JPS60168043A - Ｆｅｔ型センサ - Google Patents

Ｆｅｔ型センサ

Info

Publication number
JPS60168043A
JPS60168043A JP59023598A JP2359884A JPS60168043A JP S60168043 A JPS60168043 A JP S60168043A JP 59023598 A JP59023598 A JP 59023598A JP 2359884 A JP2359884 A JP 2359884A JP S60168043 A JPS60168043 A JP S60168043A
Authority
JP
Japan
Prior art keywords
fet
sensitive body
film
moisture
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59023598A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415902B2 (enrdf_load_html_response
Inventor
Masanori Watanabe
昌規 渡辺
Masaya Masukawa
正也 枅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59023598A priority Critical patent/JPS60168043A/ja
Priority to US06/697,640 priority patent/US4698657A/en
Priority to GB08503061A priority patent/GB2156150B/en
Priority to DE19853504401 priority patent/DE3504401A1/de
Publication of JPS60168043A publication Critical patent/JPS60168043A/ja
Publication of JPH0415902B2 publication Critical patent/JPH0415902B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP59023598A 1984-02-10 1984-02-10 Ｆｅｔ型センサ Granted JPS60168043A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP59023598A JPS60168043A (ja) 1984-02-10 1984-02-10 Ｆｅｔ型センサ
US06/697,640 US4698657A (en) 1984-02-10 1985-02-04 FET type sensor and a method for driving the same
GB08503061A GB2156150B (en) 1984-02-10 1985-02-07 Fet with an auxiliary electrode at a sensitive layer
DE19853504401 DE3504401A1 (de) 1984-02-10 1985-02-08 Feldeffekttransistortyp-sensor und verfahren zu dessen betrieb

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59023598A JPS60168043A (ja) 1984-02-10 1984-02-10 Ｆｅｔ型センサ

Publications (2)

Publication Number Publication Date
JPS60168043A true JPS60168043A (ja) 1985-08-31
JPH0415902B2 JPH0415902B2 (enrdf_load_html_response) 1992-03-19

Family

ID=12115033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59023598A Granted JPS60168043A (ja) 1984-02-10 1984-02-10 Ｆｅｔ型センサ

Country Status (1)

Country Link
JP (1) JPS60168043A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007533988A (ja) * 2004-04-22 2007-11-22 マイクロナス ゲーエムベーハー Ｔｆｔ型ガスセンサーにおけるガスの測定方法及び／又は横感度を低減させる方法
JP2013525808A (ja) * 2010-05-06 2013-06-20 ソウル・ナショナル・ユニバーシティ・アール・アンド・ディ・ファウンデイション 容量素子センサー及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54141699A (en) * 1978-04-26 1979-11-05 Olympus Optical Co Ltd Chemically responding element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54141699A (en) * 1978-04-26 1979-11-05 Olympus Optical Co Ltd Chemically responding element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007533988A (ja) * 2004-04-22 2007-11-22 マイクロナス ゲーエムベーハー Ｔｆｔ型ガスセンサーにおけるガスの測定方法及び／又は横感度を低減させる方法
JP2013525808A (ja) * 2010-05-06 2013-06-20 ソウル・ナショナル・ユニバーシティ・アール・アンド・ディ・ファウンデイション 容量素子センサー及びその製造方法

Also Published As

Publication number Publication date
JPH0415902B2 (enrdf_load_html_response) 1992-03-19

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