CN107779829B - The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy - Google Patents

The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy Download PDF

Info

Publication number
CN107779829B
CN107779829B CN201610739352.8A CN201610739352A CN107779829B CN 107779829 B CN107779829 B CN 107779829B CN 201610739352 A CN201610739352 A CN 201610739352A CN 107779829 B CN107779829 B CN 107779829B
Authority
CN
China
Prior art keywords
temperature
sputtering
preparation
corrosion resistance
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610739352.8A
Other languages
Chinese (zh)
Other versions
CN107779829A (en
Inventor
刘博�
杨殿来
许壮志
薛健
张明
周岩
李磊
岳鑫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Liaoning Wuke new material industry research Co.,Ltd.
Original Assignee
Liaoning Light Engineering Institute Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Liaoning Light Engineering Institute Co Ltd filed Critical Liaoning Light Engineering Institute Co Ltd
Priority to CN201610739352.8A priority Critical patent/CN107779829B/en
Publication of CN107779829A publication Critical patent/CN107779829A/en
Application granted granted Critical
Publication of CN107779829B publication Critical patent/CN107779829B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0084—Producing gradient compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0652—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties

Abstract

The invention belongs to a kind of high-temperature corrosion resistance coat preparing technologies, and in particular to the preparation method of the MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy.The present invention uses multicomponent composite coating technology, and outer surface uses embedded nano Si3N4Thin film technique has high oxidation resistance, using substrate transition zone (Al-Si) articulamentum (Ti3Si(Al)C2) gradient layer (Al-Ti-Si-Cr-N), embeding layer (nano Si3N4) four layers of matching layer structure, chemical bond and thermal expansion coefficient close to each other are diffuseed to form by the shared atom between each matching layer, composite coating thermal shock resistance is greatly enhanced.

