JPS60146438A - イオンビ−ム発生装置 - Google Patents

イオンビ−ム発生装置

Info

Publication number
JPS60146438A
JPS60146438A JP58252132A JP25213283A JPS60146438A JP S60146438 A JPS60146438 A JP S60146438A JP 58252132 A JP58252132 A JP 58252132A JP 25213283 A JP25213283 A JP 25213283A JP S60146438 A JPS60146438 A JP S60146438A
Authority
JP
Japan
Prior art keywords
target
ion
laser beam
point
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58252132A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562420B2 (enrdf_load_stackoverflow
Inventor
Hiroyoshi Soejima
啓義 副島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58252132A priority Critical patent/JPS60146438A/ja
Publication of JPS60146438A publication Critical patent/JPS60146438A/ja
Publication of JPH0562420B2 publication Critical patent/JPH0562420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58252132A 1983-12-30 1983-12-30 イオンビ−ム発生装置 Granted JPS60146438A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58252132A JPS60146438A (ja) 1983-12-30 1983-12-30 イオンビ−ム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58252132A JPS60146438A (ja) 1983-12-30 1983-12-30 イオンビ−ム発生装置

Publications (2)

Publication Number Publication Date
JPS60146438A true JPS60146438A (ja) 1985-08-02
JPH0562420B2 JPH0562420B2 (enrdf_load_stackoverflow) 1993-09-08

Family

ID=17232920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58252132A Granted JPS60146438A (ja) 1983-12-30 1983-12-30 イオンビ−ム発生装置

Country Status (1)

Country Link
JP (1) JPS60146438A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372054A (ja) * 1986-09-12 1988-04-01 Shimadzu Corp 試料面分析装置
JPH0458441A (ja) * 1990-06-26 1992-02-25 Japan Steel Works Ltd:The 金属イオン源
US6620624B1 (en) 2000-08-10 2003-09-16 Okazaki National Research Institutes Mass spectrometry interface, a mass spectrometer and a mass spectrometry

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372054A (ja) * 1986-09-12 1988-04-01 Shimadzu Corp 試料面分析装置
JPH0458441A (ja) * 1990-06-26 1992-02-25 Japan Steel Works Ltd:The 金属イオン源
US6620624B1 (en) 2000-08-10 2003-09-16 Okazaki National Research Institutes Mass spectrometry interface, a mass spectrometer and a mass spectrometry
EP1221713A3 (en) * 2000-08-10 2005-12-07 Okazaki National Research Institutes Mass spectrometry

Also Published As

Publication number Publication date
JPH0562420B2 (enrdf_load_stackoverflow) 1993-09-08

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