JPS60166808A - 形状測定装置 - Google Patents

形状測定装置

Info

Publication number
JPS60166808A
JPS60166808A JP2153784A JP2153784A JPS60166808A JP S60166808 A JPS60166808 A JP S60166808A JP 2153784 A JP2153784 A JP 2153784A JP 2153784 A JP2153784 A JP 2153784A JP S60166808 A JPS60166808 A JP S60166808A
Authority
JP
Japan
Prior art keywords
light
diffracted light
order diffracted
detector
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2153784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047803B2 (pm
Inventor
Hidekazu Sekizawa
秀和 関沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2153784A priority Critical patent/JPS60166808A/ja
Publication of JPS60166808A publication Critical patent/JPS60166808A/ja
Publication of JPH047803B2 publication Critical patent/JPH047803B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2153784A 1984-02-10 1984-02-10 形状測定装置 Granted JPS60166808A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2153784A JPS60166808A (ja) 1984-02-10 1984-02-10 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2153784A JPS60166808A (ja) 1984-02-10 1984-02-10 形状測定装置

Publications (2)

Publication Number Publication Date
JPS60166808A true JPS60166808A (ja) 1985-08-30
JPH047803B2 JPH047803B2 (pm) 1992-02-13

Family

ID=12057711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2153784A Granted JPS60166808A (ja) 1984-02-10 1984-02-10 形状測定装置

Country Status (1)

Country Link
JP (1) JPS60166808A (pm)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269602A (ja) * 1988-09-05 1990-03-08 Canon Inc 位置合わせ装置
JPH0326908A (ja) * 1989-06-26 1991-02-05 Mitsui Petrochem Ind Ltd 光ディスク用スタンパー検査装置
JPH07302441A (ja) * 1994-04-30 1995-11-14 Nec Corp 溝形状測定装置
US7515253B2 (en) 2005-01-12 2009-04-07 Kla-Tencor Technologies Corporation System for measuring a sample with a layer containing a periodic diffracting structure
US7859659B2 (en) 1998-03-06 2010-12-28 Kla-Tencor Corporation Spectroscopic scatterometer system
CN109945805A (zh) * 2019-04-09 2019-06-28 北方民族大学 一种高精度角度传感器

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0269602A (ja) * 1988-09-05 1990-03-08 Canon Inc 位置合わせ装置
JPH0326908A (ja) * 1989-06-26 1991-02-05 Mitsui Petrochem Ind Ltd 光ディスク用スタンパー検査装置
JPH07302441A (ja) * 1994-04-30 1995-11-14 Nec Corp 溝形状測定装置
US7859659B2 (en) 1998-03-06 2010-12-28 Kla-Tencor Corporation Spectroscopic scatterometer system
US7898661B2 (en) 1998-03-06 2011-03-01 Kla-Tencor Corporation Spectroscopic scatterometer system
US7515253B2 (en) 2005-01-12 2009-04-07 Kla-Tencor Technologies Corporation System for measuring a sample with a layer containing a periodic diffracting structure
CN109945805A (zh) * 2019-04-09 2019-06-28 北方民族大学 一种高精度角度传感器

Also Published As

Publication number Publication date
JPH047803B2 (pm) 1992-02-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term