPS60192338A JP S60192338 A JPS60192338 A JP S60192338A JP 59048917 A JP59048917 A JP 59048917A JP 4891784 A JP4891784 A JP 4891784A JP S60192338 A JPS60192338 A JP S60192338A
Authority
JP
Japan
Prior art keywords
layer
state
signal
electric signal
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59048917A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139648B2 (enExample
Inventor
Yoshiyuki Imada
今田　善之
Masatoshi Tahira
昌俊 田平
Kenji Inoue
井上　憲二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainichi Nippon Cables Ltd
Original Assignee
Dainichi Nippon Cables Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainichi Nippon Cables Ltd filed Critical Dainichi Nippon Cables Ltd
Priority to JP59048917A priority Critical patent/JPS60192338A/ja
Publication of JPS60192338A publication Critical patent/JPS60192338A/ja
Publication of JPH0139648B2 publication Critical patent/JPH0139648B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP59048917A 1984-03-13 1984-03-13 終点検出方法 Granted JPS60192338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59048917A JPS60192338A (ja) 1984-03-13 1984-03-13 終点検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59048917A JPS60192338A (ja) 1984-03-13 1984-03-13 終点検出方法

Publications (2)

Publication Number Publication Date
JPS60192338A true JPS60192338A (ja) 1985-09-30
JPH0139648B2 JPH0139648B2 (enExample) 1989-08-22

Family

ID=12816599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59048917A Granted JPS60192338A (ja) 1984-03-13 1984-03-13 終点検出方法

Country Status (1)

Country Link
JP (1) JPS60192338A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2598508A1 (fr) * 1986-05-09 1987-11-13 Guillaume Michel Procede et appareil de determination de fin d'attaque d'une surface gravee
US4767495A (en) * 1986-12-10 1988-08-30 Dainippon Screen Mfg. Co., Ltd. Method for detecting time for termination of surface layer removal processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2598508A1 (fr) * 1986-05-09 1987-11-13 Guillaume Michel Procede et appareil de determination de fin d'attaque d'une surface gravee
US4767495A (en) * 1986-12-10 1988-08-30 Dainippon Screen Mfg. Co., Ltd. Method for detecting time for termination of surface layer removal processing

Also Published As

Publication number Publication date
JPH0139648B2 (enExample) 1989-08-22

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