JPS5939934U - Auxiliary card for stylus alignment - Google Patents

Auxiliary card for stylus alignment

Info

Publication number
JPS5939934U
JPS5939934U JP13549982U JP13549982U JPS5939934U JP S5939934 U JPS5939934 U JP S5939934U JP 13549982 U JP13549982 U JP 13549982U JP 13549982 U JP13549982 U JP 13549982U JP S5939934 U JPS5939934 U JP S5939934U
Authority
JP
Japan
Prior art keywords
stylus
auxiliary card
card
stylus alignment
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13549982U
Other languages
Japanese (ja)
Inventor
俊一 佐々木
Original Assignee
株式会社東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東京精密 filed Critical 株式会社東京精密
Priority to JP13549982U priority Critical patent/JPS5939934U/en
Publication of JPS5939934U publication Critical patent/JPS5939934U/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の実施に際して使用される正規のプロー
ブカードの平面図、第２図はウェハチップ−個の拡大説
明図、第３図は本考案の補助カードの平面図、第４、第
５図は触針合せの手順説明図。 １・・・プローブカード、２．訃・・窓、３・・・触針
、５、　６．　９．　１０・・・位置決め用孔。FIG. 1 is a plan view of a regular probe card used in implementing the present invention, FIG. 2 is an enlarged explanatory view of wafer chips, FIG. 3 is a plan view of an auxiliary card of the present invention, and Figure 5 is an explanatory diagram of the procedure for aligning the stylus. 1... Probe card, 2. Death...window, 3...stylus, 5, 6. 9. 10...Positioning hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 正規のプローブカードがその取付枠に取付けられる位置
と同じ位置に取付けられるように位置の規制された補助
カードであって、プローブカードの基準となる触針と関
係位置が同じに作られた数本の触針ａ１．ｂ１．Ｃ１・
・・のみを有する触針位置合せ用補助カード。Several auxiliary cards whose positions are regulated so that they can be installed in the same position as the regular probe card is installed in its mounting frame, and which are made in the same position relative to the probe card's reference stylus. Stylus a1. b1. C1・
An auxiliary card for stylus positioning that has only...
JP13549982U 1982-09-07 1982-09-07 Auxiliary card for stylus alignment Pending JPS5939934U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13549982U JPS5939934U (en) 1982-09-07 1982-09-07 Auxiliary card for stylus alignment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13549982U JPS5939934U (en) 1982-09-07 1982-09-07 Auxiliary card for stylus alignment

Publications (1)

Publication Number Publication Date
JPS5939934U true JPS5939934U (en) 1984-03-14

Family

ID=30304960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13549982U Pending JPS5939934U (en) 1982-09-07 1982-09-07 Auxiliary card for stylus alignment

Country Status (1)

Country Link
JP (1) JPS5939934U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62161186A (en) * 1985-10-28 1987-07-17 チヤ−ルズ・オブ・ザ・リツツ・グル−プ・リミテツド Display apparatus for solidifying cosmetic and manufacture thereof
JPH01220450A (en) * 1988-02-29 1989-09-04 Nec Corp Mounting apparatus of semiconductor pellet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62161186A (en) * 1985-10-28 1987-07-17 チヤ−ルズ・オブ・ザ・リツツ・グル−プ・リミテツド Display apparatus for solidifying cosmetic and manufacture thereof
JPH01220450A (en) * 1988-02-29 1989-09-04 Nec Corp Mounting apparatus of semiconductor pellet

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