JPS60147932A - Magnetic recording medium manufacturing device - Google Patents

Magnetic recording medium manufacturing device

Info

Publication number
JPS60147932A
JPS60147932A JP225184A JP225184A JPS60147932A JP S60147932 A JPS60147932 A JP S60147932A JP 225184 A JP225184 A JP 225184A JP 225184 A JP225184 A JP 225184A JP S60147932 A JPS60147932 A JP S60147932A
Authority
JP
Japan
Prior art keywords
polymer film
magnetic recording
recording medium
film
high polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP225184A
Other languages
Japanese (ja)
Inventor
Ikuo Sakai
郁夫 坂井
Kunyu Sumita
住田 勲勇
Yasuhiko Nakayama
中山 靖彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP225184A priority Critical patent/JPS60147932A/en
Publication of JPS60147932A publication Critical patent/JPS60147932A/en
Pending legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To manufacture a magnetic recording medium with good surface property by providing a cooling roller to the exit of a high polymer film wound on a can. CONSTITUTION:When the high polymer film 13 wound on the can 14 passes through an upper part of a vapor-deposition source 15 installed oppositely to the can 14 at a prescribed speed, a magnetic metallic particle emitted from the vapor deposition source 15 is adhered on the high polymer film 13 so as to form continuously a metallic thin film on the high polymer film 13 supplied continuously from a winding roll 11. The high polymer film 13 adhered with the metallic thin film reaches a high temperature by the radiation heat from the vapor deposition source 15 in this case, the film is cooled while being in contact with the cooling roller 17 and wound on the winding roll 16 and then, no heat is stored in the winding roll 16 and a job for a long time is conducted while the winding roll is kept always to a low temperature.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、Fe 、 Co 、 Ni 等の強磁性金属
またはそれらの合金からなる磁性金属薄膜等の製造に使
用される磁気記録媒体製造装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus used for manufacturing magnetic metal thin films made of ferromagnetic metals such as Fe, Co, Ni, etc. or alloys thereof. be.

従来例の構成とその問題点 近年、磁気記録装置の高記録密度化に伴ない、従来から
使用されているγ−Fe2O3の針状結晶をバインダー
と共にベースフィルムに塗布した塗布型記録媒体に対し
、金属薄膜型磁気記録媒体の研究開発が行なわれている
。これらの磁気記録媒体は非磁性のベースフィルムの上
に、真空蒸着法。
Structure of conventional example and its problems In recent years, with the increase in recording density of magnetic recording devices, the conventional coating type recording medium in which acicular crystals of γ-Fe2O3 are coated on a base film together with a binder has been changed. Research and development of metal thin film magnetic recording media is underway. These magnetic recording media are made using a vacuum evaporation method on top of a non-magnetic base film.

スパッタリング法、イオンブレーティング法等の方法に
より磁性金属を形成するものであり、塗布型記録媒体に
比べ薄くすることから高記録密度化の点から有利である
。また、従来の長手記録方式に対し、同じく、真空蒸着
法、スパッタリング法。
A magnetic metal is formed by a method such as a sputtering method or an ion blasting method, and since it is thinner than a coating type recording medium, it is advantageous in terms of high recording density. In addition, in contrast to the conventional longitudinal recording method, vacuum evaporation and sputtering methods are also available.

イオンブレーティング法等の方法により、垂直磁気異方
性を有する金属磁性層を形成した記録媒体に適している
垂直磁気記録方式が提案されており、この方式によれば
、従来の磁気記録方式の10倍程度の高記録密度が可能
になる。
A perpendicular magnetic recording method has been proposed that is suitable for recording media in which a metal magnetic layer with perpendicular magnetic anisotropy is formed using a method such as the ion blating method. It becomes possible to achieve a recording density about 10 times higher.

これら各方式の磁気記録媒体を製造する各種製造装置が
提案されている。以下図面を参照しながら、従来の金属
薄膜型磁気記録媒体の製造装置について説明する。
Various manufacturing apparatuses for manufacturing magnetic recording media of each of these types have been proposed. A conventional manufacturing apparatus for a metal thin film magnetic recording medium will be described below with reference to the drawings.

