JPS60158741U - 半導体基板のチヤツキング装置 - Google Patents

半導体基板のチヤツキング装置

Info

Publication number
JPS60158741U
JPS60158741U JP4516684U JP4516684U JPS60158741U JP S60158741 U JPS60158741 U JP S60158741U JP 4516684 U JP4516684 U JP 4516684U JP 4516684 U JP4516684 U JP 4516684U JP S60158741 U JPS60158741 U JP S60158741U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
substrate
pair
base member
substrate holders
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4516684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019170Y2 (cs
Inventor
仲　孝幸
原口　龍仁
牛嶋　義定
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP4516684U priority Critical patent/JPS60158741U/ja
Publication of JPS60158741U publication Critical patent/JPS60158741U/ja
Application granted granted Critical
Publication of JPH019170Y2 publication Critical patent/JPH019170Y2/ja
Granted legal-status Critical Current

Links

JP4516684U 1984-03-30 1984-03-30 半導体基板のチヤツキング装置 Granted JPS60158741U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4516684U JPS60158741U (ja) 1984-03-30 1984-03-30 半導体基板のチヤツキング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4516684U JPS60158741U (ja) 1984-03-30 1984-03-30 半導体基板のチヤツキング装置

Publications (2)

Publication Number Publication Date
JPS60158741U true JPS60158741U (ja) 1985-10-22
JPH019170Y2 JPH019170Y2 (cs) 1989-03-13

Family

ID=30558421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4516684U Granted JPS60158741U (ja) 1984-03-30 1984-03-30 半導体基板のチヤツキング装置

Country Status (1)

Country Link
JP (1) JPS60158741U (cs)

Also Published As

Publication number Publication date
JPH019170Y2 (cs) 1989-03-13

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