JPS60177316A - 光偏向装置 - Google Patents

光偏向装置

Info

Publication number
JPS60177316A
JPS60177316A JP59034786A JP3478684A JPS60177316A JP S60177316 A JPS60177316 A JP S60177316A JP 59034786 A JP59034786 A JP 59034786A JP 3478684 A JP3478684 A JP 3478684A JP S60177316 A JPS60177316 A JP S60177316A
Authority
JP
Japan
Prior art keywords
support plate
mirror
reflecting mirror
support
fulcrum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59034786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441808B2 (US20030199744A1-20031023-C00003.png
Inventor
Shuzo Hattori
服部　秀三
Naomasa Wakita
尚正 脇田
Makoto Okuda
誠 奥田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Tokushu Togyo KK
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Nippon Tokushu Togyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd, Nippon Tokushu Togyo KK filed Critical NGK Spark Plug Co Ltd
Priority to JP59034786A priority Critical patent/JPS60177316A/ja
Priority to EP85101985A priority patent/EP0154870A3/de
Priority to US06/704,741 priority patent/US4660941A/en
Publication of JPS60177316A publication Critical patent/JPS60177316A/ja
Publication of JPH0441808B2 publication Critical patent/JPH0441808B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)
JP59034786A 1984-02-24 1984-02-24 光偏向装置 Granted JPS60177316A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59034786A JPS60177316A (ja) 1984-02-24 1984-02-24 光偏向装置
EP85101985A EP0154870A3 (de) 1984-02-24 1985-02-22 Lichtablenkeinrichtung
US06/704,741 US4660941A (en) 1984-02-24 1985-02-25 Light deflection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59034786A JPS60177316A (ja) 1984-02-24 1984-02-24 光偏向装置

Publications (2)

Publication Number Publication Date
JPS60177316A true JPS60177316A (ja) 1985-09-11
JPH0441808B2 JPH0441808B2 (US20030199744A1-20031023-C00003.png) 1992-07-09

Family

ID=12423954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59034786A Granted JPS60177316A (ja) 1984-02-24 1984-02-24 光偏向装置

Country Status (3)

Country Link
US (1) US4660941A (US20030199744A1-20031023-C00003.png)
EP (1) EP0154870A3 (US20030199744A1-20031023-C00003.png)
JP (1) JPS60177316A (US20030199744A1-20031023-C00003.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4705365A (en) * 1984-12-01 1987-11-10 Ngk Spark Plug Co., Ltd. Light deflecting apparatus
JPS6482343A (en) * 1987-09-24 1989-03-28 Teac Corp Tracking servo-device
CN110376705A (zh) * 2019-07-17 2019-10-25 北京安洲科技有限公司 一种倾斜角度可调的多用途漫反射标准板

