JPS60180109A - 誘電体薄膜素子 - Google Patents
誘電体薄膜素子Info
- Publication number
- JPS60180109A JPS60180109A JP59036567A JP3656784A JPS60180109A JP S60180109 A JPS60180109 A JP S60180109A JP 59036567 A JP59036567 A JP 59036567A JP 3656784 A JP3656784 A JP 3656784A JP S60180109 A JPS60180109 A JP S60180109A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- dielectric thin
- film element
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 24
- 239000010408 film Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Optical Head (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59036567A JPS60180109A (ja) | 1984-02-27 | 1984-02-27 | 誘電体薄膜素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59036567A JPS60180109A (ja) | 1984-02-27 | 1984-02-27 | 誘電体薄膜素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60180109A true JPS60180109A (ja) | 1985-09-13 |
| JPH0481848B2 JPH0481848B2 (enrdf_load_stackoverflow) | 1992-12-25 |
Family
ID=12473336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59036567A Granted JPS60180109A (ja) | 1984-02-27 | 1984-02-27 | 誘電体薄膜素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60180109A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62152207A (ja) * | 1985-12-25 | 1987-07-07 | Stanley Electric Co Ltd | 水晶振動子の保持方法 |
| JPS62152208A (ja) * | 1985-12-25 | 1987-07-07 | Stanley Electric Co Ltd | 水晶振動子の保持方法 |
| US6931700B2 (en) | 2001-10-02 | 2005-08-23 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing thin film piezoelectric elements |
-
1984
- 1984-02-27 JP JP59036567A patent/JPS60180109A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62152207A (ja) * | 1985-12-25 | 1987-07-07 | Stanley Electric Co Ltd | 水晶振動子の保持方法 |
| JPS62152208A (ja) * | 1985-12-25 | 1987-07-07 | Stanley Electric Co Ltd | 水晶振動子の保持方法 |
| US6931700B2 (en) | 2001-10-02 | 2005-08-23 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing thin film piezoelectric elements |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0481848B2 (enrdf_load_stackoverflow) | 1992-12-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |