JPS60186064A - Ｍｏｓｆｅｔの製造方法 - Google Patents

Ｍｏｓｆｅｔの製造方法

Info

Publication number
JPS60186064A
JPS60186064A JP59040298A JP4029884A JPS60186064A JP S60186064 A JPS60186064 A JP S60186064A JP 59040298 A JP59040298 A JP 59040298A JP 4029884 A JP4029884 A JP 4029884A JP S60186064 A JPS60186064 A JP S60186064A
Authority
JP
Japan
Prior art keywords
oxide film
oxygen
manufacturing
metal
gate oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59040298A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527272B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hidenao Tanaka
秀尚 田中
Kinya Kato
加藤　謹矢
Tsutomu Wada
力 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59040298A priority Critical patent/JPS60186064A/ja
Publication of JPS60186064A publication Critical patent/JPS60186064A/ja
Publication of JPH0527272B2 publication Critical patent/JPH0527272B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP59040298A 1984-03-05 1984-03-05 Ｍｏｓｆｅｔの製造方法 Granted JPS60186064A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59040298A JPS60186064A (ja) 1984-03-05 1984-03-05 Ｍｏｓｆｅｔの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59040298A JPS60186064A (ja) 1984-03-05 1984-03-05 Ｍｏｓｆｅｔの製造方法

Publications (2)

Publication Number Publication Date
JPS60186064A true JPS60186064A (ja) 1985-09-21
JPH0527272B2 JPH0527272B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-20

Family

ID=12576702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59040298A Granted JPS60186064A (ja) 1984-03-05 1984-03-05 Ｍｏｓｆｅｔの製造方法

Country Status (1)

Country Link
JP (1) JPS60186064A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754723A (ja) * 1993-08-19 1995-02-28 Komatsu Zenoah Co エンジンケース

Also Published As

Publication number Publication date
JPH0527272B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-20

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