JPS6015007B2 - Thermistor bolometer - Google Patents
Thermistor bolometerInfo
- Publication number
- JPS6015007B2 JPS6015007B2 JP7856378A JP7856378A JPS6015007B2 JP S6015007 B2 JPS6015007 B2 JP S6015007B2 JP 7856378 A JP7856378 A JP 7856378A JP 7856378 A JP7856378 A JP 7856378A JP S6015007 B2 JPS6015007 B2 JP S6015007B2
- Authority
- JP
- Japan
- Prior art keywords
- thermistor
- thin film
- bolometer
- glass substrate
- molybdenum oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 11
- 239000010408 film Substances 0.000 claims description 10
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- MZZUATUOLXMCEY-UHFFFAOYSA-N cobalt manganese Chemical compound [Mn].[Co] MZZUATUOLXMCEY-UHFFFAOYSA-N 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 235000007516 Chrysanthemum Nutrition 0.000 description 1
- 244000189548 Chrysanthemum x morifolium Species 0.000 description 1
- 229910020632 Co Mn Inorganic materials 0.000 description 1
- 229910020678 Co—Mn Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Thermistors And Varistors (AREA)
Description
【発明の詳細な説明】
本発明は、熱形検出器の一つであるサーミスタ・ボロメ
ータに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thermistor bolometer, which is one type of thermal detector.
従来公知のサーミスタ・ボロメータは、ガラス系基板上
に直接サーミス夕材料の薄膜を形成したものである。A conventionally known thermistor bolometer is one in which a thin film of thermistor material is formed directly on a glass substrate.
しかしながらこのような従来のサ−ミスタ・ボロメー外
こあっては与えるバイアス電流によって比較的大きな電
流性雑音を発生するものが多かった。この電流性雑音は
、サーミスタ材料の薄膜内に存在する微少なクラック（
亀裂）に起因していると考えられている。そして、この
クラックは、薄膜の内部応力とガラス基板との付着力の
バランスが崩れ、内部応力の方が大きくなったとき発生
するものと思われる。ここにおいて、本発明の目的は、
薄膜の微少なクラック等の発生を抑え低雑音の薄膜サー
ミス夕・ボロメータを実現しようとするものである。However, many of these conventional thermistor bolometers generate relatively large current noise due to the applied bias current. This current noise is caused by minute cracks (
It is believed that this is caused by cracks. It is thought that this crack occurs when the balance between the internal stress of the thin film and the adhesion force with the glass substrate is lost, and the internal stress becomes larger. Here, the purpose of the present invention is to
The aim is to suppress the occurrence of minute cracks in the thin film and realize a low-noise thin film thermistor/bolometer.
本発明においては、ガラス系基板上にまずモリブデン（
Ｍｏ）薄膜を形成し、これに熱酸化することによって酸
化モリブデン膜とし、この酸化モリブデン膜上にサーミ
スタ材料薄膜を形成するようにした点に特徴がある。第
１図は本発明にかかわるサーミスタ・ボロメータの斜視
図である。In the present invention, molybdenum (
The present invention is characterized in that a Mo) thin film is formed and thermally oxidized to form a molybdenum oxide film, and a thermistor material thin film is formed on this molybdenum oxide film. FIG. 1 is a perspective view of a thermistor bolometer according to the present invention.
図において、１はガラス基板２はこのガラス基板上に構
成された酸化モリブデン膜、３はこの酸化モリブデン膜
上に形成したサ−ミスタ材料薄膜で、例えばコバルト・
マンガン（Ｃｏ−Ｍｎ）が用いられる。４１，４２はこ
のサーミスタ材料３の両端に結合する電極、５１，５２
はこの電極に接続されたりード線である。In the figure, 1 is a glass substrate 2, which is a molybdenum oxide film formed on this glass substrate, and 3 is a thermistor material thin film formed on this molybdenum oxide film, such as cobalt.
Manganese (Co-Mn) is used. 41, 42 are electrodes connected to both ends of this thermistor material 3; 51, 52;
is the ground wire connected to this electrode.
このように構成したサーミスタ・ボロメータは次のよう
にして製作される。（ｉ｝ ガラス基板１を洗浄する。The thermistor bolometer thus constructed is manufactured as follows. (i} Clean the glass substrate 1.
（ｉｉ）ガラス基板１上に例えばスパッタリング法によ
ってモリブデ薄膜２を形成する。(ii) A molybde thin film 2 is formed on the glass substrate 1 by, for example, a sputtering method.
（ｉｉｉ） これを熱酸化し、例えば厚さ０．２仏ｍ程
度の酸化モリブデン薄膜とする。(iii) This is thermally oxidized to form a thin molybdenum oxide film having a thickness of, for example, about 0.2 mm.
