JPS6014620A - 静圧流体軸受の調整方法 - Google Patents

静圧流体軸受の調整方法

Info

Publication number
JPS6014620A
JPS6014620A JP58119679A JP11967983A JPS6014620A JP S6014620 A JPS6014620 A JP S6014620A JP 58119679 A JP58119679 A JP 58119679A JP 11967983 A JP11967983 A JP 11967983A JP S6014620 A JPS6014620 A JP S6014620A
Authority
JP
Japan
Prior art keywords
pad
sensitivity
pads
pressure
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58119679A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457894B2 (enExample
Inventor
Mikio Nakasugi
幹夫 中杉
Takao Yokomatsu
横松　孝夫
Junji Isohata
磯端　純二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58119679A priority Critical patent/JPS6014620A/ja
Priority to US06/623,473 priority patent/US4588288A/en
Publication of JPS6014620A publication Critical patent/JPS6014620A/ja
Publication of JPH0457894B2 publication Critical patent/JPH0457894B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP58119679A 1983-07-01 1983-07-01 静圧流体軸受の調整方法 Granted JPS6014620A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58119679A JPS6014620A (ja) 1983-07-01 1983-07-01 静圧流体軸受の調整方法
US06/623,473 US4588288A (en) 1983-07-01 1984-06-22 Static pressure bearing and transport device utilizing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58119679A JPS6014620A (ja) 1983-07-01 1983-07-01 静圧流体軸受の調整方法

Publications (2)

Publication Number Publication Date
JPS6014620A true JPS6014620A (ja) 1985-01-25
JPH0457894B2 JPH0457894B2 (enExample) 1992-09-16

Family

ID=14767361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58119679A Granted JPS6014620A (ja) 1983-07-01 1983-07-01 静圧流体軸受の調整方法

Country Status (1)

Country Link
JP (1) JPS6014620A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63232912A (ja) * 1987-03-19 1988-09-28 Canon Inc 流体軸受装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2715294B1 (fr) 1994-01-26 1996-03-22 Oreal Composition cosmétique ou dermatologique anhydre contenant l'association d'une huile de silicone et d'une cire d'un homo- ou copolymère d'éthylène .

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63232912A (ja) * 1987-03-19 1988-09-28 Canon Inc 流体軸受装置

Also Published As

Publication number Publication date
JPH0457894B2 (enExample) 1992-09-16

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