JPS60181034U - semiconductor wafer - Google Patents
semiconductor waferInfo
- Publication number
- JPS60181034U JPS60181034U JP6886384U JP6886384U JPS60181034U JP S60181034 U JPS60181034 U JP S60181034U JP 6886384 U JP6886384 U JP 6886384U JP 6886384 U JP6886384 U JP 6886384U JP S60181034 U JPS60181034 U JP S60181034U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- view
- alignment mark
- scribe line
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による半導体ウェーハの平面図、第２図
は第１図に示すウェーハの一部の拡大平面図、第３図は
従来の半導体ウェーハの平面図、第４図および第５図は
アライメント作業を説明するための顕微鏡の視野を示す
図、第６図は誤ってアライメントされた半導体ウェーハ
の平面図、第７図は第６図に示すようにアライメントさ
れたときの顕微鏡の視野を示す図である。
１・・・半導体ウェーハ、２・・・ペレット、３・・・
スクライブ・ライン、４ａ、４ｂ・・・顕微鏡の視野位
置、５・・・ヘアライン、６・・・アライメント・マー
ク位置、７・・・アライメント・マーク。FIG. 1 is a plan view of a semiconductor wafer according to the present invention, FIG. 2 is an enlarged plan view of a part of the wafer shown in FIG. 1, FIG. 3 is a plan view of a conventional semiconductor wafer, and FIGS. 4 and 5. is a diagram showing the field of view of a microscope to explain the alignment work, Figure 6 is a plan view of an incorrectly aligned semiconductor wafer, and Figure 7 is a view of the field of view of a microscope when aligned as shown in Figure 6. FIG. 1... Semiconductor wafer, 2... Pellet, 3...
Scribe line, 4a, 4b...Field position of the microscope, 5...Hairline, 6...Alignment mark position, 7...Alignment mark.
Claims (1)
のアライメント会マークを具備することを特徴とする半
導体ウェーハ。A semiconductor wafer characterized by having an alignment mark for dicing on a semiconductor wafer scribe line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6886384U JPS60181034U (en) | 1984-05-11 | 1984-05-11 | semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6886384U JPS60181034U (en) | 1984-05-11 | 1984-05-11 | semiconductor wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60181034U true JPS60181034U (en) | 1985-12-02 |
Family
ID=30604001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6886384U Pending JPS60181034U (en) | 1984-05-11 | 1984-05-11 | semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60181034U (en) |
-
1984
- 1984-05-11 JP JP6886384U patent/JPS60181034U/en active Pending
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