JPS60152070A - 圧覚センサ - Google Patents
圧覚センサInfo
- Publication number
- JPS60152070A JPS60152070A JP59007669A JP766984A JPS60152070A JP S60152070 A JPS60152070 A JP S60152070A JP 59007669 A JP59007669 A JP 59007669A JP 766984 A JP766984 A JP 766984A JP S60152070 A JPS60152070 A JP S60152070A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- semiconductor substrate
- substrate
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59007669A JPS60152070A (ja) | 1984-01-19 | 1984-01-19 | 圧覚センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59007669A JPS60152070A (ja) | 1984-01-19 | 1984-01-19 | 圧覚センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60152070A true JPS60152070A (ja) | 1985-08-10 |
| JPH0473302B2 JPH0473302B2 (enrdf_load_stackoverflow) | 1992-11-20 |
Family
ID=11672206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59007669A Granted JPS60152070A (ja) | 1984-01-19 | 1984-01-19 | 圧覚センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60152070A (enrdf_load_stackoverflow) |
-
1984
- 1984-01-19 JP JP59007669A patent/JPS60152070A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0473302B2 (enrdf_load_stackoverflow) | 1992-11-20 |
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