JPS60189842U - 表面欠陥計測装置 - Google Patents

表面欠陥計測装置

Info

Publication number
JPS60189842U
JPS60189842U JP7843684U JP7843684U JPS60189842U JP S60189842 U JPS60189842 U JP S60189842U JP 7843684 U JP7843684 U JP 7843684U JP 7843684 U JP7843684 U JP 7843684U JP S60189842 U JPS60189842 U JP S60189842U
Authority
JP
Japan
Prior art keywords
measurement data
measured
scanning period
deviation
sum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7843684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0333001Y2 (enrdf_load_stackoverflow
Inventor
橋本　利夫
今野　憲一
幸治 山田
和久 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Toyota Motor Corp
Original Assignee
Koyo Seiko Co Ltd
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd, Toyota Motor Corp filed Critical Koyo Seiko Co Ltd
Priority to JP7843684U priority Critical patent/JPS60189842U/ja
Publication of JPS60189842U publication Critical patent/JPS60189842U/ja
Application granted granted Critical
Publication of JPH0333001Y2 publication Critical patent/JPH0333001Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7843684U 1984-05-28 1984-05-28 表面欠陥計測装置 Granted JPS60189842U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7843684U JPS60189842U (ja) 1984-05-28 1984-05-28 表面欠陥計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7843684U JPS60189842U (ja) 1984-05-28 1984-05-28 表面欠陥計測装置

Publications (2)

Publication Number Publication Date
JPS60189842U true JPS60189842U (ja) 1985-12-16
JPH0333001Y2 JPH0333001Y2 (enrdf_load_stackoverflow) 1991-07-12

Family

ID=30622414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7843684U Granted JPS60189842U (ja) 1984-05-28 1984-05-28 表面欠陥計測装置

Country Status (1)

Country Link
JP (1) JPS60189842U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0333001Y2 (enrdf_load_stackoverflow) 1991-07-12

Similar Documents

Publication Publication Date Title
JPH01143945A (ja) テープ欠陥検出方法
CN111638226A (zh) 检测方法、图像处理器以及检测系统
US4097158A (en) Half-maximum threshold circuit for optical micrometer
JPS60189842U (ja) 表面欠陥計測装置
JPH0334578B2 (enrdf_load_stackoverflow)
JPS60189841U (ja) 表面欠陥計測装置
JPS61132845A (ja) 表面欠陥検査装置
JPH0326447Y2 (enrdf_load_stackoverflow)
JPS6269113A (ja) ネジ表面検査装置
JPH01214743A (ja) 光学検査装置
JPS61225604A (ja) 寸法測定方法
JPS591978B2 (ja) 物体状態検査装置
JPH04339247A (ja) 太陽電池傷自動検出装置
JPH03130648A (ja) 欠陥検査装置
JPS63106510A (ja) 光学式傷変位計測装置
JPS626164A (ja) 凹形角部の超音波検査方法および装置
JPH0325739B2 (enrdf_load_stackoverflow)
JP2682808B2 (ja) 走査レーザ光のパワー測定装置
JPS5842933Y2 (ja) 欠陥検出装置
JPH02176513A (ja) 欠陥検査装置
JPH02300617A (ja) 形状測定装置
JPS6042883B2 (ja) 光学式天面検査装置
JPH0227241A (ja) 光ディスクの欠陥検査装置
JPH0531101B2 (enrdf_load_stackoverflow)
JPS5761903A (en) Inspecting device for terminal press-fixed of electric wire press-fixed with terminal