第1図は従来の磁気記録媒体の製造装置の真空槽内部の
構造を示す正面図である。図において、1は巻き出しロ
ール、2はガイドローラで、3は巻き出しロールから送
り出された高分子フィルム、4は高分子フィルム3が巻
き付いた円筒状キャン、6は円筒状キャン4に対向して
設置された磁性金属蒸発源、6は磁性金属薄膜の付着し
た高分子フィルムを巻き取る巻き取りロールである。
FIG. 1 is a front view showing the internal structure of a vacuum chamber of a conventional magnetic recording medium manufacturing apparatus. In the figure, 1 is an unwinding roll, 2 is a guide roller, 3 is a polymer film sent out from the unwinding roll, 4 is a cylindrical can around which the polymer film 3 is wound, and 6 is a cylinder facing the cylindrical can 4. A magnetic metal evaporation source 6 is installed at the center, and 6 is a take-up roll for winding up the polymer film with the magnetic metal thin film attached thereto.

以上のような磁気記録媒体の製造装置は、キャン4が一
定速度で回転することによって、キャン4に巻き付けら
れた高分子フィルム3が、蒸発源6の上を一定速度で通
過するとき、蒸発源5から飛び出した金属粒子が高分子
フィルム3の上に付着することによって高分子フィルム
3の上に連続的に金属膜を形成することができる。この
ときキャン4は熱媒によシ一定温度に保たれ、高分子フ
ィルム3を密着させ、蒸発源6からの輻射熱に、よって
高分子フィルム3が熱負けするのを防止している。
In the magnetic recording medium manufacturing apparatus as described above, when the can 4 rotates at a constant speed and the polymer film 3 wound around the can 4 passes over the evaporation source 6 at a constant speed, the evaporation source By adhering the metal particles ejected from the polymer film 3 onto the polymer film 3, a metal film can be continuously formed on the polymer film 3. At this time, the can 4 is kept at a constant temperature by a heating medium, and the polymer film 3 is brought into close contact with the can 4 to prevent the polymer film 3 from being damaged by the radiant heat from the evaporation source 6.

しかしながら、上記のような磁気記録媒体の製造装置で
は、蒸発源5からの輻射熱が金属薄膜の形成された高分
子フィルム3に蓄積されたまま巻キ取すロール6に巻か
れるため巻き取りロール6に熱が蓄積され、さらに、蒸
発源6からの輻射熱が形成された金属薄膜を伝わって巻
き取りロール6に壕で達するため、巻き取りロール6は
かなり高温に保たれたままとなってし壕う。このため巻
き取りロール6に巻きとられた高分子フィルム3の金属
薄膜の形成された面の裏面から長時間にわたって徐々に
オリゴマーが発生し、巻き取りロール6に巻き取られて
いる高分子フィルム3の金属薄膜の表面にこのオリゴマ
ーが転写されてし捷い磁気記録媒体として表面性が低下
し、記録再生時の磁気ヘッドと磁気記録媒体とのスペー
シングを大きくシ、再生信号出力の低下、記録密度特性
の劣化を引き起す欠点を有していた。
However, in the magnetic recording medium manufacturing apparatus as described above, the radiant heat from the evaporation source 5 is accumulated in the polymer film 3 on which the metal thin film is formed and is wound around the take-up roll 6. In addition, the radiant heat from the evaporation source 6 is transmitted through the formed metal thin film and reaches the take-up roll 6 at a groove, so the take-up roll 6 remains at a fairly high temperature. cormorant. For this reason, oligomers are gradually generated over a long period of time from the back side of the surface on which the metal thin film is formed of the polymer film 3 wound on the take-up roll 6, and oligomers are gradually generated from the back side of the polymer film 3 wound on the take-up roll 6. This oligomer is transferred to the surface of the thin metal film of the magnetic recording medium, resulting in a decrease in the surface properties of the magnetic recording medium, which greatly reduces the spacing between the magnetic head and the magnetic recording medium during recording and reproduction, resulting in a decrease in the reproduction signal output, and a decrease in the recording This had the disadvantage of causing deterioration of density characteristics.