Description

The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy
Technical field
The invention belongs to a kind of high-temperature corrosion resistance coat preparing technologies, and in particular to the multilayer based on high-temperature nickel-base alloy is multiple Close the preparation method of high-temperature corrosion resistance coating.
Background technique
High temperature alloy can be good anti-oxidant in high temperature (referring generally to 600 DEG C~1100 DEG C) elevated temperature strength with higher And hot corrosion resistance, the alloy material of good fatigue behaviour, fracture toughness and plasticity.The application process of practical high temperature alloy In, the working environment and performance requirement alloy of alloy should have excellent mechanical behavior under high temperature, have again excellent anticorrosive Performance uses the raising of temperature now with aero-engine, and the increasingly harshness of use environment, conventional high-temperature nickel-base alloy is It is not able to satisfy corrosion resistance requirement long-term at high temperature, and is compatible with its mechanical behavior under high temperature and high temperature weatherability from material itself Research have reached a bottleneck, the short time increases substantially its high temperature corrosion and is difficult to realize, thus develops reliable High-temperature corrosion resistance coating technology, which becomes, solves the most important method of high temperature alloy high temperature corrosion.
With the made rapid progress of Aeronautics and Astronautics technology, nearly 30 or 40 years carrys out high-temperature protection coating technology and is grown rapidly, At present high-temperature anticorrosion coating mainly include the following types:
1. metal aluminide coating (including modified aluminide coating): metal aluminide is the alloy surface used earliest Protective coating mainly prevents the further progress of high-temperature oxydation using the fine and close aluminium oxide of high temperature coating Surface Creation, The rich aluminium or chromium-rich oxide on its surface can have certain anti-corrosion property at high temperature simultaneously, in 650 DEG C of salt fog states below Down have long-term reliability, but its under 700 DEG C or more fused salts and salt fog state using evidence of corrosion can obviously occur, simultaneously Its corrosion resistance in the combinational environment that high-temperature oxydation and reducing atmosphere change will be greatly reduced.
2. metal silicide coating (including composition metal silicide coating): metal silicide refers mainly to refractory metal and silicon The compound coat of generation, the main fine and close SiO formed by high-temperature oxydation surface2With prevent oxidation further into Row, while vitreous coating has self-healing, is good corrosion-resistant material, but this coating greatest problem is silicon more It is spread quickly in number alloy, and silicon easily forms low melting point phase and brittlement phase with alloy mutual reactance, makes alloy surface that embrittlement occur, Cracking easily occurs under the conditions of long-term high temperature thermal shocking and falls off, therefore is relatively low using temperature.
3. multinary metal alloys coating: (such as MCrAlY is applied the coating mutually prepared using two or more alloy Layer), using the collective effect of multiple element oxide under high temperature, the oxygen permeability of alloy surface is reduced, improves alloy surface Corrosion resistance, be current most commonly used high-temperature oxidation resistant coating.But its equally exist the volatilization of 900 DEG C or more chromated oxides and 700 DEG C of high temperature or more of strong salt air corrosion effect.
4. noble coatings: passing through a kind of guarantor that mechanically material and environment are isolated of noble coatings (platinum, niobium etc.) Maintaining method has extremely strong inoxidizability and corrosion resistance, but its maximum problem is that interior diffusion is serious under its high temperature, matrix member Element, which is easy to diffuse to surface, makes coating failure.In addition noble metal is expensive is unfavorable for widespread adoption.
5. composite ceramic-based barrier coat: referring mainly to the coating or multiple elements design of ceramic base oxide, nitride, boride Coating, this coating has very high inoxidizability and salt fog resistance, and it has biggish diffusion with alloy substrate Length, alloy substrate element, which is not easy to diffuse to surface, to fail.But this usual mechanical property of barrier coat and matrix gap It is larger, it is easy to that cracking occurs under conditions of long-term thermal shock and falls off.
At present the use temperature of aero-engine increasingly increase, use environment it is increasingly harsh, not requiring nothing more than high temperature alloy makes Reach 950 DEG C or more with temperature, and is able to satisfy cold-and-heat resistent impact, high temperature resistant (700 DEG C or more) salt air corrosion, compatible oxidisability The requirement that atmosphere (full combustion) and reducing atmosphere (burn incompletely) long-term (100h or more) use, there is no a kind of painting at present Layer can fully meet above-mentioned application conditions.
