JPS60187677A - Structural material for high temperature furnace - Google Patents

Structural material for high temperature furnace

Info

Publication number
JPS60187677A
JPS60187677A JP24626784A JP24626784A JPS60187677A JP S60187677 A JPS60187677 A JP S60187677A JP 24626784 A JP24626784 A JP 24626784A JP 24626784 A JP24626784 A JP 24626784A JP S60187677 A JPS60187677 A JP S60187677A
Authority
JP
Japan
Prior art keywords
structural material
temperature furnace
furnace
thin layer
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24626784A
Other languages
Japanese (ja)
Inventor
Tsutae Takahashi
高橋 傳
Hideo Koizumi
小泉 英雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24626784A priority Critical patent/JPS60187677A/en
Publication of JPS60187677A publication Critical patent/JPS60187677A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain a structural material for a high temp. furnace having improved heat resistance and a prolonged life by coating the surface of an Mo-base structural material with a thin carbon layer. CONSTITUTION:A structural material 2 made of Mo or an Mo alloy is placed in a vapor phase plating furnace 1 kept at about 800-1,200 deg.C high temp., and a gaseous mixture 3 contg. CH4 is fed to form a thin carbon layer 4 of about 5- 50mum thickness on the surface of the structural material 2. A structural material for a high temp. furnace preventing loss on heating and reduction in the thickness due to the falling of the surface layer can be provided. The structural material has a long life.

Description

【発明の詳細な説明】 本発明は、Mo又はMo合金から成る構造材の表面に、
耐熱性に極めて優れているCから成る薄層を被覆した高
温炉用構造材に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides the following features:
This invention relates to a structural material for a high-temperature furnace coated with a thin layer of C, which has extremely excellent heat resistance.

MO又はMo合金から成るm造材は、優れた耐熱性と耐
熱衝撃性を有し、かつ、脆性が小さいところから高温用
構造材、高温用炉材として原子力利用開発、航空機工業
、宇宙開発、海洋開発等の種々の分野において多用され
ている。
M-shaped materials made of MO or Mo alloys have excellent heat resistance and thermal shock resistance, and are less brittle, so they are used as high-temperature structural materials and high-temperature reactor materials in nuclear energy utilization development, aircraft industry, space development, It is widely used in various fields such as ocean development.

しかし、このようなMO又はMo合金から成る耐熱性に
極めて優れた構造材においても例えば高温炉用に用い、
600℃以上に大気中で加熱された場合には表層から徐
々に酸化して、表層はMO酸化物となり、表層から徐々
に脱落して構造材がやせ細るという欠点があった。
However, even structural materials made of such MO or Mo alloys with extremely excellent heat resistance cannot be used, for example, in high-temperature furnaces.
When heated in the atmosphere to 600° C. or higher, the surface layer is gradually oxidized, and the surface layer turns into MO oxide, which gradually falls off from the surface layer, resulting in a thinner structural material.

また、真空中にJ3いても高瀉下で表層から徐々に蒸発
して構造材がやせ細るため、寿命上の問題もあった。
Furthermore, even if J3 was placed in a vacuum, the structural material would gradually evaporate from the surface layer under high air pressure, resulting in thinning of the structural material, which caused problems in terms of lifespan.

本発明はかかるMO又はMo合金から成る構造材の耐熱
性をさらに向上すべくなされICもので、MO又はMo
合金から成る構造材の表面に、炭素から成る薄層が被覆
されて成ることを特徴とする高温炉用構造材を提供しよ
うとづるものである。
The present invention is an IC which is made to further improve the heat resistance of a structural material made of MO or Mo alloy.
The object of the present invention is to provide a structural material for a high-temperature furnace, characterized in that the surface of a structural material made of an alloy is coated with a thin layer of carbon.

本発明の対象となるMO又はMo合金どし−Cは、MO
金属粉末又はMO金属粉末と他の金属もしくは非金属元
素の粉末、例えば7i、Zr。
MO or Mo alloy Doshi-C, which is the object of the present invention, is MO
Metal powder or MO metal powder and powder of other metal or non-metal elements, such as 7i, Zr.

B、V、Re 、W等との混合粉末を圧縮成形し非酸化
性雰囲気中で加熱焼結されて得られたもの、あるいはM
O金金属はMO合金の溶解鋳造もしくは機械加工により
4qられたものを使用することかできる。
Those obtained by compression molding a mixed powder of B, V, Re, W, etc. and heating and sintering in a non-oxidizing atmosphere, or M
As the O gold metal, one obtained by melting and casting or machining an MO alloy can be used.

以下本発明の詳細な説明づる。A detailed explanation of the present invention follows.

本発明における高温炉用構造材は、MO又はMO合金か
ら成る構造材の表面に通常5μから50μの厚さのCか
ら成る薄層が被覆されて構成されている。
The structural material for a high-temperature furnace according to the present invention is constructed by coating the surface of a structural material made of MO or an MO alloy with a thin layer of carbon having a thickness of usually 5 to 50 microns.

Cから成る薄層はプラズマ溶用法、電気めっき法、気相
めっき法等の方法により構造材上に被m 7Jることが
できるが、気相めっき法による場合には、他の方法によ
る場合に比較して、より組織の緻密な、かつ、構造材と
の密着性の高い薄層を得ることができる。
A thin layer of C can be applied to the structural material by methods such as plasma melting, electroplating, and vapor phase plating. In comparison, a thin layer with a denser structure and higher adhesion to the structural material can be obtained.

