JPS60180109A - 誘電体薄膜素子 - Google Patents

誘電体薄膜素子

Info

Publication number
JPS60180109A
JPS60180109A JP59036567A JP3656784A JPS60180109A JP S60180109 A JPS60180109 A JP S60180109A JP 59036567 A JP59036567 A JP 59036567A JP 3656784 A JP3656784 A JP 3656784A JP S60180109 A JPS60180109 A JP S60180109A
Authority
JP
Japan
Prior art keywords
thin film
substrate
dielectric thin
film element
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59036567A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481848B2 (enrdf_load_stackoverflow
Inventor
賢二 飯島
俊一郎 河島
一朗 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59036567A priority Critical patent/JPS60180109A/ja
Publication of JPS60180109A publication Critical patent/JPS60180109A/ja
Publication of JPH0481848B2 publication Critical patent/JPH0481848B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Head (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP59036567A 1984-02-27 1984-02-27 誘電体薄膜素子 Granted JPS60180109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59036567A JPS60180109A (ja) 1984-02-27 1984-02-27 誘電体薄膜素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59036567A JPS60180109A (ja) 1984-02-27 1984-02-27 誘電体薄膜素子

Publications (2)

Publication Number Publication Date
JPS60180109A true JPS60180109A (ja) 1985-09-13
JPH0481848B2 JPH0481848B2 (enrdf_load_stackoverflow) 1992-12-25

Family

ID=12473336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59036567A Granted JPS60180109A (ja) 1984-02-27 1984-02-27 誘電体薄膜素子

Country Status (1)

Country Link
JP (1) JPS60180109A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62152208A (ja) * 1985-12-25 1987-07-07 Stanley Electric Co Ltd 水晶振動子の保持方法
JPS62152207A (ja) * 1985-12-25 1987-07-07 Stanley Electric Co Ltd 水晶振動子の保持方法
US6931700B2 (en) 2001-10-02 2005-08-23 Matsushita Electric Industrial Co., Ltd. Method of manufacturing thin film piezoelectric elements

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62152208A (ja) * 1985-12-25 1987-07-07 Stanley Electric Co Ltd 水晶振動子の保持方法
JPS62152207A (ja) * 1985-12-25 1987-07-07 Stanley Electric Co Ltd 水晶振動子の保持方法
US6931700B2 (en) 2001-10-02 2005-08-23 Matsushita Electric Industrial Co., Ltd. Method of manufacturing thin film piezoelectric elements

Also Published As

Publication number Publication date
JPH0481848B2 (enrdf_load_stackoverflow) 1992-12-25

Similar Documents

Publication Publication Date Title
US7380320B2 (en) Piezoelectric device and method of manufacturing the device
CN108065961B (zh) 超声波换能器器件、超声波探测器以及超声波装置
JPH07146177A (ja) 焦電薄膜赤外線センサー及びその製造方法
EP0596329A1 (en) Pyroelectric infrared detector and method of fabricating the same
JPS60180109A (ja) 誘電体薄膜素子
JPH10135528A (ja) 電子部品用誘電体膜シート、その製造方法および誘電体素子
JP2707782B2 (ja) 積層型圧電素子
JPS623682Y2 (enrdf_load_stackoverflow)
JPS5867084A (ja) たわみ素子
JPH08306865A (ja) ビスマス系層状強誘電体を用いたキャパシタとその製造方法
KR950001294B1 (ko) 박막적외선센서 제조방법
JPH0256822B2 (enrdf_load_stackoverflow)
JPH07286897A (ja) 焦電型赤外線素子およびその製造方法
JP4680332B2 (ja) チップコンデンサの製造方法
JPH05259472A (ja) 強誘電体薄膜素子とその製造方法
JPS62187248A (ja) 薄膜ａｅセンサ−
JPH11132873A (ja) 圧電検出器及びその製造方法
JPH0236048B2 (enrdf_load_stackoverflow)
JPS6225475A (ja) 電歪効果素子およびその製造方法
JPS61216372A (ja) ホ−ル素子
JPH05166664A (ja) 誘電体素子ならびにその製造方法
JPH04333294A (ja) 積層型圧電アクチュエータ素子
JPS61187320A (ja) 強誘電体薄膜センサ−
JPH0749998B2 (ja) 焦電型赤外線アレイ素子
JPS6030116A (ja) 強誘電体薄膜素子の製造法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term