Summary of the invention
In view of the above-mentioned problems, the invention aims to solve current high temperature alloy in the environment of high temperature salt fog Perishable problem, provide it is a kind of containing nickel-base alloy and can at 1000 DEG C in oxidisability and reducing atmosphere using, hold By the preparation method of the multi-layer composite coatings of 750 DEG C long-term salt fog corruption.
Method includes the following steps:
Step 1: the pretreatment of substrate: by nickel-base alloy sand for surface paper grinding process, the contamination impurity on surface is removed, It is put into ultrasound 3-5min in acetone solvent, the polishing powder and remaining organic matter on surface is removed, is placed in super-clean bench after ultrasound With the dry 5-15min of infrared drying lamp.
Step 2: the preparation of Al-Si bottom: substrate surface carries out Ion Cleaning, and scavenging period is controlled in 3-5min, in room Under the conditions of temperature, by radio-frequency sputtering in one layer of substrate surface thin Al-Si alloy-layer, time 10-30min is moved into true after sputtering In empty annealing furnace, control in 800-1000 DEG C of annealing 30-60min, by the way of furnace cooling.
Step 3: Ti3Si(Al)C2The preparation of articulamentum: the substrate after annealing is placed in magnetron sputtering chamber, using Ti3Si (Al)C2Target carries out d.c. sputtering, surface power density 10-100W/cm2, substrate temperature control is at 200-400 DEG C, sputtering Time controls in 0.5-2h.
Step 4: the preparation of rich aluminium profiles Al-Ti-Cr-Si-N gradient layer: by above-mentioned plating Ti3Si(Al)C2Articulamentum be put into In arc ion plating apparatus, by Ti-Al, Al-Si, Cr target in Ar-N2The synthesizing aluminum-enriched type Al- of electric arc reaction is carried out in atmosphere Ti-Cr-Si-N gradient layer, 150-450 DEG C of control base board temperature, control back bias voltage are 100-600V, and target arc stream is controlled in 30- 200A, reaction generated time control is in 3-6h.
Step 5: nano Si3N4The preparation of embeding layer: the rich aluminium profiles Al-Ti-Cr-Si-N gradient layer of above-mentioned preparation is passed through Magnetron sputtering is embedded in nano Si3N4, pre-sputtering 1-5min is carried out with argon gas first, carries out the surface activation of rich aluminium gradient layer, removal The impurity such as target surface, then prepare nano Si by radio-frequency sputtering3N4Substrate temperature is controlled the control at 350-600 DEG C by embeding layer Radio-frequency power processed is 1.5-2.5kw, sputtering time 0.5-3h.
Step 6: annealing: substrate obtained above is put into vacuum annealing furnace and is annealed, annealing temperature control At 800-1000 DEG C, annealing time control obtains the MULTILAYER COMPOSITE high-temperature corrosion resistance for being based ultimately upon high-temperature nickel-base alloy in 2-8h Coating.
The mesh number of Sand paper for polishing described in step 1 is -1200 mesh of 200 mesh.
The heating rate of annealing furnace described in step 2 is less than 5 DEG C/min.
Ti described in step 33Si(Al)C2The purity of target is 99%.
The technology of the present invention advantage: (1) present invention uses multicomponent composite coating technology.Outer surface uses embedded nano Si3N4 Thin film technique has high oxidation resistance, and film can be up to 1100 DEG C using temperature in oxidizing atmosphere for a long time, together When oxidisability and reproducibility substitute exist in the environment of still have high thermal stability, can be reached in salt fog survivability temperature To 850 DEG C.(2) substrate transition zone (Al-Si) articulamentum (Ti is used3Si(Al)C2) gradient layer (Al-Ti-Si-Cr-N) three layers With layer structure, chemical bond and thermal expansion coefficient close to each other are diffuseed to form by the shared atom between each matching layer, made multiple Coating thermal shock resistance is closed to be greatly enhanced.(3) ultrathin nanometer Si3N4It is embedded in Al-Ti-Si-Cr-N technology, it can be to avoid oxygen permeable Lead to the volatilization failure of chromated oxide caused by more than 900 DEG C, even if under high thermal shock and salt fog double action, lower layer Al- Ti-Si-Cr-N gradient layer can quickly form one layer of ultrathin oxide and nano Si3N4Layer embeding layer generate strong binding force to avoid It is further corroded, therefore its service life with higher.
Detailed description of the invention
With reference to the accompanying drawing and embodiment the present invention is described in further detail:
Fig. 1 is the MULTILAYER COMPOSITE high-temperature corrosion resistance coating schematic diagram based on high-temperature nickel-base alloy；
a.Si3N4Embeding layer；B.Al-Ti-Cr-Si-N gradient layer；
c.Ti3Si(Al)C2Articulamentum；D.Al-Si transition zone；E. Superalloy Substrate.
Specific embodiment
Embodiment 1
The nickel-base alloy surface sand paper of 200 mesh and 600 mesh is polished, in acetone ultrasound 5min, it is therefore an objective to remove table The polishing powder and remaining organic matter in face, after the dry 5min of super-clean bench infrared drying lamp is placed in after ultrasonic, to substrate table Face carries out the Ion Cleaning of 5min, and room temperature sputters Al-Si transition zone, sputtering time 20min, 850 DEG C of vacuum annealing after sputtering 30min is moved back to magnetron sputtering chamber, 300 DEG C of d.c. sputtering Ti3Si(Al)C2Articulamentum, sputtering surface power density are 30W/cm2, Sputtering time 1.5h.It completes sputtering metacoxal plate to be put into arc ion plating apparatus, in Ar-N2Electric arc under the conditions of 400 DEG C in atmosphere Synthesizing aluminum-enriched type Al-Ti-Cr-Si-N gradient layer is reacted, back bias voltage is controlled in 350V, and the arc stream of Ti-Al, Al-Si, Cr are controlled respectively System is in 80A, 60A, 30A, reaction time 4h.After plating gradient layer, it is moved back to magnetron sputtering chamber, 400 DEG C of high temperature radio frequencies sputter Si3N4It is embedding Enter layer, control radio-frequency power is 2kw, sputtering time 1h, and substrate is moved into 950 DEG C of annealing 4h in ambient anneal furnace after sputtering, is obtained Obtain the MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy.It is as shown in Figure 1 the multilayer based on high-temperature nickel-base alloy Complex fire resistant corrosion resistant coating schematic diagram.
Embodiment 2
Nickel-base alloy substrate is polished by the sand paper of 200 mesh, 400 mesh and 800 mesh, in acetone ultrasound 3min, drying After 10min, the Ion Cleaning of 5min is carried out to surface, room temperature sputters Al-Si transition zone, sputtering time 15min, vacuum after sputtering Anneal 30min under the conditions of 900 DEG C, is moved back to magnetron sputtering chamber, 400 DEG C of d.c. sputtering Ti3Si(Al)C2Articulamentum, sputtering surface function Rate density 25W/cm2, sputtering time 1h.It completes sputtering metacoxal plate to be put into arc ion plating apparatus, be closed in 300 DEG C of electric arc reactions At rich aluminium profiles Al-Ti-Cr-Si-N gradient layer, back bias voltage control in 450V, the arc stream control of Ti-Al, Al-Si, Cr 60A, 60A, 40A, reaction time 6h.After plating gradient layer, it is moved back to magnetron sputtering chamber, 450 DEG C of high temperature radio frequencies sputter Si3N4Embeding layer, control Radio-frequency power is 2kw, sputtering time 0.5h, and substrate is moved into 950 DEG C of annealing 3h in ambient anneal furnace after sputtering, is obtained based on height The MULTILAYER COMPOSITE high-temperature corrosion resistance coating of warm nickel-base alloy.
Embodiment 3
Nickel-base alloy substrate is polished by the sand paper of 200 mesh, 600 mesh and 1200 mesh, in acetone ultrasound 5min, drying After 5min, the Ion Cleaning of 5min is carried out to surface, room temperature sputters Al-Si transition zone, sputtering time 30min, vacuum after sputtering 1000 DEG C of annealing 30min, are moved back to magnetron sputtering chamber, 350 DEG C of d.c. sputtering Ti3Si(Al)C2Articulamentum, sputtering surface power density 45W/cm2, sputtering time 2h.Sputtering metacoxal plate is completed to be put into arc ion plating apparatus, it is synthesizing aluminum-enriched in 400 DEG C of electric arc reactions Type Al-Ti-Cr-Si-N gradient layer, back bias voltage control are controlled in 600V, the arc stream of Ti-Al, Al-Si, Cr in 50A, 80A, 40A, Reaction time 4.5h.After plating gradient layer, it is moved back to magnetron sputtering chamber, 500 DEG C of high temperature radio frequencies sputter Si3N4Embeding layer controls target function Substrate is moved into 1000 DEG C of annealing 3h in vacuum annealing furnace after sputtering by rate 2.5kw, sputtering time 0.5h, is obtained and is based on high temperature nickel The MULTILAYER COMPOSITE high-temperature corrosion resistance coating of based alloy.
Embodiment 4
It is ultrasonic in acetone by nickel-base alloy substrate by the sand paper polishing of 200 mesh, 400 mesh, 800 mesh and 1200 mesh 3min, dry 10min after, to surface carry out 5min Ion Cleaning, room temperature sputter Al-Si transition zone, sputtering time 25min, 800 DEG C of annealing 45min of vacuum, are moved back to magnetron sputtering chamber, 350 DEG C of d.c. sputtering Ti after sputtering3Si(Al)C2Articulamentum sputters table Surface power density 50W/cm2, sputtering time 2h.Sputtering metacoxal plate is completed to be put into arc ion plating apparatus, it is anti-in 450 DEG C of electric arcs Synthesizing aluminum-enriched type Al-Ti-Cr-Si-N gradient layer is answered, back bias voltage control exists in 450V, the arc stream control of Ti-Al, Al-Si, Cr 30A, 75A, 30A, reaction time 3.5h.After plating gradient layer, it is moved back to magnetron sputtering chamber, 450 DEG C of high temperature radio frequencies sputter Si3N4Insertion Layer controls target power 2kw, sputtering time 0.5h, and substrate is moved into 900 DEG C of annealing 5h in vacuum annealing furnace after sputtering, obtains MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy.

