JPS60168072A - 載物台 - Google Patents
載物台Info
- Publication number
- JPS60168072A JPS60168072A JP2387584A JP2387584A JPS60168072A JP S60168072 A JPS60168072 A JP S60168072A JP 2387584 A JP2387584 A JP 2387584A JP 2387584 A JP2387584 A JP 2387584A JP S60168072 A JPS60168072 A JP S60168072A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- moving means
- orthogonal
- base
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002783 friction material Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000021110 pickles Nutrition 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
- Machine Tool Units (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2387584A JPS60168072A (ja) | 1984-02-10 | 1984-02-10 | 載物台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2387584A JPS60168072A (ja) | 1984-02-10 | 1984-02-10 | 載物台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60168072A true JPS60168072A (ja) | 1985-08-31 |
| JPH0372957B2 JPH0372957B2 (enExample) | 1991-11-20 |
Family
ID=12122618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2387584A Granted JPS60168072A (ja) | 1984-02-10 | 1984-02-10 | 載物台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60168072A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0248894U (enExample) * | 1988-09-30 | 1990-04-04 | ||
| JPH045328U (enExample) * | 1990-04-27 | 1992-01-17 | ||
| JP2011235971A (ja) * | 2010-04-30 | 2011-11-24 | Hirata Corp | 移動装置および移動方法 |
-
1984
- 1984-02-10 JP JP2387584A patent/JPS60168072A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0248894U (enExample) * | 1988-09-30 | 1990-04-04 | ||
| JPH045328U (enExample) * | 1990-04-27 | 1992-01-17 | ||
| JP2011235971A (ja) * | 2010-04-30 | 2011-11-24 | Hirata Corp | 移動装置および移動方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0372957B2 (enExample) | 1991-11-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5760564A (en) | Dual guide beam stage mechanism with yaw control | |
| US5309847A (en) | Adjustably movable work table | |
| TWI500990B (zh) | 具抗傾斜結構之電磁驅動鏡頭裝置 | |
| US3720849A (en) | Magnetic-kinematic precision stages | |
| DE3888102D1 (de) | Einrichtung zur Durchführung der Zustellbewegung eines Arbeitsorgans zu einer Arbeitsstation. | |
| US3508806A (en) | Positioning apparatus | |
| NL8700445A (nl) | Positioneertafel voor een samengestelde beweging. | |
| US3508835A (en) | Measuring microscope | |
| CN110836641A (zh) | 一种零件异形表面微结构三维尺寸的检测方法及检测设备 | |
| JPS60168072A (ja) | 載物台 | |
| US4157818A (en) | X-Y Movable work holder | |
| CN211262128U (zh) | 零件异形表面微结构三维尺寸的检测设备 | |
| JPS60168118A (ja) | 光学機器 | |
| US4247162A (en) | Rectilinear drive apparatus | |
| CN113385930B (zh) | 一种视觉引导组装校正方法 | |
| JPH09211337A (ja) | 載物台 | |
| CN210293958U (zh) | 一种加持装置及显微镜 | |
| JPS58106514A (ja) | 載物台 | |
| CN210347364U (zh) | 一种多连杆加载装置及显微镜 | |
| CN210293959U (zh) | 一种多连杆加载装置及显微镜 | |
| CN110082232A (zh) | 一种加持装置及显微镜 | |
| JPH03221336A (ja) | 可動ステージ装置 | |
| JPS58109238A (ja) | 位置出しテ−ブル装置 | |
| JP3184371B2 (ja) | シングルプレート型ｘ−ｙテーブル装置 | |
| CN211681229U (zh) | 投影装置及其车床 |