JPS60162905A - 光学式測定装置 - Google Patents
光学式測定装置Info
- Publication number
- JPS60162905A JPS60162905A JP1797184A JP1797184A JPS60162905A JP S60162905 A JPS60162905 A JP S60162905A JP 1797184 A JP1797184 A JP 1797184A JP 1797184 A JP1797184 A JP 1797184A JP S60162905 A JPS60162905 A JP S60162905A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- light beam
- optical axis
- mirror
- scanning light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 63
- 230000004075 alteration Effects 0.000 claims abstract description 8
- 230000001788 irregular Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1797184A JPS60162905A (ja) | 1984-02-03 | 1984-02-03 | 光学式測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1797184A JPS60162905A (ja) | 1984-02-03 | 1984-02-03 | 光学式測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60162905A true JPS60162905A (ja) | 1985-08-24 |
| JPH0380242B2 JPH0380242B2 (enrdf_load_stackoverflow) | 1991-12-24 |
Family
ID=11958613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1797184A Granted JPS60162905A (ja) | 1984-02-03 | 1984-02-03 | 光学式測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60162905A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5821711A (ja) * | 1981-07-31 | 1983-02-08 | Fujitsu Ltd | 光学装置 |
-
1984
- 1984-02-03 JP JP1797184A patent/JPS60162905A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5821711A (ja) * | 1981-07-31 | 1983-02-08 | Fujitsu Ltd | 光学装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0380242B2 (enrdf_load_stackoverflow) | 1991-12-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |