JPS60176156U - リ−クテスト装置 - Google Patents

リ−クテスト装置

Info

Publication number
JPS60176156U
JPS60176156U JP6456884U JP6456884U JPS60176156U JP S60176156 U JPS60176156 U JP S60176156U JP 6456884 U JP6456884 U JP 6456884U JP 6456884 U JP6456884 U JP 6456884U JP S60176156 U JPS60176156 U JP S60176156U
Authority
JP
Japan
Prior art keywords
exhaust system
leak test
chamber
test
test device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6456884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226048Y2 (enExample
Inventor
有田　公治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6456884U priority Critical patent/JPS60176156U/ja
Publication of JPS60176156U publication Critical patent/JPS60176156U/ja
Application granted granted Critical
Publication of JPH0226048Y2 publication Critical patent/JPH0226048Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP6456884U 1984-04-30 1984-04-30 リ−クテスト装置 Granted JPS60176156U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6456884U JPS60176156U (ja) 1984-04-30 1984-04-30 リ−クテスト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6456884U JPS60176156U (ja) 1984-04-30 1984-04-30 リ−クテスト装置

Publications (2)

Publication Number Publication Date
JPS60176156U true JPS60176156U (ja) 1985-11-21
JPH0226048Y2 JPH0226048Y2 (enExample) 1990-07-17

Family

ID=30595776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6456884U Granted JPS60176156U (ja) 1984-04-30 1984-04-30 リ−クテスト装置

Country Status (1)

Country Link
JP (1) JPS60176156U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147337A (ja) * 1985-12-17 1987-07-01 ウエブ、テクノロジ−、インコ−ポレ−テツド 電子部品パッケージの密閉度試験方法
JP2012242316A (ja) * 2011-05-23 2012-12-10 Fukuda:Kk リークテスト用掃除装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1240491B1 (de) * 1999-12-22 2008-10-08 Inficon GmbH Verfahren zum betrieb eines folien-lecksuchers sowie für die durchführung dieses verfahrens geeigneter folien-lecksucher

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147337A (ja) * 1985-12-17 1987-07-01 ウエブ、テクノロジ−、インコ−ポレ−テツド 電子部品パッケージの密閉度試験方法
JP2012242316A (ja) * 2011-05-23 2012-12-10 Fukuda:Kk リークテスト用掃除装置

Also Published As

Publication number Publication date
JPH0226048Y2 (enExample) 1990-07-17

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