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3637117A1 (de) * 1986-10-31 1988-05-05 Teldix Gmbh Anordnung zur verkippung einer trageflaeche
US4831246A (en) * 1988-04-14 1989-05-16 The United States Of America As Represented By The Secretary Of The Air Force Large angle off-axis beam steering of a phased telescope array
US5245464A (en) * 1988-08-12 1993-09-14 Laser Scan Vision Aps Deflecting instrument, controllable reflecting device herefor and use hereof
JP2601698B2 (ja) * 1988-08-30 1997-04-16 株式会社小松製作所 レーザスキャナ回転検出機構
US5276545A (en) * 1989-03-24 1994-01-04 Nicolet Instrument Corporation Mirror alignment and damping device
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5040860A (en) * 1990-08-29 1991-08-20 Litton Systems, Inc. Momentum-balance mechanism for use with a scan mirror or other component
DE4029075C1 (US20030199744A1-20031023-C00003.png) * 1990-09-13 1991-12-05 Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De
JP2986534B2 (ja) * 1990-11-01 1999-12-06 トヨタ自動車株式会社 オシレートミラー装置
US5162811A (en) * 1991-01-31 1992-11-10 Lammers Uve H W Paraboloidal reflector alignment system using laser fringe pattern
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5239361A (en) * 1991-10-25 1993-08-24 Nicolet Instrument Corporation Dynamic mirror alignment device for the interferometer of an infrared spectrometer
DE4229507C2 (de) * 1991-10-30 2002-03-07 Cms Mikrosysteme Gmbh Mikromechanischer 3-D-Aktor
US5414565A (en) * 1991-11-27 1995-05-09 Sullivan; Mark T. Tilting kinematic mount
US5490015A (en) * 1993-03-04 1996-02-06 Olympus Optical Co., Ltd. Actuator apparatus
DE19504568A1 (de) * 1995-02-11 1996-08-14 Zeiss Carl Fa Kippspiegelanordnung
DE19739879A1 (de) 1996-09-19 1998-03-26 Zeiss Carl Fa Kippvorrichtung
EP0831269B1 (de) 1996-09-19 2003-09-10 Carl Zeiss Kippvorrichtung
US5992032A (en) * 1997-02-24 1999-11-30 Chung-Shan Institute Of Science & Technology Method and apparatus for inclination measurement using piezoelectric effect
US5883712A (en) * 1997-05-21 1999-03-16 Nicolet Instrument Corporation Interferometer of an infrared spectrometer with dynamic moving mirror alignment
US6230976B1 (en) * 1998-10-19 2001-05-15 Psc Scanning, Inc. Pinless dithering assembly for data reading
US6137622A (en) * 1999-06-30 2000-10-24 Raytheon Company Kinematic actuator deformable mirror
TW508653B (en) 2000-03-24 2002-11-01 Asml Netherlands Bv Lithographic projection apparatus and integrated circuit manufacturing method
US6411426B1 (en) * 2000-04-25 2002-06-25 Asml, Us, Inc. Apparatus, system, and method for active compensation of aberrations in an optical system
DE10243229B4 (de) * 2002-09-17 2005-03-03 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Optischer Kleinwinkelgenerator
ES2898459T3 (es) * 2003-07-22 2022-03-07 Polatis Ltd Dispositivos de posicionamiento de elementos ópticos
US7273289B2 (en) 2005-05-19 2007-09-25 Euv Llc Vacuum compatible, high-speed, 2-D mirror tilt stage
DE102005023985A1 (de) * 2005-05-20 2006-11-23 Keysystech Gmbh Laserschweißvorrichtung
TWM376769U (en) * 2009-08-28 2010-03-21 Altek Corp Prism type lens structure
CN109669267B (zh) * 2019-01-18 2021-01-05 成都理想境界科技有限公司 一种扫描致动器及光纤扫描器
CN110095860B (zh) * 2019-04-29 2021-05-25 汕头大学 一种两级复合大行程高精度快速反射镜
CN113189737B (zh) * 2021-04-27 2022-12-30 重庆大学 一种滑轨组装型复合控制式的快速反射镜

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340544A (en) * 1972-05-02 1978-04-13 Zeiss Stiftung Method of producing light compatible multiple focus spectacles lens
JPS55151614A (en) * 1979-05-17 1980-11-26 Nippon Telegr & Teleph Corp <Ntt> Laser beam deflecting device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE724183C (de) * 1940-08-20 1942-08-20 Aeg Anordnung zum Justieren von Objekttraegern, Blenden u. dgl. in Elektronenmikroskopen
FR1578046A (US20030199744A1-20031023-C00003.png) * 1968-05-10 1969-08-14
US3981566A (en) * 1974-09-23 1976-09-21 Eastman Kodak Company Lever-action mountings for beam steerer mirrors
US4161652A (en) * 1976-12-24 1979-07-17 Office National D'etudes Et De Recherches Aerospatiales System for optically aiming a laser beam on to a target
US4203654A (en) * 1977-11-10 1980-05-20 The United States Of America As Represented By The Secretary Of The Air Force Line-of-sight stabilization reflector assembly
DE3332416A1 (de) * 1983-09-08 1985-03-21 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Richtspiegel mit stabilisierungseinrichtung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340544A (en) * 1972-05-02 1978-04-13 Zeiss Stiftung Method of producing light compatible multiple focus spectacles lens
JPS55151614A (en) * 1979-05-17 1980-11-26 Nippon Telegr & Teleph Corp <Ntt> Laser beam deflecting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4705365A (en) * 1984-12-01 1987-11-10 Ngk Spark Plug Co., Ltd. Light deflecting apparatus
JPS6482343A (en) * 1987-09-24 1989-03-28 Teac Corp Tracking servo-device
CN110376705A (zh) * 2019-07-17 2019-10-25 北京安洲科技有限公司 一种倾斜角度可调的多用途漫反射标准板

Also Published As

Publication number Publication date
EP0154870A3 (de) 1987-07-22
US4660941A (en) 1987-04-28
EP0154870A2 (de) 1985-09-18
JPH0441808B2 (US20030199744A1-20031023-C00003.png) 1992-07-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term