発明の目的 本発明は以上のような従来の問題点を解決するためにな
されたもので、連続して長時間にわたって生産しても、
オリゴマーのない表面性の良い金属薄膜磁気記録媒体を
生産できる磁気記録媒体製造装置を提供することを目的
とする。
Purpose of the Invention The present invention has been made to solve the above-mentioned conventional problems.
An object of the present invention is to provide a magnetic recording medium manufacturing apparatus capable of producing a thin metal film magnetic recording medium free of oligomers and having good surface properties.

発明の構成 本発明による基本構成は、巻き出しロールと円筒状キャ
ンとこのキャンに対向して磁性金属蒸発源を備え、キャ
ンと巻き取りロールの間に冷却ローラを設置するごとに
より高分子フィルムを冷却しオリゴマーの発生を防止し
、表面性の良い磁気記録媒体を製作できるようにしたも
のである。
Structure of the Invention The basic structure of the present invention includes an unwinding roll, a cylindrical can, and a magnetic metal evaporation source facing the can, and a cooling roller is installed between the can and the take-up roll to prevent the polymer film from being heated. By cooling, the generation of oligomers is prevented, and magnetic recording media with good surface properties can be manufactured.

実施例の説明 以下に本発明の一実施例を図面を用いて説明する。Description of examples An embodiment of the present invention will be described below with reference to the drawings.

第2図は本発明の一実施例における磁気記録媒体製造装
置の真空槽内部の正面図である。図において、11は巻
き出しロール、12はガイドローラ、13は巻き出しロ
ールから送り出された高分子フィルム、14は高分子フ
ィルム13が巻き付いた円筒状キャン、16は円筒状キ
ャン14に対向して設置された磁性金属蒸発源、16は
磁性金属の付着した高分子フィルムを巻き取る巻き取り
ロール、17はキャン14と巻き取りロールの間に設置
された冷却ローラである。
FIG. 2 is a front view of the inside of a vacuum chamber of a magnetic recording medium manufacturing apparatus in one embodiment of the present invention. In the figure, 11 is an unwinding roll, 12 is a guide roller, 13 is a polymer film sent out from the unwinding roll, 14 is a cylindrical can around which the polymer film 13 is wound, and 16 is a cylindrical can facing the cylindrical can 14. A magnetic metal evaporation source is installed, 16 is a take-up roll for winding up the polymer film to which the magnetic metal is attached, and 17 is a cooling roller installed between the can 14 and the take-up roll.

以上のように構成された磁気記録媒体の製造装置につい
て、以下その動作を説明する。キャン14に巻き付けら
れた高分子フィルム13が、キャン14に対向して設置
されている蒸発源15の上を一定速度で通過するとき、
蒸発源15から飛び出した磁性金属粒子が高分子フィル
ム13の上に付着することによって、巻き出しロール1
1から連続的に送り出される高分子フィルム13の上に
連続的に金属薄膜を形成する。このとき金属薄膜の付着
した高分子フィルム13は蒸発源16からの輻射熱によ
って高温になっているが、冷却ローラ17に接触して冷
却された後、巻き取りロール16に巻き取られるため、
巻き取りロール16に熱は蓄積されず、また、高分子フ
ィルム13の上に形成された金属膜を通して蒸発源16
からの輻射熱が冷却ローラ17によってしゃ断されるた
め巻き取りロール16は常に低温に保たれ、連続して長
時間にわたり金属膜形成を行なっても、高分子フィルム
からほとんどオリゴマーが出ない。従来例によって製作
したものでは1000〜1ooo。
The operation of the magnetic recording medium manufacturing apparatus configured as above will be described below. When the polymer film 13 wrapped around the can 14 passes at a constant speed over the evaporation source 15 installed opposite the can 14,
When the magnetic metal particles ejected from the evaporation source 15 adhere to the polymer film 13, the unwinding roll 1
A metal thin film is continuously formed on a polymer film 13 that is continuously fed out from 1. At this time, the polymer film 13 to which the metal thin film is attached is at a high temperature due to the radiant heat from the evaporation source 16, but after being cooled by contacting the cooling roller 17, it is wound up by the winding roll 16.
Heat is not accumulated in the take-up roll 16, and heat is not accumulated in the evaporation source 16 through the metal film formed on the polymer film 13.
Since the radiant heat from the polymer film is blocked by the cooling roller 17, the take-up roll 16 is always kept at a low temperature, and even if the metal film is continuously formed for a long time, almost no oligomer comes out from the polymer film. 1000 to 100 for those manufactured according to the conventional example.

