JPS60146225A - Electro-optical device - Google Patents

Abstract

PURPOSE:To prevent a metallic thin film from peeling off by dividing a terminal part of an electro-optical device into minute areas, and reducing an internal stress of the whole metallic thin film of the terminal part. CONSTITUTION:A terminal 2 is formed to a stripe shape which has made a slit 5 of 50mum width at every 100mum (a) by photoetching a tantalum thin film of 500nm thickness DC-spattered on a glass substrate, and to a shape which has made a hole 6 of 50mum square (b) and a hole 7 of 50mumphi (c) at a pitch of 100mum in length and breadth. A Pyrex glass substrate on which these terminals are formed, that which has formed a heat oxidation tantalum pentoxide film on the ground by a mat shape, and a Pyrex glass substrate on which the terminal is formed without the ground are put into a furnace of 150-400 deg.C as goods to be compared, and a thermal impulse is applied. In this case, the terminal of the mat shape having no ground peels off at 250 deg.C or below, but no peeling is generated in the terminal of other shape.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to '1[C pneumatic equipment. Second, it relates to electro-optical devices that combine nonlinear elements or active elements with liquid crystals.

[Prior art]

Conventionally, Kinzo-insulating film- whose voltage-current characteristics are non-linear
An electro-optical device that combines a liquid crystal with a nonlinear element such as an element having a metal T14 structure (hereinafter referred to as a child), a diode, or an fjU dynamic element such as a thin film transistor (hereinafter referred to as TPT). At t, arrange each element on the prefectural board using 42 leakage 1 that forms '+Vr!, and make a crazy connection with 1115 outside the board ☆:f
11 children 1°? It was common to use the same material for the wires and terminals.The first shape of the wires and terminals was as shown in the figure below. 'lll comb ,+,:g 2 was made as large as possible to facilitate mounting of the electro-optical device.

Large electro-optical device, +1/++ is 10rIn on one side
If you try to make something like this, the wiring will be long and the wiring resistance will be high, which will not have a negative effect on the display quality. To avoid this, we used gold H5, which has a low specific resistance, and made the wiring layer thicker to lower the wiring resistance.

However, when a gold L[S thin film is formed on a glass substrate generally used in electrochemical devices, the internal stress of 'F+'jI is large, so the metal thin film is damaged due to temperature fluctuations during the manufacturing process. 4. easily peels off and other thin films. D materials were used as the base material, but this required the use of vacuum equipment, which increased manufacturing costs in terms of machine investment and throughput.

〔the purpose〕

The present invention is 111. The element part of the air optical device is divided into minute regions to reduce the internal stress of the terminal metal thin film as a whole, thereby preventing the metal thin film from peeling off.

[Implementation 1! zll) Next, concrete 1&+1 will be explained according to the same quantity. Figure 2 shows the shape of the terminal actually used. Terminal 2 was made by photo-etching 500n ordinary thick tantalum thin film J14 on a Pyrex glass substrate by DC sputtering, (a) 100/7
It was formed into a stripe shape with a slit 5 of 50 μm width per m, and a shape with (h) 50 /J tn square holes 6 and (C) 50 μmφ holes 7 at a pitch of 100/1 m in length and width. A Pyrex glass substrate on which these terminals were formed, a Pyrex glass substrate with a thermal oxidation pentoxide tank/I/BA formed on the base in the solid shape shown in Figure 1, and a Pyrex glass substrate on which terminals were formed without a base were used as comparison products. ~400“
The mixture was placed in a furnace C and a hot bomb was added. As a result, peeling occurred at temperatures below 250° C. in the slip-shaped terminal without a base, but no peeling occurred in the terminals in other shapes. Also, (a)
40 for a striped terminal and a solid shape with a base.
No peeling occurred even at 0°C.

〔effect〕

As mentioned above, is it possible to divide the terminal metal thin layer into minute areas?
If you do this, the metal thin film will not peel off even on high-grade 17 products that are in the middle of the manufacturing process. In addition, in order to divide the terminal filL into minute regions, it is only necessary to change the design of the photomask used during terminal formation, and as a result, one step in the base formation process can be omitted, reducing manufacturing costs.
3. Large 'i4. 'Pneumatic optics enters the practical domain.

[Brief explanation of the drawing]

FIG. 1 shows the pattern shape of a conventional optical device manufactured by one company. 1...Metal wiring 2...Terminal 6°-°°°°°-1iii element'-IL pole 4...
...Nonlinear element FIG. 2 shows the terminal shape in the present invention. 5...Slit 6.7...hole or more Applicant: Suiwa Seikosha Co., Ltd. Person Patent Attorney Mogami Figure 1 Figure 2

Claims (1)

[Claims] 1. In an electro-optical device that combines a liquid crystal with an element exhibiting non-linear flow characteristics, the terminal portion for electrical connection between the electro-optical device and the driving circuit 11 is made of metal. R
,,The fence 1 is formed of old and the metal thin 1 of the terminal part
An electromagnetic device whose characteristic is that the opposite is divided into thin areas.