JPS60167341A - 微細パタ−ン検出方法 - Google Patents

微細パタ−ン検出方法

Info

Publication number
JPS60167341A
JPS60167341A JP2162184A JP2162184A JPS60167341A JP S60167341 A JPS60167341 A JP S60167341A JP 2162184 A JP2162184 A JP 2162184A JP 2162184 A JP2162184 A JP 2162184A JP S60167341 A JPS60167341 A JP S60167341A
Authority
JP
Japan
Prior art keywords
pattern
detection method
signal
fine pattern
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2162184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576780B2 (enrdf_load_stackoverflow
Inventor
Takayoshi Oosakaya
大坂谷　隆義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2162184A priority Critical patent/JPS60167341A/ja
Publication of JPS60167341A publication Critical patent/JPS60167341A/ja
Publication of JPH0576780B2 publication Critical patent/JPH0576780B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2162184A 1984-02-10 1984-02-10 微細パタ−ン検出方法 Granted JPS60167341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2162184A JPS60167341A (ja) 1984-02-10 1984-02-10 微細パタ−ン検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2162184A JPS60167341A (ja) 1984-02-10 1984-02-10 微細パタ−ン検出方法

Publications (2)

Publication Number Publication Date
JPS60167341A true JPS60167341A (ja) 1985-08-30
JPH0576780B2 JPH0576780B2 (enrdf_load_stackoverflow) 1993-10-25

Family

ID=12060126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2162184A Granted JPS60167341A (ja) 1984-02-10 1984-02-10 微細パタ−ン検出方法

Country Status (1)

Country Link
JP (1) JPS60167341A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760206A (en) * 1980-09-30 1982-04-12 Fujitsu Ltd Measuring method for length
JPS5769234U (enrdf_load_stackoverflow) * 1980-10-15 1982-04-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760206A (en) * 1980-09-30 1982-04-12 Fujitsu Ltd Measuring method for length
JPS5769234U (enrdf_load_stackoverflow) * 1980-10-15 1982-04-26

Also Published As

Publication number Publication date
JPH0576780B2 (enrdf_load_stackoverflow) 1993-10-25

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