Claims (4)

1. the preparation method of the MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy, which is characterized in that this method packet Include following steps:
Step 1: the pretreatment of substrate: by nickel-base alloy sand for surface paper grinding process, removing the contamination impurity on surface, be put into Ultrasound 3-5min in acetone solvent is placed in the dry 5-15min of super-clean bench infrared drying lamp after ultrasonic；
Step 2: the preparation of Al-Si bottom: substrate surface carries out Ion Cleaning, and scavenging period is controlled in 3-5min, in room temperature item Under part, by radio-frequency sputtering in one layer of substrate surface thin Al-Si alloy-layer, time 10-30min moves into vacuum and moves back after sputtering In stove, control in 800-1000 DEG C of annealing 30-60min, by the way of furnace cooling；
Step 3: Ti3Si(Al)C2The preparation of articulamentum: the substrate after annealing is placed in magnetron sputtering chamber, using Ti3Si(Al)C2 Target carries out d.c. sputtering, surface power density 10-100W/cm2, substrate temperature control is at 200-400 DEG C, sputtering time control System is in 0.5-2h；
Step 4: the preparation of rich aluminium profiles Al-Ti-Cr-Si-N gradient layer: by above-mentioned plating Ti3Si(Al)C2Articulamentum be put into electric arc In ion plating equipment, by Ti-Al, Al-Si, Cr target in Ar-N2The synthesizing aluminum-enriched type Al-Ti-Cr- of electric arc reaction is carried out in atmosphere Si-N gradient layer, 150-450 DEG C of control base board temperature, control back bias voltage are 100-600V, and target arc stream is controlled in 30-200A, Generated time control is reacted in 3-6h；
Step 5: nano Si3N4The preparation of embeding layer: the rich aluminium profiles Al-Ti-Cr-Si-N gradient layer of above-mentioned preparation is passed through into magnetic control Sputtering insertion nano Si3N4, pre-sputtering 1-5min is carried out with argon gas first, nano Si is then prepared by radio-frequency sputtering3N4Insertion Layer controls substrate temperature at 350-600 DEG C, and control radio-frequency power is 1.5-2.5kw, sputtering time 0.5-3h；
Step 6: annealing: substrate obtained above being put into vacuum annealing furnace and is annealed, annealing temperature control exists 800-1000 DEG C, annealing time control is in 2-8h, the final MULTILAYER COMPOSITE high-temperature corrosion resistance painting obtained based on high-temperature nickel-base alloy Layer.
2. the preparation method of the MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy, which is characterized in that in step 1 The mesh number of the polishing is -1200 mesh of 200 mesh.
3. the preparation method of the MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy, which is characterized in that in step 2 The heating rate of the annealing furnace is less than 5 DEG C/min.
4. the preparation method of the MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy, which is characterized in that in step 3 The Ti3Si(Al)C2The purity of target is 99%.
CN201610739352.8A 2016-08-26 2016-08-26 The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy Active CN107779829B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610739352.8A CN107779829B (en) 2016-08-26 2016-08-26 The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610739352.8A CN107779829B (en) 2016-08-26 2016-08-26 The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy

Publications (2)

Publication Number Publication Date
CN107779829A CN107779829A (en) 2018-03-09
CN107779829B true CN107779829B (en) 2019-01-18

Family

ID=61439755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610739352.8A Active CN107779829B (en) 2016-08-26 2016-08-26 The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy

Country Status (1)

Country Link
CN (1) CN107779829B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109097743B (en) * 2018-09-16 2020-03-31 烟台大学 Superhard W-Cr-Al-Ti-N nano gradient multilayer film and preparation method thereof
CN109403876B (en) * 2018-10-19 2019-12-27 北京工商大学 Nickel-based alloy coating polished sucker rod comprising soft transition layer and processing technology
CN109608176B (en) * 2018-12-18 2021-11-05 辽宁省轻工科学研究院有限公司 Ablation fiber-shaped coating and preparation and construction methods thereof
CN113403578A (en) * 2021-06-22 2021-09-17 南京工业职业技术大学 Preparation method of superhard multilayer nano composite coating