個/−程度のオリゴマーであったものが本実施例で製作
したものでは10〜100個/−程度に低減できる。
The number of oligomers produced in this example can be reduced to about 10 to 100 oligomers.

発明の効果 以上のように本発明は、円筒状キャンと巻き取りロール
の間に冷却ローラを備えたものであるため、高分子フィ
ルム上の金属膜形成時に蓄えられた蒸発源の輻射熱を冷
却ローラで取9のぞき、さらに高分子フィルム上に形成
された金属薄膜を通じて伝わる蒸発源の輻射熱を冷却ロ
ーラでしゃ断するため、巻き取りロールは常に低温に保
たれ、高分子フィルムからオリゴマーが析出することな
く表面性の非常に良い優れた磁気記録媒体を製作できる
Effects of the Invention As described above, since the present invention is equipped with a cooling roller between the cylindrical can and the take-up roll, the radiant heat of the evaporation source accumulated during the formation of the metal film on the polymer film is transferred to the cooling roller. In addition, the cooling roller blocks the radiant heat from the evaporation source transmitted through the metal thin film formed on the polymer film, so the take-up roll is always kept at a low temperature to prevent oligomers from precipitating from the polymer film. Excellent magnetic recording media with very good surface properties can be manufactured.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の磁気記録媒体製造装置の真空槽内部を示
す正面図、第2図は本発明の一実施例における磁気記録
媒体製造装置の真空槽内部を示す正面図である。 11・・・・・・巻き出しロール、12・・・・・・ガ
イドローラ、13・・・・・・高−分子フィルム、14
・・・・・・円筒状キャン、16・・・・・・磁性金属
蒸発源、16・・・・・・巻き取りロール、17・・・
・・・冷却ローラ。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
II!J 第25!1
FIG. 1 is a front view showing the inside of a vacuum chamber of a conventional magnetic recording medium manufacturing apparatus, and FIG. 2 is a front view showing the inside of a vacuum chamber of a magnetic recording medium manufacturing apparatus according to an embodiment of the present invention. 11... Unwinding roll, 12... Guide roller, 13... Polymer film, 14
... Cylindrical can, 16 ... Magnetic metal evaporation source, 16 ... Winding roll, 17 ...
...cooling roller. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
II! J No. 25!1

Claims (1)

【特許請求の範囲】[Claims] 真空槽内に高分子フィルムを巻き付ける円筒状キャンと
、前記キャンに対向して設けられた磁性金属蒸発源とを
少なくとも有し、前記キャンに巻き付けられた高分子フ
ィルムの出側に冷却ローラを備えたことを特徴とする磁
気記録媒体製造装置。
It has at least a cylindrical can around which a polymer film is wound in a vacuum chamber, and a magnetic metal evaporation source provided opposite to the can, and a cooling roller is provided on the exit side of the polymer film wound around the can. A magnetic recording medium manufacturing apparatus characterized by:
JP225184A 1984-01-10 1984-01-10 Magnetic recording medium manufacturing device Pending JPS60147932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP225184A JPS60147932A (en) 1984-01-10 1984-01-10 Magnetic recording medium manufacturing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP225184A JPS60147932A (en) 1984-01-10 1984-01-10 Magnetic recording medium manufacturing device

Publications (1)

Publication Number Publication Date
JPS60147932A true JPS60147932A (en) 1985-08-05

Family

ID=11524140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP225184A Pending JPS60147932A (en) 1984-01-10 1984-01-10 Magnetic recording medium manufacturing device

Country Status (1)

Country Link
JP (1) JPS60147932A (en)

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