ＧＭ この酸化モリブデン薄膜上に、例えば真空蒸着で
、コバルト・マンガン薄膜を形成する。GM A cobalt-manganese thin film is formed on this molybdenum oxide thin film, for example, by vacuum evaporation.
Ｍ コバルト・マンガン薄膜の両端に電極材料、を例え
ば金属マスクを通して蒸着し、電極を形成する。肌 電
極４１，４２にリード線５１，５２をボンデングする。M An electrode material is deposited on both ends of the cobalt-manganese thin film through, for example, a metal mask to form electrodes. Lead wires 51 and 52 are bonded to the skin electrodes 41 and 42.
このような構成したサーミスタ・ボロメータは、ガラス
基板１上に構成した酸化モリブデン膜の表面粗さが０．
１〜０．２ムｍ程度の凹凸をもった表面を呈することと
なる。In the thermistor/bolometer constructed as described above, the surface roughness of the molybdenum oxide film constructed on the glass substrate 1 is 0.
The surface will have an unevenness of about 1 to 0.2 mm.
このためこの細かな凹凸表面に形成するコバルト・マン
ガン薄膜のガラス基板に対する付着力が強まり、電流性
雑音の原因となるクラックが発生しなくなる。なお、第
１図の例では酸化モリブデン膜はガラス基板１の全面に
設けた場合について示してあるが、サーミスタ材料が形
成される部分のみに設けるようにしてもよい。第２図は
本発明にかかわるサーミスタ・ポロメータの実験結果の
一例を示す特性図で、５ＨＺにおけるノイズ電圧Ｖｎを
バンド幅ＩＨＺ、バイアス電圧２２Ｖで測定した時のＲ
ＭＳ値を示す。Therefore, the adhesion of the cobalt-manganese thin film formed on the finely uneven surface to the glass substrate is strengthened, and cracks that cause current-related noise are no longer generated. Although the example in FIG. 1 shows the case where the molybdenum oxide film is provided on the entire surface of the glass substrate 1, it may be provided only on the portion where the thermistor material is to be formed. Figure 2 is a characteristic diagram showing an example of the experimental results of the thermistor porometer according to the present invention.
Indicates MS value.
なお、サ−ミスタ・ボロメータは５５ｏｏでの高温に放
置された状態である。この実験結果からも明らかなよう
に、本発明によれば、長時間に亘つて低雑音を維持でき
るサーミスタ・ボロメータが実現できる。Note that the thermistor bolometer was left at a high temperature of 55 oo. As is clear from the experimental results, according to the present invention, a thermistor bolometer that can maintain low noise for a long period of time can be realized.
第１図は本発明にかかわるサーミス夕・ボロメー夕の斜
視図、第２図は本発明にかかわるサーミスタ・ボロメー
タの実験結果の一例を示す特性図である。
１……ガラス基板、２・・…・酸化モリブデン膜、３…
…サーミス夕材料薄膜、４１，４２……電極、５１，５
２・・・・・・リード線。
努′図
菊ｚ図FIG. 1 is a perspective view of a thermistor/bolometer according to the present invention, and FIG. 2 is a characteristic diagram showing an example of experimental results of the thermistor/bolometer according to the present invention. 1...Glass substrate, 2...Molybdenum oxide film, 3...
...Thermistor material thin film, 41, 42... Electrode, 51, 5
2... Lead wire. Tsutomu's chrysanthemum
Claims (1)
リブデン膜、この酸化モリブデン膜上に形成したサーミ
スタ材料薄膜で構成するサーミスタ・ボロメータ。 ２ サーミスタ材料としてコバルト・マンガンを用いた
特許請求の範囲第１項記載のサーミスタ・ボロメータ。[Scope of Claims] 1. A thermistor bolometer comprising a glass substrate, a molybdenum oxide film provided on the glass substrate, and a thermistor material thin film formed on the molybdenum oxide film. 2. The thermistor bolometer according to claim 1, which uses cobalt-manganese as the thermistor material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7856378A JPS6015007B2 (en) | 1978-06-30 | 1978-06-30 | Thermistor bolometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7856378A JPS6015007B2 (en) | 1978-06-30 | 1978-06-30 | Thermistor bolometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS556245A JPS556245A (en) | 1980-01-17 |
| JPS6015007B2 true JPS6015007B2 (en) | 1985-04-17 |
Family
ID=13665361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7856378A Expired JPS6015007B2 (en) | 1978-06-30 | 1978-06-30 | Thermistor bolometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6015007B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4574263A (en) * | 1980-09-24 | 1986-03-04 | The Commonwealth Of Australia | Infrared radiation detector |
-
1978
- 1978-06-30 JP JP7856378A patent/JPS6015007B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS556245A (en) | 1980-01-17 |
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