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161161A (en) * 1986-12-23 1988-07-04 Nippon Mining Co Ltd Target made al-si alloy and its production
CN1321206C (en) * 2003-11-04 2007-06-13 住友金属矿山株式会社 Metal resistor material, sputtering target material, resistor film and their manufactures
CN104032268B (en) * 2014-05-22 2017-02-01 中国科学院宁波材料技术与工程研究所 High-hardness and low-friction coefficient VAlSiN wear-resistant coating layer

Also Published As

Publication number Publication date
CN107779829A (en) 2018-03-09

Similar Documents

Publication Publication Date Title
CN107779829B (en) The preparation method of MULTILAYER COMPOSITE high-temperature corrosion resistance coating based on high-temperature nickel-base alloy
EP2141138B1 (en) Method of repairing a thermal barrier coating and repaired coating formed thereby
JPH09296702A (en) Heat insulating coated product and coating method
JP7232295B2 (en) Adhesion-promoting layer for bonding high-temperature protective layer onto substrate, and method for producing same
CN103160773A (en) Method for prolonging service life of engine thermal barrier coating by controlling components of thermal growth oxide layer
CN105970168B (en) A kind of thin film sensor composite insulation layer and preparation method thereof
CN111004990A (en) MAX phase coating for thermal barrier coating anti-melting CMAS corrosion and thermal spraying preparation method
CN108585897A (en) A kind of refractory metal high-temperature oxidation resistant Si-Mo-YSZ coatings and preparation method thereof
CN106746666B (en) Glass ceramic composite thermal barrier coating and preparation method thereof
CN105386041B (en) A kind of method that laser melting coating prepares modified compound Hf Ta metal coatings
CN111455333B (en) Al-Cr-O film with Al-rich corundum structure and preparation method thereof
CN107937874B (en) A method of Pt-Al high-temperature protection coating is prepared on niobium alloy surface
CN104193173A (en) Heat-insulating coating material for firing enamel on surface of titanium alloy and preparation method thereof
CN102925871A (en) Composite thermal barrier coating and preparation method thereof
US7695582B2 (en) Method of forming ceramic layer
CN110257771A (en) A kind of c-CrAlSiN hard coat of high Al content and preparation method thereof
CN103434209B (en) A kind of novel lower thermal conductivity and high temperature heat-resistant barrier coating and preparation method thereof
JP4299154B2 (en) Oxidation-resistant composite coating method for carbon / carbon composite materials
CN103484824A (en) Compound binding layer material with 1200 DEG C high-temperature oxidization resistance and fuel gas thermal corrosion resistance and preparation method of compound binding layer material
CN103722849B (en) A kind of SiC/Ta/C/Ta/SiC multilayer antioxidant high-temperaure coating and preparation method thereof
CN106892684B (en) Preparation method of ZrC coating on surface of C/C composite material
CN105861984A (en) Method for preparing high-temperature-resistant oxidation coating on surface of carbon/carbon composite material
CN109371373B (en) Titanium diboride-zirconium diboride-based high-temperature solar energy absorption coating and preparation method thereof
JP3876176B2 (en) Ceramic composition for heat shielding coating film
JP4299155B2 (en) Oxidation-resistant coating method for carbon / carbon composite materials

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information
CB02 Change of applicant information

Address after: 110142 No. 3 Chongshan Road, Huanggu District, Shenyang City, Liaoning Province

Applicant after: LIAONING LIGHT ENGINEERING INSTITUTE CO., LTD.

Address before: 110142 No. 3 Chongshan Road, Huanggu District, Shenyang City, Liaoning Province

Applicant before: Liaoning Prov. Academy of light Industry Sciences

GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20220110

Address after: 110000 No. 17, Lingyuan street, Huanggu District, Shenyang City, Liaoning Province

Patentee after: Liaoning Wuke new material industry research Co.,Ltd.

Address before: 110142 No. 3 Chongshan Road, Huanggu District, Shenyang City, Liaoning Province

Patentee before: LIAONING LIGHT INDUSTRY SCIENCE RESEARCH INSTITUTE Co.,Ltd.