また、薄層の膜厚は5μ以下の場合には、耐熱性の向上
効果が小さく、逆に50μ以上の場合には、薄層が構造
材から剥離し易くなり、更に作業性も低下覆るので、膜
厚は5〜50μとプるのが望ましい。
In addition, if the thickness of the thin layer is less than 5 μm, the effect of improving heat resistance will be small, and if it is more than 50 μm, the thin layer will easily peel off from the structural material, further reducing workability. It is desirable that the film thickness is 5 to 50 μm.

このような高温炉用構造材は人気中および真空中におい
て約1500℃に加熱された場合でも、酸化したり蒸発
したりすることがなく、極めて耐熱性の高いものとなる
。また、Moは、中性子照射による損傷が少なく特に原
子力関連の高温炉用構造材として好適である。
Such a structural material for a high-temperature furnace does not oxidize or evaporate even when heated to about 1500°C in a vacuum or in a vacuum, and has extremely high heat resistance. Moreover, Mo has little damage due to neutron irradiation and is particularly suitable as a structural material for high-temperature reactors related to nuclear power.

次に実施例により本発明の詳細な説明づる。Next, the present invention will be explained in detail with reference to Examples.

〔実施例1〕 平均粒径2〜4μのMo金属粉末を1〜2t011/C
m2の圧力で加圧成型し、これを1−12雰囲気中で1
800℃×5時間加熱焼結し、次いでこれを鍛造した後
圧延加工して得られた幅20mm、長さ300mm 、
厚さ1mmの矩形溝造材の表面にChlら成る膜厚的1
0μの薄層を気相めっき法により形成し高温炉用構造材
を得た。
[Example 1] Mo metal powder with an average particle size of 2 to 4μ is 1 to 2t011/C
Pressure molded at a pressure of m2, and molded in a 1-12 atmosphere.
Heat sintered at 800°C for 5 hours, then forged and rolled to a width of 20 mm and a length of 300 mm.
Film thickness 1 consisting of Chl on the surface of a rectangular groove material with a thickness of 1 mm
A structural material for a high temperature furnace was obtained by forming a thin layer of 0μ by vapor phase plating.

なJ5、気相めっき法は、例えば次式 8式% (a 、 b 、 Oは係数、以下同じ)で表わされる
熱反応を利用して、図に示づように、約800〜120
0℃の高温雰囲気とされた気相めっき類1内にMO金金
属ら成る構造材2を載置し、この気相めっき類1内に、
CI−14から成る混合ガス3を流しながら約5〜10
時間挿通することにより行なわれた。
For example, the vapor phase plating method utilizes a thermal reaction expressed by the following formula 8% (a, b, O are coefficients, the same applies hereinafter), and as shown in the figure, approximately 800 to 120
A structural material 2 made of MO gold metal is placed in a vapor-phase plating 1 in a high temperature atmosphere of 0°C, and in this vapor-phase plating 1,
Approximately 5 to 10 minutes while flowing a mixed gas 3 consisting of CI-14.
This was done by passing the time.

図において4はこのようにして形成された薄層を示して
いる。
In the figure, 4 indicates the thin layer thus formed.

こうして(qられた高温炉用構造材を人気中1400℃
で1時間および真空(5X 10−4mm1−I Q 
)中1400℃で10時間□加熱した後の加熱減量はそ
れぞれ第1表の通りであった。
In this way, the structural material for high-temperature furnaces (1400℃) is popular.
for 1 hour and vacuum (5X 10-4 mm1-I Q
) The weight loss on heating after heating at 1400° C. for 10 hours was as shown in Table 1.

なお、第1表中比較例は、Cを被覆しなかった点を除い
て実施例と同一方法で製造した同一寸法の構造材を実施
例と同−条イ1で加熱したときの加熱域間であって比較
のために示しlcものである。
In addition, in the comparative example in Table 1, a structural member of the same size manufactured by the same method as the example except that it was not coated with C was heated with the same strip 1 as in the example. This is shown for comparison.

以 下 余 白 第 1 表Below, extra white Table 1

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、本発明の一実施例において用いられる気相めっ
き法を説明するための概略説明図である。 1・・・気相めっき炉 2・・・構造材 3・・・混合ガス
The drawings are schematic explanatory diagrams for explaining a vapor phase plating method used in an embodiment of the present invention. 1... Vapor phase plating furnace 2... Structural material 3... Mixed gas

Claims (1)

【特許請求の範囲】 1、MO又はMo合金から成るm造材の表面に、炭素か
ら成る薄層が被覆されて成ることを特徴とづる高温炉用
構造材。 2、薄層は気相めっき法により形成されて成ることを特
徴とする特許請求の範囲第1項記載の高温炉用構造材。 3、薄層の膜厚は5〜50μであることを特徴とする特
許請求の範囲第1項又は第2項記載の高温炉用構造材。
[Claims] 1. A structural material for a high-temperature furnace, characterized in that the surface of a material made of MO or Mo alloy is coated with a thin layer of carbon. 2. The structural material for a high temperature furnace according to claim 1, wherein the thin layer is formed by a vapor phase plating method. 3. The structural material for a high temperature furnace according to claim 1 or 2, wherein the thin layer has a thickness of 5 to 50 μm.
JP24626784A 1984-11-22 1984-11-22 Structural material for high temperature furnace Pending JPS60187677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24626784A JPS60187677A (en) 1984-11-22 1984-11-22 Structural material for high temperature furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24626784A JPS60187677A (en) 1984-11-22 1984-11-22 Structural material for high temperature furnace

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP6052080A Division JPS56156770A (en) 1980-05-09 1980-05-09 Structural material for high temperature

Publications (1)

Publication Number Publication Date
JPS60187677A true JPS60187677A (en) 1985-09-25

Family

ID=17145981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24626784A Pending JPS60187677A (en) 1984-11-22 1984-11-22 Structural material for high temperature furnace

Country Status (1)

Country Link
JP (1) JPS60187677A (en)

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