JPS60179584A - 超高真空用制御弁の駆動装置 - Google Patents

超高真空用制御弁の駆動装置

Info

Publication number
JPS60179584A
JPS60179584A JP3536384A JP3536384A JPS60179584A JP S60179584 A JPS60179584 A JP S60179584A JP 3536384 A JP3536384 A JP 3536384A JP 3536384 A JP3536384 A JP 3536384A JP S60179584 A JPS60179584 A JP S60179584A
Authority
JP
Japan
Prior art keywords
valve
lever
rod
screw
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3536384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541871B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Ashino
芦野　圭宏
Toshiaki Iwabuchi
俊昭 岩渕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ARUBATSUKU FUAI KK
ONO BEROO KOGYO KK
Original Assignee
ARUBATSUKU FUAI KK
ONO BEROO KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ARUBATSUKU FUAI KK, ONO BEROO KOGYO KK filed Critical ARUBATSUKU FUAI KK
Priority to JP3536384A priority Critical patent/JPS60179584A/ja
Publication of JPS60179584A publication Critical patent/JPS60179584A/ja
Publication of JPH0541871B2 publication Critical patent/JPH0541871B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
JP3536384A 1984-02-28 1984-02-28 超高真空用制御弁の駆動装置 Granted JPS60179584A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3536384A JPS60179584A (ja) 1984-02-28 1984-02-28 超高真空用制御弁の駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3536384A JPS60179584A (ja) 1984-02-28 1984-02-28 超高真空用制御弁の駆動装置

Publications (2)

Publication Number Publication Date
JPS60179584A true JPS60179584A (ja) 1985-09-13
JPH0541871B2 JPH0541871B2 (enrdf_load_stackoverflow) 1993-06-24

Family

ID=12439807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3536384A Granted JPS60179584A (ja) 1984-02-28 1984-02-28 超高真空用制御弁の駆動装置

Country Status (1)

Country Link
JP (1) JPS60179584A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135985A (ja) * 1987-02-09 1989-05-29 L'air Liquide 気体調節用仕切り弁
US9695948B2 (en) 2014-04-02 2017-07-04 Vat Holding Ag Vacuum valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135985A (ja) * 1987-02-09 1989-05-29 L'air Liquide 気体調節用仕切り弁
US9695948B2 (en) 2014-04-02 2017-07-04 Vat Holding Ag Vacuum valve

Also Published As

Publication number Publication date
JPH0541871B2 (enrdf_load_stackoverflow) 1993-06-24

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