JPS60180051A - イオン照射装置 - Google Patents

イオン照射装置

Info

Publication number
JPS60180051A
JPS60180051A JP59034775A JP3477584A JPS60180051A JP S60180051 A JPS60180051 A JP S60180051A JP 59034775 A JP59034775 A JP 59034775A JP 3477584 A JP3477584 A JP 3477584A JP S60180051 A JPS60180051 A JP S60180051A
Authority
JP
Japan
Prior art keywords
ions
ion
sample
magnetic field
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59034775A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316736B2 (cg-RX-API-DMAC7.html
Inventor
Hideo Kusanagi
草薙　秀雄
Teruyasu Honma
本間　照康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Central Research Institute of Electric Power Industry
NTT Inc
Original Assignee
Jeol Ltd
Central Research Institute of Electric Power Industry
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Central Research Institute of Electric Power Industry, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP59034775A priority Critical patent/JPS60180051A/ja
Publication of JPS60180051A publication Critical patent/JPS60180051A/ja
Publication of JPH0316736B2 publication Critical patent/JPH0316736B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59034775A 1984-02-24 1984-02-24 イオン照射装置 Granted JPS60180051A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59034775A JPS60180051A (ja) 1984-02-24 1984-02-24 イオン照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59034775A JPS60180051A (ja) 1984-02-24 1984-02-24 イオン照射装置

Publications (2)

Publication Number Publication Date
JPS60180051A true JPS60180051A (ja) 1985-09-13
JPH0316736B2 JPH0316736B2 (cg-RX-API-DMAC7.html) 1991-03-06

Family

ID=12423666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59034775A Granted JPS60180051A (ja) 1984-02-24 1984-02-24 イオン照射装置

Country Status (1)

Country Link
JP (1) JPS60180051A (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5934774A (ja) * 1982-08-20 1984-02-25 Canon Inc 映像信号記録再生装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5934774A (ja) * 1982-08-20 1984-02-25 Canon Inc 映像信号記録再生装置

Also Published As

Publication number Publication date
JPH0316736B2 (cg-RX-API-DMAC7.html) 1991-03-06

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