JPS60142531A - 回路基板等の検査装置 - Google Patents
回路基板等の検査装置Info
- Publication number
- JPS60142531A JPS60142531A JP25015683A JP25015683A JPS60142531A JP S60142531 A JPS60142531 A JP S60142531A JP 25015683 A JP25015683 A JP 25015683A JP 25015683 A JP25015683 A JP 25015683A JP S60142531 A JPS60142531 A JP S60142531A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- probe
- contact probe
- support plate
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 title claims description 18
- 239000000758 substrate Substances 0.000 title 1
- 239000000523 sample Substances 0.000 claims abstract description 129
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- 238000012360 testing method Methods 0.000 claims description 14
- 238000005452 bending Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 2
- 235000009037 Panicum miliaceum subsp. ruderale Nutrition 0.000 claims 1
- 244000022185 broomcorn panic Species 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25015683A JPS60142531A (ja) | 1983-12-28 | 1983-12-28 | 回路基板等の検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25015683A JPS60142531A (ja) | 1983-12-28 | 1983-12-28 | 回路基板等の検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60142531A true JPS60142531A (ja) | 1985-07-27 |
| JPH0249536B2 JPH0249536B2 (enrdf_load_stackoverflow) | 1990-10-30 |
Family
ID=17203652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25015683A Granted JPS60142531A (ja) | 1983-12-28 | 1983-12-28 | 回路基板等の検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60142531A (enrdf_load_stackoverflow) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56148071A (en) * | 1980-04-21 | 1981-11-17 | Nippon Denshi Zairyo Kk | Multiple needle type probe |
| JPS587835A (ja) * | 1981-06-30 | 1983-01-17 | インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン | プロ−ブ・アツセンブリ− |
| JPS5880847A (ja) * | 1981-11-02 | 1983-05-16 | ジヨセフ・クバトロニツク | マトリクス・テスト・ヘッド装置 |
-
1983
- 1983-12-28 JP JP25015683A patent/JPS60142531A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56148071A (en) * | 1980-04-21 | 1981-11-17 | Nippon Denshi Zairyo Kk | Multiple needle type probe |
| JPS587835A (ja) * | 1981-06-30 | 1983-01-17 | インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン | プロ−ブ・アツセンブリ− |
| JPS5880847A (ja) * | 1981-11-02 | 1983-05-16 | ジヨセフ・クバトロニツク | マトリクス・テスト・ヘッド装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249536B2 (enrdf_load_stackoverflow) | 1990-10-30 |
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